PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF MEASURING AT LEAST ONE OF A PROPERTY OF A FLEXIBLE SUBSTRATE AND A PROPERTY OF ONE OR MORE COATINGS ON THE FLEXIBLE SUBSTRATE
A processing system for processing a flexible substrate is described. The processing system includes a vacuum chamber having a wall with an opening for the flexible substrate, a substrate support for supporting the flexible substrate during transportation of the flexible substrate through the opening, and a measurement assembly for measuring at least one of a property of the flexible substrate and a property of one or more coatings on the flexible substrate. The measurement assembly and the substrate support are attached to the wall.
1 . A processing system for processing a flexible substrate, comprising
a vacuum chamber having a wall with an opening for the flexible substrate;
a substrate support for supporting the flexible substrate during transportation of the flexible substrate through the opening; and
a measurement assembly for measuring at least one of a property of the flexible substrate and a property of one or more coatings on the flexible substrate, the measurement assembly and the substrate support being attached to the wall.
2 . The processing system for processing a flexible substrate of claim 1 , the substrate support being part of a sealing device, for sealing the opening.
3 . The processing system for processing a flexible substrate of claim 1 , the measurement assembly comprising a measurement device holder holding two or more measurement devices, the measurement device holder being attached to the wall.
4 . The processing system for processing a flexible substrate of claim 3 , further comprising one or more spacers providing a gap between the sealing device and the measurement device holder.
5 . The processing system for processing a flexible substrate of claim 3 . the measurement device holder being made of a material having a coefficient of thermal expansion α of α≤4×10 −6 K −1 .
6 . The processing system for processing a flexible substrate of claim 1 , the measurement assembly comprising a first measurement device for measuring a front side of the flexible substrate and an opposite second measurement device for measuring a backside of the flexible substrate.
7 . The processing system for processing a flexible substrate of claim 2 , the measurement assembly being attached to the wall via the sealing device.
8 . The processing system for processing a flexible substrate of claim 1 , the measurement assembly being configured for measuring a coating thickness on the flexible substrate.
9 . The processing system for processing a flexible substrate of claim 1 , the substrate processing system being a roll-to-roll processing system having a coating drum configured for guiding the flexible substrate past one or more deposition units.
10 . The processing system for processing a flexible substrate of claim 9 , wherein at least one of the one or more deposition units are configured for providing a lithium coating on the flexible substrate.
11 . The processing system for processing a flexible substrate of claim 9 , the measurement assembly comprising a first measurement assembly being arranged upstream from the coating drum, and the substrate processing system further comprising one or more further measurement assemblies being arranged downstream from the coating drum.
12 . The processing system for processing a flexible substrate of claim 11 , the one or more further measurement assemblies being attached to a further wall opposite the wall, the further wall having a further opening for the flexible substrate, and wherein a further substrate support for supporting the flexible substrate during transportation of the flexible substrate through the further opening is attached to the further wall.
13 . A multiple drum roll-to-roll processing system for coating a flexible substrate on both sides, comprising
a first vacuum deposition chamber having a first coating drum configured for guiding the flexible substrate past one or more first deposition units,
a second vacuum deposition chamber having a second coating drum configured for guiding the flexible substrate past one or more second deposition units,
a transportation system configured for transporting the flexible substrate such that a front side of the flexible substrate faces the one or more first deposition units and a backside of the flexible substrate faces the one or more second deposition units,
a first thickness measurement assembly attached to a wall of the first vacuum deposition chamber having a first opening for the flexible substrate;
a second thickness measurement assembly attached to a wall of the second vacuum deposition chamber having a second opening for the flexible substrate; and
a third thickness measurement assembly attached to a wall of the second vacuum deposition chamber having a third opening for the flexible substrate.
14 . A method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate, the method comprising
supporting the flexible substrate by a substrate support during transportation of the flexible substrate through an opening provided in a wall of a vacuum chamber, the substrate support being attached to the wall, and
measuring at least one of a property of the flexible substrate and a property of one or more coatings on the flexible substrate by using a measurement assembly attached to the wall.
15 . The method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate of claim 14 , wherein at least one of the one or more coatings is a lithium coating, and the at least one of a property is a thickness.
16 . The method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate of claim 14 , wherein the flexible substrate is selected from the group consisting of a polymeric substrate, a metallic substrate, and polymeric substrate with a metallic coating.
17 . The processing system for processing a flexible substrate of claim 1 , wherein substrate support is part of a gap sluice.
18 . The processing system for processing a flexible substrate of claim 5 , wherein the material is selected from a nickel-iron alloy and Invar.
19 . The processing system for processing a flexible substrate of claim 6 , wherein the first measurement device and the second measurement device are laser interferometers.
20 . The processing system for processing a flexible substrate of claim 8 , wherein the measurement assembly is configured for measuring a thickness of a top coating and a thickness of a back coating on the flexible substrate.