DMS filter, electroacoustic filter and multiplexer
An improved DMS filter with electrode structures between a first port and a second port is provided. Wiring junctions are realized in multilayer crossing with dielectric material in between. There are insulating patches (L 2 ) between crossing conductor layers (L 1 ,L 3 ). Signal wirings may be realized with multiple conductor layers (L 1 , L 3 ) to reduce wiring resistance and the upper conductor layer (L 3 ) of the signal wiring may partly overlap the insulating patches (L 2 ). The insulating patches (L 2 ) may extend over the acoustic path to achieve temperature compensation.
1. A DMS filter, comprising:
a first port and a second port;
a piezoelectric material; and
an electrode structure arranged above or on the piezoelectric material and electrically connected between the first port and the second port, wherein:
the electrode structure has a multi layer construction,
the multi layer construction comprises metal and dielectric material, the electrode structure comprising:
a first reflector and a second reflector;
first IDTs and second IDTs, wherein the first IDTs and the second IDTs are arranged between the first and the second reflectors; and
a first inter IDT connection and a second inter IDT connection, wherein:
each of the first IDTs and each of the second IDTs have a first busbar and a first connection and a second busbar and a second connection,
the first busbar and the first connection of each of the first IDTs are electrically connected via the first inter IDT connection,
the second busbar and the second connection of each of the second IDTs are electrically connected via the second inter IDT connection, and
wherein the first inter IDT connection and the second inter IDT connection each comprise a lower metal strip and an upper metal strip.
2. The DMS filter of claim 1 , wherein the electrode structure further comprises:
a third inter IDT connection and a fourth inter IDT connection,
wherein each of the third inter IDT connection and the fourth inter IDT connection comprises an inner metal strip.
3. The DMS filter of claim 2 , wherein the dielectric material of the electrode structure comprises:
first insulating patches between the third inter IDT connection and the first connection of at least a portion of the first IDTs; and
second insulating patches between the fourth inter IDT connection and the second connection of at least a portion of the second IDTs.
4. The DMS filter of claim 1 , wherein:
the lower metal strip of each of the first inter IDT connection and of the second inter IDT connection is formed from a first layer,
the upper metal strip of each of the first inter IDT connection and of the second inter IDT connection is formed from a third layer, and
the dielectric material of the multi layer construction comprises insulating patches in a second layer between the first layer and the third layer.
5. The DMS filter of claim 4 , wherein the third layer has a higher thickness than the first layer.
6. The DMS filter of claim 4 , wherein the upper metal strip of the first inter IDT connection overlaps the insulating patches.
7. The DMS filter of claim 2 , wherein the third inter IDT connection and the fourth inter IDT connection are connected to a ground potential.
8. The DMS filter of claim 1 , wherein the first IDTs are input IDTs and the second IDTs are output IDTs.
9. The DMS filter of claim 1 , further comprising a TC layer.
10. The DMS filter of claim 9 , where the TC layer is configured as an insulator for line crossings.
11. The DMS filter of claim 1 , being a TF-SAW DMS filter.
12. The DMS filter of claim 4 , wherein the upper metal strip of the second inter IDT connection (IIC 2 ) overlaps the insulating patches.
13. The DMS filter of claim 3 , wherein the inner metal strip of the third inter IDT connection is located on top of the first insulating patches.
14. The DMS filter of claim 4 , wherein:
the upper metal strip of the first inter IDT connection fully covers the lower metal strip of the first inter IDT connection.
15. The DMS filter of claim 14 , wherein the insulating patches do not overlap the lower metal strip.
16. The DMS filter of claim 4 , wherein the upper metal strip of the second inter IDT connection fully covers the lower metal strip of the second inter IDT connection.
17. The DMS filter of claim 1 , wherein the dielectric material of the multi layer construction comprises insulating patches that overlap the first connection of at least a portion of the first IDTs and the second connection of at least a portion of the second IDTs.
18. The DMS filter of claim 17 , wherein the insulating patches do not overlap the first busbar of each of the first IDTs.
19. The DMS filter of claim 1 , wherein the DMS filter is included as part of an electroacoustic filter, the DMS filter being an 11-IDT DMS filter.
20. The DMS filter of claim 1 , wherein the DMS filter is included as part of a multiplexer.
21. The DMS filter of claim 3 , wherein the inner metal strip of the fourth inter IDT connection is located on top of the second insulating patches.
22. A DMS filter, comprising:
a first port and a second port;
a piezoelectric material; and
an electrode structure arranged above or on the piezoelectric material and electrically connected between the first port and the second port, wherein:
the electrode structure has a multi layer construction,
the multi layer construction comprises metal and dielectric material, the electrode structure comprising:
a first reflector and a second reflector;
first IDTs and second IDTs, wherein the first IDTs and the second IDTs are arranged between the first and the second reflectors; and
a first inter IDT connection and a second inter IDT connection, wherein:
each of the first IDTs and each of the second IDTs have a first busbar and a first connection and a second busbar and a second connection,
the first busbar and the first connection of each of the first IDTs are electrically connected via the first inter IDT connection,
the second busbar and the second connection of each of the second IDTs are electrically connected via the second inter IDT connection, and
wherein the dielectric material of the multi layer construction comprises insulating patches that overlap the first connection of each of the first IDTs and the second connection of each of the second IDTs.
23. A DMS filter, comprising:
a first port and a second port;
a piezoelectric material; and
an electrode structure arranged above or on the piezoelectric material and electrically connected between the first port and the second port, wherein:
the electrode structure has a multi layer construction,
the multi layer construction comprises metal and dielectric material, the electrode structure comprising:
a first reflector and a second reflector;
first IDTs and second IDTs, wherein the first IDTs and the second IDTs are arranged between the first and the second reflectors;
a first inter IDT connection and a second inter IDT connection; and
a third inter IDT connection and fourth inter IDT connection, wherein:
each of the first IDTs and each of the second IDTs have a first busbar and a first connection and a second busbar and a second connection,
the first busbar and the first connection of each of the first IDTs are electrically connected via the first inter IDT connection,
the second busbar and the second connection of each of the second IDTs are electrically connected via the second inter IDT connection, and
each of the third inter IDT connection and the fourth inter IDT connection comprises an inner metal strip.