Method of fabricating display device having patterned lithium-based transition metal oxide
The present disclosure generally relates to display systems, and more particularly to augmented reality display systems and methods of fabricating the same. A method of fabricating a display device includes providing a substrate comprising a lithium (Li)-based oxide and forming an etch mask pattern exposing regions of the substrate. The method additionally includes plasma etching the exposed regions of the substrate using a gas mixture comprising CHF3 to form a diffractive optical element, wherein the diffractive optical element comprises Li-based oxide features configured to diffract visible light incident thereon.
1. A method of fabricating a display device, the method comprising:
providing a substrate comprising a lithium (Li)-based oxide;
forming an etch mask pattern exposing regions of the substrate; and
plasma etching the exposed regions of the substrate using a gas mixture consisting essentially of H 2 , CHF 3 and Ar to form a diffractive optical element,
wherein the diffractive optical element comprises Li-based oxide features configured to diffract visible light incident thereon.
2. The method of claim 1 , wherein the diffractive optical element comprises a diffraction grating.
3. The method of claim 1 , wherein the etch mask pattern periodically exposes the substrate such that the Li-based oxide features periodically repeat in a lateral direction.
4. The method of claim 1 , wherein a ratio of volumes of CHF 3 to H 2 in the gas mixture is in a range of 10:1 to 1:10.
5. The method of claim 1 , wherein the Ar in the gas mixture is in a range of 10% to 90% on the basis of a total volume of the gas mixture.
6. The method of claim 1 , wherein plasma etching comprises etching at a rate of 1 nm/min. to 30 nm/min.
7. The method of claim 1 , wherein plasma etching comprises etching using a plasma generated by dual RF frequencies.
8. The method of claim 1 , wherein plasma etching comprises etching using a plasma generated by an RF power in a range of 50 W to 500 W.
9. The method of claim 1 , wherein plasma etching comprises etching in a reaction chamber at a pressure of 10 mTorr to 50 mTorr.
10. The method of claim 1 , wherein plasma etching comprises etching the substrate selectively against the etch mask pattern at an etch rate selectivity ratio of 1:0.1 to 1:5.
11. The method of claim 1 , wherein forming the etch mask pattern comprises forming using a lithography technique.
12. The method of claim 1 , wherein forming the etch mask pattern comprises forming using a nanoimprinting technique.
13. The method of claim 1 , wherein the etch mask pattern is formed of a photoresist, a dielectric material, a metal or a composite material.
14. The method of claim 1 , wherein the etch mask pattern is formed of a metal or a metal alloy.
15. The method of claim 1 , further comprising wet cleaning the substrate subsequent to plasma etching in a solution comprising ammonium hydroxide, hydrogen peroxide and water.
16. The method of claim 1 , wherein the Li-based oxide features have a refractive index greater than 2.0.
17. The method of claim 1 , wherein the Li-based oxide features comprise a lithium niobate or a lithium tantalate.
18. The method of claim 1 , wherein the Li-based oxide features have a height of 10 nm to 200 nm.
19. The method claim 1 , wherein the Li-based oxide features periodically repeat at a pitch in a range of 200 nm to 1 μm.
20. The method of claim 1 , wherein the Li-based oxide features have a duty cycle of 0.1 to 0.9.
21. The method of claim 1 , wherein forming the diffractive optical element comprises forming the diffractive optical element on a waveguide configured to guide visible light in a lateral direction crossing a direction of the visible light incident on the diffractive optical element.
22. The method of claim 1 , wherein forming the diffractive optical element comprises forming on a waveguide comprising the Li-based oxide.
23. The method of claim 1 , wherein the diffractive optical element is formed on the substrate comprising a waveguide, and wherein the waveguide is integrated with the diffractive optical element as a monolithically integrated structure.
24. The method of claim 1 , wherein the diffractive optical element is formed on a waveguide, and wherein the waveguide comprises a material different from the Li-based oxide.
25. The method of claim 1 , wherein the diffractive optical element serves as an incoupling optical element formed on the substrate that serves as a waveguide to couple light into the waveguide.
26. The method of claim 1 , wherein the diffractive optical element serves as an outcoupling optical element formed on the substrate that serves as a waveguide to couple light out of the waveguide.
27. The method of claim 1 , wherein the diffractive optical element is formed on the substrate comprising a waveguide configured to guide visible light having any wavelength in the visible spectrum that is incoupled or outcoupled by the diffractive optical element.
28. The method of claim 1 , wherein the diffractive optical element is formed on the substrate comprising a waveguide configured to guide visible light that is incoupled by or outcoupled through the diffractive optical element via total internal reflection.