Granted Patent B2

US 12,291,770 · App. 17/519,006 · Granted May 6, 2025

Inventors: Mingxing Liu (Kunshan, CN); Shuaiyan Gan (Kunshan, CN); Weili Li (Kunshan, CN); Bing Han (Kunshan, CN)

Assignee: KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD

C23C14/042C23C14/24H10K71/166H10K71/00

Abstract

Claims (28)

1. A manufacturing method of a mask, comprising:

providing a first substrate, wherein the first substrate comprises a first surface and a second surface that are arranged opposite to each other;

etching the first surface to form a plurality of first grooves;

etching the second surface to form a plurality of third grooves, wherein the plurality of third grooves and the plurality of first grooves are in a one-to-one correspondence, and an opening area of each of the plurality of third grooves is greater than an opening area of each of the plurality of first grooves; on the second surface, a distance between adjacent ones of the plurality of third grooves is greater than a preset distance, wherein the preset distance is greater than zero;

applying a protective layer on an edge area of a side surface of each of the plurality of third grooves closer to the second surface;, wherein on the second surface, an angle between a surface tangent of the edge area of the side surface of each of the plurality of third grooves closer to the second surface and a first direction is less than or equal to 10°, wherein the first direction is a thickness direction of the mask;

etching the plurality of third grooves to form second grooves, wherein a depth of each of the second grooves is greater than a depth of each of the plurality of third grooves, and the second grooves and the plurality of first grooves penetrate the first substrate; and

removing the protective layer.

2. The method of claim 1 , wherein the protective layer is photoresist;

and the first substrate is a metal plate.

3. The method of claim 1 , wherein a width of the protective layer applied on the edge area of the side surface of each of the plurality of third grooves closer to the second surface along a thickness direction of the first substrate is greater than 1/10 of a thickness of the first substrate and less than ⅓ of the thickness of the first substrate.

4. The method of claim 1 , wherein the angle between the surface tangent of the edge area of the side surface of each of the plurality of third grooves closer to the second surface and the first direction is less than or equal to 5°.

5. The method of claim 1 , wherein etching the second surface to form the plurality of third grooves comprises:

applying photoresist on the second surface;

patterning the photoresist;

etching the second surface by using a wet etching process to form the plurality of third grooves; and

retaining the photoresist on the second surface, till after etching the plurality of third grooves to form second grooves, removing the photoresist on the second surface.

6. The method of claim 5 , wherein etching the plurality of third grooves to form the second grooves further comprises:

etching the plurality of third grooves by using the wet etching process to form the second grooves.

7. The method of claim 5 , wherein opening areas of the patterned photoresist and the plurality of first grooves are in a one-to-one correspondence.

8. The method of claim 1 , wherein the distance between adjacent ones of the plurality of third grooves is determined according to an opening density and an opening size of the mask.

9. The method of claim 5 , wherein the protective layer is photoresist; the etching the first surface to form the plurality of first grooves comprises:

applying photoresist on the first surface;

patterning the photoresist; and

etching the first surface by using the wet etching process to form the plurality of first grooves; the removing the protective layer comprises:

removing the protective layer, the photoresist on the first surface, and the photoresist on the second surface simultaneously.

10. The method of claim 1 , wherein the surface tangent of the edge area of the side surface of each of the plurality of third grooves closer to the second surface comprises the surface tangent of a side of the edge area away from the second surface.

11. The method of claim 1 , wherein a side surface of each second groove is arranged smooth and curved.

12. The method of claim 11 , wherein the side surface of each second groove is not arranged with a concave structure and a convex structure.

Assignments (3)

Priority Claims (1)

Continuity (2)

References Cited (32)