IP Library Granted Patent US 11,810,605
Granted Patent B2
US 11,810,605 · App. 17/488,703 · Granted Nov 7, 2023

Magnetic recording media with tungsten pre-seed layer

Inventor: Kai Tang (San Jose, CA)
Assignee: Western Digital Technologies, Inc.
G11B5/667G11B5/737G11B5/7379G11B5/8404
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Quick Facts
Patent No.
US 11,810,605
App. No.
17/488,703
Granted
Nov 7, 2023
Kind
B2
Abstract

Various apparatuses, systems, methods, and media are disclosed to provide a magnetic recording medium with a tungsten (W) pre-seed layer. The W pre-seed layer has a higher conductance than a CrTi pre-seed layer with a similar thickness. In one embodiment, the W pre-seed layer is made of about 95 atomic percent or more of W. The W pre-seed layer has lower electrical resistivity than the CrTi pre-seed layer. As a result, the thickness of the W pre-seed layer can be reduced as compared to the thickness of a CrTi pre-seed layer if a similar conductance is to be achieved. The magnetic recording materials deposited on top of the W pre-seed layer with the reduced thickness provide comparable crystallographic orientation and recording performance to those deposited on top of a thicker CrTi pre-seed layer with a similar conductance.

Claims (36)

1. A magnetic recording medium comprising:

a rigid substrate;

a pre-seed layer on the rigid substrate, the pre-seed layer comprising W and an oxide of W, wherein a resistivity of the pre-seed layer is 12×10 −8 ohm meter (Ω·m) or less, and the pre-seed layer comprises at least 95 atomic percent of W;

an amorphous soft magnetic underlayer (SUL) on the pre-seed layer;

a seed layer on the amorphous SUL; and

a magnetic recording layer (MRL) on the seed layer.

2. The magnetic recording medium of claim 1 , wherein a thickness of the pre-seed layer is less than 30 nanometers (nm).

3. The magnetic recording medium of claim 2 , wherein a thickness of the pre-seed layer is 14 nm or less.

4. The magnetic recording medium of claim 1 , wherein a conductance of the pre-seed layer with a first thickness is configured to be higher than a conductance of a pre-seed layer comprising Cr and Ti with the first thickness.

5. The magnetic recording medium of claim 1 , wherein the amorphous SUL comprises CoFe, and one or more elements selected from the group consisting of Mo, Nb, Ta, W, B, Zr, and combinations thereof.

6. The magnetic recording medium of claim 5 , wherein the amorphous SUL does not include Cr.

7. A data storage device, comprising:

a slider comprising a magnetic head; and

the magnetic recording medium of claim 1 ,

wherein the slider is configured to write information to the magnetic recording layer of the magnetic recording medium.

8. A method for manufacturing a magnetic recording medium, the method comprising:

providing a rigid substrate;

providing a pre-seed layer on the rigid substrate, the pre-seed layer comprising W and an oxide of W, wherein a resistivity of the pre-seed layer is 12×10 −8 ohm meter (Ω·m) or less, and the pre-seed layer comprises at least 95 atomic percent of W;

providing an amorphous soft magnetic underlayer (SUL) on the pre-seed layer;

providing a seed layer on the amorphous SUL; and

providing a magnetic recording layer (MRL) on the seed layer.

9. The method of claim 8 , further comprising, at least one of:

polishing the pre-seed layer; or

oxidizing the pre-seed layer.

10. The method of claim 8 , further comprising:

polishing the pre-seed layer; and

oxidizing the pre-seed layer after polishing the pre-seed layer.

11. The method of claim 8 , further comprising:

oxidizing the pre-seed layer; and

polishing the pre-seed layer after the oxidizing the pre-seed layer.

12. The method of claim 8 , wherein a thickness of the pre-seed layer is less than 30 nanometers (nm).

13. The method of claim 12 , wherein a thickness of the pre-seed layer is 14 nm or less.

14. The method of claim 8 , wherein a conductance of the pre-seed layer with a first thickness is configured to be higher than a conductance of a pre-seed layer comprising Cr and Ti with the first thickness.

15. The method of claim 8 , wherein the pre-seed layer comprises at least 95 atomic percent of W.

16. The method of claim 8 , wherein the amorphous SUL comprises Co, Fe, and one or more elements selected from the group consisting of Mo, Nb, Ta, W, B, Zr, and combinations thereof.

17. The method of claim 16 , wherein the amorphous SUL does not include Cr.

Assignments (5)
PATENT COLLATERAL AGREEMENT - A&R LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064715/0001 →
PATENT COLLATERAL AGREEMENT - DDTL LOAN AGREEMENT Recorded Aug 21, 2023
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 067045/0156 →
RELEASE OF SECURITY INTEREST AT REEL 058426 FRAME 0815 Recorded Feb 8, 2022
From: JPMORGAN CHASE BANK, N.A.
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 058965/0679 →
SECURITY INTEREST Recorded Dec 9, 2021
From: WESTERN DIGITAL TECHNOLOGIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS AGENT
Reel/Frame 058426/0815 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 29, 2021
From: TANG, KAI
To: WESTERN DIGITAL TECHNOLOGIES, INC.
Reel/Frame 057640/0125 →
Continuity (1)
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