IP Library Granted Patent US 11,888,000
Granted Patent B2
US 11,888,000 · App. 17/470,178 · Granted Jan 30, 2024

Geiger-mode focal plane array with monolithically integrated resistors

Inventors: Mark Allen Itzler (Princeton, NJ); Brian Piccione (Yardley, PA); Xudong Jiang (Princeton, NJ); Krystyna Slomkowski (Parlin, NJ)
Assignee: LG INNOTEK CO., LTD.
H01L27/1446G01J1/44H01L31/02027H01L31/107G01J2001/448G01J2001/4466H01C7/006H01L27/14609
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Quick Facts
Patent No.
US 11,888,000
App. No.
17/470,178
Granted
Jan 30, 2024
Kind
B2
Abstract

A GmAPD FPA having increased tolerance optical overstress includes a limit resistor that is monolithically integrated into each pixel in the FPA, and which limits the magnitude of the current entering the read out integrated circuit.

Claims (21)

1. A method of controlling a Geiger-mode avalanche photodiode (GmAPD) focal plane array (FPA), the method comprising:

increasing, within each pixel of the GmAPD FPA, a series resistance of an electrical connection between the GmAPD and a unit cell of a read out integrated circuit (ROIC unit cell), the ROIC unit cell having an active quenching circuit.

2. The method of claim 1 , wherein the electrical connection is between an electrical contact of the GmAPD and an input of a sense transistor in the active quenching circuit within the ROIC unit cell.

3. The method of claim 1 , wherein increasing the series resistance includes increasing the series resistance by an amount in a range of about 1 kOhm to about 100 kOhms.

4. The method of claim 1 , wherein increasing the series resistance comprises using a thin-film resistor.

5. The method of claim 4 , wherein increasing the series resistance comprises monolithically integrating the thin-film resistor into each pixel of the GmAPD FPA.

6. The method of claim 5 , wherein increasing the series resistance comprises monolithically integrating the thin-film resistor into a GmAPD of each pixel of the GmAPD FPA.

7. The method of claim 5 , wherein increasing the series resistance comprises monolithically integrating the thin-film resistor into the ROIC unit cell in each pixel of the GmAPD FPA.

8. The method of claim 4 , wherein the thin-film resistor has a serpentine shape.

9. The method of claim 1 , wherein the active quenching circuit comprises an arm transistor, a disarm transistor, and a sense transistor.

10. The method of claim 1 , wherein increasing the series resistance comprises monolithically integrating a first thin-film resistor into a GmAPD of some pixels of the GmAPD FPA and integrating a second thin-film resistor into the ROIC unit cell of said some pixels of the GmAPD FPA.

11. A method of controlling a Geiger-mode avalanche photodiode (GmAPD) focal plane array (FPA), the method comprising:

monolithically integrating, into each pixel of the GmAPD FPA, a limit resistor,

wherein the limit resistor is electrically coupled in series to an electrical contact of the GmAPD and to an active quenching circuit within a unit cell of a read out integrated circuit (ROIC unit cell).

12. The method of claim 11 , wherein the electrical coupling to the active quenching circuit is to an input of a sense transistor in said active quenching circuit.

13. The method of claim 11 , wherein the limit resistor increases the series resistance of the electrical coupling by an amount in the range of about 1 kOhm to about 100 kOhms.

14. The method of claim 11 , wherein monolithically integrating the limit resistor into each pixel of the GmAPD FPA comprises monolithically integrating the limit resistor into a GmAPD in each pixel of the GmAPD FPA.

15. The method of claim 11 , wherein monolithically integrating the limit resistor into each pixel of the GmAPD FPA comprises monolithically integrating the limit resistor into a ROIC unit cell in each pixel of the GmAPD FPA.

16. The method of claim 11 , wherein monolithically integrating the limit resistor into each pixel of the GmAPD FPA comprises monolithically integrating a first limit resistor into a GmAPD of some pixels of the GmAPD FPA and integrating a second thin-film resistor into the ROIC unit cell of said some pixels of the GmAPD FPA.

17. The method of claim 11 , wherein the limit resistor is a thin-film resistor.

18. The method of claim 17 , wherein the limit resistor has a serpentine shape.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 12, 2023
From: ARGO AI, LLC
To: LG INNOTEK CO., LTD.
Reel/Frame 063311/0079 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 9, 2021
From: ITZLER, MARK ALLEN; PICCIONE, BRIAN; JIANG, XUDONG; SLOMKOWSKI, KRYSTYNA
To: ARGO AI, LLC
Reel/Frame 057427/0936 →