Transversely-excited film bulk acoustic resonator filters with sub-resonators having different mark and pitch

1. A ladder filter circuit comprising:

a first chip having a first transversely-excited film bulk acoustic resonator (XBAR) fabricated thereon that comprises a first series sub-resonator and a second series sub-resonator connected in parallel; and

a second chip having a second XBAR fabricated thereon that comprises a first shunt sub-resonator and a second shunt sub-resonator connected in parallel,

wherein the first and second chips are mounted on a circuit board that provides at least one interconnection between the first XBAR and the second XBAR, and

wherein a pitch of the first series sub-resonator is not equal to a pitch of the second series sub-resonator and/or a mark of the first series sub-resonator is not equal to a mark of the second series sub-resonator.

2. The ladder filter circuit of claim 1 , wherein:

the first XBAR comprises three or more series sub-resonators including the first and second series sub-resonators, and

each of the three or more series sub-resonators has a unique pitch and/or each of the three or more series sub-resonators has a unique mark.

3. The ladder filter circuit of claim 2 , wherein each of the three or more series sub-resonators has a unique pitch and a unique mark.

4. The ladder filter circuit of claim 2 , wherein the first XBAR comprises four series sub-resonators including the first and second series sub-resonators.

5. The ladder filter circuit of claim 1 , wherein a pitch of the first shunt sub-resonator is not equal to a pitch of the second shunt sub-resonator and/or a mark of the first shunt sub-resonator is not equal to a mark of the second shunt sub-resonator.

6. A ladder filter circuit, comprising:

a first chip having a first plurality of transversely-excited film bulk acoustic resonators (XBARs) fabricated thereon, at least a first XBAR of the first plurality of XBARs comprising a first series sub-resonator and a second series sub-resonator connected in parallel, each series sub-resonator comprising a piezoelectric diaphragm and an interdigital transducer (IDT) having interleaved fingers at a surface of the respective diaphragm;

a second chip having a second plurality of transversely-excited film bulk acoustic resonators (XBARs) fabricated thereon, at least a first XBAR of the second plurality of XBARs comprising a first shunt sub-resonator and a second shunt sub-resonator connected in parallel, each shunt sub-resonator comprising a piezoelectric diaphragm and an IDT having interleaved fingers at a surface of the respective diaphragm; and

a circuit board that provides at least one interconnection between the first and second chips,

wherein a pitch of the interleaved fingers of the first series sub-resonator is not equal to a pitch of the interleaved fingers of the second series sub-resonator and/or a mark of the interleaved fingers of the first series sub-resonator is not equal to a mark of the interleaved fingers of the second series sub-resonator.

7. The ladder filter circuit of claim 6 , wherein each of the first and second chips comprise:

a substrate; and

at least one piezoelectric plate,

wherein the respective diaphragms of the first series sub-resonator and the second series sub-resonator of the first XBAR, and the respective diaphragms of the first shunt sub-resonator and the second shunt sub-resonator of the second XBAR are respective portions of the at least one piezoelectric plate spanning respective cavities.

8. The ladder filter circuit of claim 7 , wherein the at least one piezoelectric plate and the IDTs of the first series sub-resonator and the second series sub-resonator of the first XBAR, and the respective diaphragms of the first shunt sub-resonator and the second shunt sub-resonator of the second XBAR are configured such that a respective radio frequency signal applied to each IDT excites a shear primary acoustic mode in the respective diaphragm.

9. The ladder filter circuit of claim 6 , wherein:

the first XBAR comprises three or more series sub-resonators including the first and second series sub-resonators, and

the interleaved fingers of each of the three or more series sub-resonators have a unique pitch and/or a unique mark.

10. The ladder filter circuit of claim 9 , wherein the interleaved fingers of each of the three or more series sub-resonators have a unique pitch and a unique mark.

11. The ladder filter circuit of claim 9 , wherein the first XBAR comprises four series sub-resonators including the first and second series sub-resonators.

12. The ladder filter circuit of claim 6 , wherein, for each series sub-resonator, the diaphragm has a thickness tp and the pitch of the interleaved fingers is greater than or equal to 6tp and less than or equal to 12.5tp.

13. The ladder filter circuit of claim 6 , wherein a pitch of the interleaved fingers of the first shunt sub-resonator is not equal to a pitch of the interleaved fingers of the second shunt sub-resonator and/or a mark of the interleaved fingers of the first shunt sub-resonator is not equal to a mark of the interleaved fingers of the second shunt sub-resonator.

14. The ladder filter circuit of claim 6 , wherein interleaved fingers of each of the first and second shunt sub-resonators have a unique pitch and/or a unique mark.

15. A filter comprising:

a plurality of transversely-excited film bulk acoustic resonators (XBARs), at least a first XBAR of the plurality of XBARs comprising a first sub-resonator and a second sub-resonator connected in parallel,

wherein each of the first and second sub-resonators comprises a piezoelectric diaphragm, and an interdigital transducer (IDT) having interleaved fingers at a surface of the diaphragm,

wherein a pitch of the interleaved fingers of the first sub-resonator is not equal to a pitch of the interleaved fingers of the second sub-resonator and/or a mark of the interleaved fingers of the first sub-resonator is not equal to a mark of the interleaved fingers of the second sub-resonator, and

wherein a ratio of the mark of the interleaved fingers to the pitch of the interleaved fingers is greater than or equal to 0.2 and less than or equal to 0.3.

16. The filter of claim 15 , wherein:

the first XBAR comprises three or more sub-resonators including the first and second sub-resonators, and

the interleaved fingers of each of the three or more sub-resonators have a unique pitch and/or a unique mark.

17. The filter of claim 16 , wherein the first XBAR comprises four sub-resonators including the first and second sub-resonators.

18. The filter of claim 16 , wherein the interleaved fingers of each of the three or more sub-resonators have a unique pitch and a unique mark.