Method of jetting print material using ejector devices and methods of making the ejector devices
A method of making an ejector device. The method includes providing a substrate and forming one or more ejector conduits on the substrate. The one or more ejector conduits comprise: a first end configured to accept a print material; a second end comprising an ejector nozzle, the ejector nozzle comprising a first electrode pair that includes a first electrode and a second electrode, at least one surface of the first electrode being exposed in the ejector nozzle and at least one surface of the second electrode being exposed in the ejector nozzle; and at least one passageway for allowing the print material to flow from the first end to the second end. A method of printing a three-dimensional object and a method for jetting print material from a printer jetting mechanism are also disclosed.
1. A method of making an ejector device, the method comprising:
providing a substrate; and
forming one or more ejector conduits on the substrate, the one or more ejector conduits comprising:
a first end configured to accept a print material;
a second end comprising an ejector nozzle, the ejector nozzle comprising a first electrode pair that includes a first electrode and a second electrode, at least one surface of the first electrode being exposed in the ejector nozzle and at least one surface of the second electrode being exposed in the ejector nozzle; and
at least one passageway for allowing the print material to flow from the first end to the second end; and
wherein the first electrode pair is formed by a process comprising depositing a conductive layer on the substrate and patterning the conductive layer to form the first electrode and the second electrode, the conductive layer comprising a first metal.
2. The method of claim 1 , further comprising depositing a passivation layer on the first electrode pair, the passivation layer comprising a second metal that is different than the first metal.
3. The method of claim 1 , wherein the first electrode pair is formed by a process comprising:
etching a plurality of trenches in the substrate; and
filling the trenches with a conductive material to form the first electrode and the second electrode, the conductive material comprising a metal.
4. The method of claim 1 , wherein the at least one passageway is formed by a process comprising:
depositing a sidewall layer on the first electrode pair; and
patterning the sidewall layer to form a plurality of channels in an insulating layer, the channels comprising a first sidewall proximate the first electrode and a second sidewall proximate the second electrode, a distance between the first sidewall and the second sidewall determining a width of the passageway.
5. The method of claim 4 , wherein the first electrode and the second electrode each have a width and a height, the width being greater than the height, the first sidewall being formed on the first electrode and the second sidewall being formed on the second electrode.
6. The method of claim 4 , wherein the first sidewall is on the first electrode and the second sidewall is on the second electrode, the first electrode and the second electrode being raised above the substrate so as to form sidewall portions of the plurality of channels.
7. The method of claim 4 , wherein the first electrode and the second electrode each have a width and a height, the width being less than the height.
8. The method of claim 1 , wherein the substrate comprises a buried insulating layer, the method further comprising:
etching a plurality of trenches in the substrate; and
filling the trenches with a conductive material to form the first electrode and the second electrode, the conductive material comprising a metal; and
etching to remove a portion of the substrate between the first electrode and the second electrode to form the at least one passageway.
9. The method of claim 8 , further comprising removing a portion of the buried insulating layer below the removed portions of the substrate between the first electrode and the second electrode.
10. The method of claim 1 , wherein the one or more ejector conduits are a plurality of ejector conduits arranged in an array.
11. The method of claim 1 , where the ejector device is a first ejector device and the at least one passageway being one or more open passageways, the method further comprising:
forming a second ejector device, the method comprising:
providing a second substrate;
forming one or more second ejector conduits on the second substrate, each of the one or more second ejector conduits comprising an open passageway; and
attaching the second ejector device to the first ejector device thereby enclosing the one or more open passageways of the first ejector device to form one or more first enclosed passageways and enclosing the open passageway of the one or more second ejector conduits to form one or more second enclosed passageways, the one or more first enclosed passageways being proximate the one or more second enclosed passageways.
12. The method of claim 11 , further comprising including an interposer layer between the one or more first enclosed passageways and the one or more second enclosed passageways.
13. The method of claim 11 , the attaching comprises employing removable fasteners that allow the first ejector device to be easily detached from the second ejector device after the attaching is carried out.
14. The method of claim 1 , wherein the ejector device is a microelectromechanical system (“MEMS”).