IP Library Granted Patent US 12,028,991
Granted Patent B2
US 12,028,991 · App. 17/444,796 · Granted Jul 2, 2024

Guided transport path correction

Inventors: Eliyahu Vronsky (Los Altos, CA); Karl Mathia (Menlo Park, CA); Alexander Sou-Kang Ko (Santa Clara, CA)
Assignee: Kateeva, Inc.
H05K3/4644B05C5/0208B05D5/12B41J3/407B41J13/0027B41J29/393H05K3/4679H10K99/00B41J2/01H01L21/67H01L21/6715H01L21/6776H01L21/67784H01L21/68H01L21/683H05K2203/0104H05K2203/013H05K2203/0736H05K2203/166H10K71/135
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Quick Facts
Patent No.
US 12,028,991
App. No.
17/444,796
Granted
Jul 2, 2024
Kind
B2
Abstract

A printer deposits material onto a substrate as part of a manufacturing process for an electronic product; at least one transported component experiences error, which affects the deposition. This error is mitigated using transducers that equalize position of the component, e.g., to provide an “ideal” conveyance path, thereby permitting precise droplet placement notwithstanding the error. In one embodiment, an optical guide (e.g., using a laser) is used to define a desired path; sensors mounted to the component dynamically detect deviation from this path, with this deviation then being used to drive the transducers to immediately counteract the deviation. This error correction scheme can be applied to correct for more than type of transport error, for example, to correct for error in a substrate transport path, a printhead transport path and/or split-axis transport non-orthogonality.

Claims (35)

1. A method, comprising:

relatively moving a material source and a substrate while depositing material from the material source on the substrate;

extending an optical beam from an optical source to an optical detector located at a fixed distance from the material source, the substrate, or both;

detecting, using the optical detector, movement of the optical detector with respect to the optical beam; and

moving the material source, the substrate, or both to cause the position of the optical detector to remain coincident with the optical beam while depositing the material from the material source on the substrate.

2. The method of claim 1 , further comprising engaging the substrate with a gripper and using the gripper to move the substrate.

3. The method of claim 2 , further comprising supporting the substrate on a gas cushion while depositing the material on the substrate.

4. The method of claim 3 , wherein the gripper comprises a linear transducer, and moving the material source, the substrate, or both to cause the position of the optical detector to remain coincident with the optical beam comprises driving the transducer to move in a linear direction orthogonal to a transport path of the substrate.

5. The method of claim 4 , wherein the optical source is a laser.

6. The method of claim 5 , wherein the optical detector is attached to the gripper.

7. The method of claim 6 , wherein the gripper is supported on a track substantially parallel to the optical beam.

8. The method of claim 7 , wherein the gripper comprises a first part that travels along the track, and a second part to which the optical detector is attached, and the linear transducer couples the first part with the second part.

9. The method of claim 8 , wherein the linear transducer is a voice coil.

10. The method of claim 9 , wherein the linear transducer is a first linear transducer, and the method further comprises coupling a second linear transducer to the first part and the second part to rotate the second part with respect to the first part by independent movement of the first and second linear transducers.

11. A method, comprising:

relatively moving a substrate with respect to a material source along a transport path while depositing material from the material source on the substrate;

extending an optical beam from an optical source to an optical detector located at a fixed distance from the material source, the substrate, or both;

detecting, using the optical detector, movement of the optical detector with respect to the optical beam; and

moving the substrate in a linear direction orthogonal to the transport path to cause the position of the optical detector to remain coincident with the optical beam while depositing the material from the material source on the substrate.

12. The method of claim 11 , further comprising supporting the substrate on a gas cushion and engaging the substrate with a gripper to move the substrate.

13. The method of claim 12 , wherein the gripper comprises a first part that moves along a track, a second part that engages with the substrate, and a linear transducer that couples the first part with the second part, and moving the substrate in the linear direction orthogonal to the transport path comprises driving the linear transducer in the linear direction orthogonal to the transport path.

14. The method of claim 13 , further comprising using the gripper to rotate the substrate.

15. The method of claim 14 , wherein the optical detector is a first optical detector and the linear transducer is a first linear transducer, and the method further comprises using a second optical detector to detect movement of the second optical detector with respect to the optical beam and moving the substrate in the linear direction orthogonal to the transport path comprises commonly driving the first and second linear transducers in the linear direction orthogonal to the transport path.

16. The method of claim 15 , wherein using the gripper to rotate the substrate comprises differentially driving the first and second linear transducers in the linear direction orthogonal to the transport path.

17. A method, comprising:

supporting a substrate on a gas cushion;

engaging a gripper with the substrate;

depositing material from a material source on the substrate;

moving the gripper engaged along a transport path while depositing material from the material source on the substrate;

extending an optical beam from an optical source to an optical detector attached to the gripper;

detecting, using the optical detector, movement of the optical detector with respect to the optical beam; and

moving the substrate in a linear direction orthogonal to the transport path to cause the position of the optical detector to remain coincident with the optical beam while depositing the material from the material source on the substrate.

18. The method of claim 17 , wherein the gripper comprises a first part that moves along a track and a second part that engages with the substrate, and the optical detector is attached to the second part.

19. The method of claim 18 , wherein the gripper further comprises a mechanical linkage coupling the first part and the second part, wherein the mechanical linkage constrains the second part to move along the transport path with the first part and allows the second part to move in a direction orthogonal to the transport path with respect to the first part.

20. The method of claim 19 , wherein moving the substrate in the linear direction orthogonal to the transport path comprises driving a voice coil coupled to the first part and the second part in the linear direction.

Assignments (3)
SECURITY INTEREST Recorded Apr 19, 2022
From: KATEEVA CAYMAN HOLDING, INC.
To: HB SOLUTION CO., LTD.
Reel/Frame 059727/0111 →
SECURITY INTEREST Recorded Mar 17, 2022
From: KATEEVA, INC.; KATEEVA CAYMAN HOLDING, INC.
To: SINO XIN JI LIMITED
Reel/Frame 059382/0053 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2021
From: VRONSKY, ELIYAHU; MATHIA, KARL; KO, ALEXANDER SOU-KANG
To: KATEEVA, INC.
Reel/Frame 057702/0657 →