Observation apparatus
An observation apparatus includes a first intensity modulation section arranged on an optical path of illumination light with which an observation object is to be irradiated, the first intensity modulation section modulating an intensity distribution of the illumination light, and a second intensity modulation section arranged on an optical path of observation light from the observation object irradiated with the illumination light, the second intensity modulation section modulating an intensity distribution of the observation light.
1. An observation apparatus comprising:
a first intensity modulation section arranged on an optical path of illumination light with which an observation object is to be irradiated, the first intensity modulation section modulating an intensity distribution of the illumination light; and
a second intensity modulation section arranged on an optical path of observation light from the observation object irradiated with the illumination light, the second intensity modulation section modulating an intensity distribution of the observation light,
wherein:
a first light utilization ratio distribution of the first intensity modulation section monotonously decreases in a first orientation, such that a differential value of the first light utilization ratio distribution corresponding to the first orientation is zero or a negative value at any position of the first light utilization ratio distribution, and a minimum value of the differential value along the first light utilization ratio distribution is non-zero, and
a second light utilization ratio distribution of the second intensity modulation section monotonously increases in a second orientation corresponding to the first orientation, such that a differential value of the second light utilization ratio distribution corresponding to the second orientation is zero or a positive value at any position of the second light utilization ratio distribution, and a maximum value of the differential value along the second light utilization ratio distribution is non-zero.
2. The observation apparatus according to claim 1 , further comprising:
an image acquisition section that acquires image data of the observation object based on the observation light modulated by the second intensity modulation section, and
a contrast enhancement section that performs processing for enhancing a contrast of an image of the observation object based on the image data acquired by the image acquisition section.
3. The observation apparatus according to claim 1 , wherein a product of a first light utilization ratio of the first intensity modulation section and a second light utilization ratio of the second intensity modulation section with respect to an on-axis principal ray forming an optical image of the observation object is substantially equivalent to a product of a first light utilization ratio of the first intensity modulation section and a second light utilization ratio of the second intensity modulation section with respect to an off-axis principal ray forming the optical image.
4. The observation apparatus according to claim 1 , wherein the second intensity modulation section is arranged at a position optically conjugate with the first intensity modulation section.
5. The observation apparatus according to claim 4 , further comprising:
an illumination optical system that irradiates the observation object with the illumination light, and
an observation optical system that guides observation light into a detector,
wherein:
the first intensity modulation section is arranged at a pupil position of the illumination optical system, in a vicinity of the pupil position of the illumination optical system, at a position optically conjugate with the pupil, or in a vicinity of the position optically conjugate with the pupil, and
the second intensity modulation section is arranged at a pupil position of the observation optical system, in a vicinity of a pupil position of the observation optical system, at a position optically conjugate with the pupil, or in a vicinity of the position optically conjugate with the pupil.
6. The observation apparatus according to claim 1 , further comprising:
an aperture stop,
wherein the aperture stop has at least one of a structure for adjusting an aperture diameter and a centering structure.
7. The observation apparatus according to claim 1 , further comprising a movement section that moves the second intensity modulation section in an optical axis direction.
8. The observation apparatus according to claim 1 , wherein the first intensity modulation section and the second intensity modulation section are arranged to be insertable into and removable from an optical path.
9. The observation apparatus according to claim 1 , further comprising:
a first rotation section that rotates the first intensity modulation section around an optical axis, and
a second rotation section that rotates the second intensity modulation section around an optical axis.
10. The observation apparatus according to claim 1 , wherein:
a first light utilization ratio distribution for a first wavelength of the first intensity modulation section decreases in the first orientation,
a second light utilization ratio distribution for the first wavelength of the second intensity modulation section increases in the second orientation,
a first light utilization ratio distribution for a second wavelength different from the first wavelength of the first intensity modulation section decreases in a third orientation different from the first orientation, and
a second light utilization ratio distribution for the second wavelength of the second intensity modulation section increases in a fourth orientation corresponding to the third orientation.
11. The observation apparatus according to claim 1 , wherein:
each of the first intensity modulation section and the second intensity modulation section comprises an optical filter, and
each of the first light utilization ratio distribution and the second light utilization ratio distribution is an intensity transmittance distribution.
12. The observation apparatus according to claim 11 , wherein the optical filter comprises an absorption-type ND filter having a wedge shape.
13. The observation apparatus according to claim 1 , wherein:
each of the first intensity modulation section and the second intensity modulation section comprises an optical mirror, and
each of the first light utilization ratio distribution and the second light utilization ratio distribution is a reflectance distribution.
14. The observation apparatus according to claim 1 , wherein the observation apparatus comprises a microscope apparatus.
15. The observation apparatus according to claim 1 , wherein the observation apparatus comprises a cell analyzer.
16. The observation apparatus according to claim 1 , wherein the observation apparatus comprises a material inspection apparatus.
17. An observation apparatus comprising:
a first intensity modulation section arranged on an optical path of illumination light with which an observation object is to be irradiated, the first intensity modulation section modulating an intensity distribution of the illumination light; and
a second intensity modulation section arranged on an optical path of observation light from the observation object irradiated with the illumination light, the second intensity modulation section modulating an intensity distribution of the observation light,
wherein:
a first light utilization ratio distribution of the first intensity modulation section decreases in a first orientation,
a second light utilization ratio distribution of the second intensity modulation section increases in a second orientation corresponding to the first orientation,
the first light utilization ratio distribution includes at least three light utilization ratios respectively corresponding to optical densities different from one another, and
the second light utilization ratio distribution includes at least three light utilization ratios respectively corresponding to optical densities different from one another.
18. The observation apparatus according to claim 17 , wherein:
an optical density distribution represented by the first light utilization ratio distribution is a linear distribution in the first orientation, and
an optical density distribution represented by the second light utilization ratio distribution is a linear distribution in the second orientation.
19. The observation apparatus according to claim 17 , wherein;
an optical density distribution represented by the first light utilization ratio distribution is a distribution that changes in a stepped shape in the first orientation, and
an optical density distribution represented by the second light utilization ratio distribution is a distribution that changes in a stepped shape in the second orientation.
20. An observation apparatus comprising:
an illumination optical system that irradiates an observation object with illumination light;
an observation optical system that guides observation light from the observation object into a detector; and
an intensity modulation section that modulates both an intensity distribution of the illumination light and an intensity distribution of the observation light,
wherein:
the illumination optical system and the observation optical system share an objective lens,
the intensity modulation section is arranged at an exit pupil position of the objective lens or a position optically conjugate with the exit pupil position, and
a light utilization ratio distribution of the intensity modulation section monotonously decreases in a predetermined orientation perpendicular to an optical axis of the objective lens, such that a differential value of the light utilization ratio distribution corresponding to the predetermined orientation is zero or a negative value at any position of the light utilization ratio distribution, and a minimum value of the differential value along the light utilization ratio distribution is non-zero.