IP Library Granted Patent US 11,664,643
Granted Patent B1
US 11,664,643 · App. 17/546,799 · Granted May 30, 2023

Narrow sized laser diode

Inventors: James W. Raring (Santa Barbara, CA); Hua Huang (Vancouver, WA)
Assignee: KYOCERA SLD Laser, Inc.
H01S5/34333H01S5/0014H01S5/0202H01S5/0203H01S5/0234H01S5/02345H01S5/02375H01S5/1082H01S5/22H01S5/3013H01S5/3202H01S5/320275H01S5/32341H01L2224/48091H01L2224/48465H01S5/0042H01S5/32025
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Quick Facts
Patent No.
US 11,664,643
App. No.
17/546,799
Granted
May 30, 2023
Kind
B1
Abstract

Gallium and nitrogen containing optical devices operable as laser diodes and methods of forming the same are disclosed. The devices include a gallium and nitrogen containing substrate member, which may be semipolar or non-polar. The devices include a chip formed from the gallium and nitrogen substrate member. The chip has a width and a length, a dimension of less than 150 microns characterizing the width of the chip. The devices have a cavity oriented substantially parallel to the length of the chip.

Claims (42)

1. A system comprising:

a gallium and nitrogen containing optical device operable as a laser diode; and

a package configured to enclose the optical device;

wherein the optical device is configured for use in an application, the optical device comprising:

a gallium and nitrogen containing member having a semipolar surface orientation selected from the (20-21) or (20-2-1) or (30-31) or (30-3-1) or (11-22) plane orientations, or an offcut of any of the foregoing orientations;

a chip formed from the gallium and nitrogen containing member, the chip having a width and a length, the width of the chip being a distance between sides of the chip and the length of the chip being a distance between ends of the chip, the chip also having a p-type region and an n-side contact opposite the p-type region;

a ridge waveguide configured to emit laser light, the ridge waveguide oriented substantially parallel to the length of the chip and having a pair of etched facets configured on the ends thereof, the ridge waveguide having a width that is less than the width of the chip;

at least one wirebond disposed on the n-side contact of the chip for coupling a wire to the chip, wherein the width of the chip is no more than a width of the at least one wirebond; and

a submount coupled to the chip such that the p-type region of the chip is facing the submount.

2. The system of claim 1 , wherein the application is selected from an optical application, a laser application, a display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.

3. The system of claim 1 , wherein the width of the chip is either less than 110 microns or less than 70 microns.

4. The system of claim 1 , wherein the laser diode is operable at a wavelength from 430 nm to 480 nm or from 480 nm to 535 nm or from 390 nm to 430 nm.

5. The system of claim 1 , wherein the gallium and nitrogen containing member has a (20-21) surface orientation or an offcut thereof.

6. The system of claim 1 , wherein the gallium and nitrogen containing member has a (30-31) surface orientation or an offcut thereof.

7. A system comprising:

a lighting apparatus; and

an optical device configured to provide light for the lighting apparatus, the optical device operable as a laser diode;

wherein the optical device is configured for use in an application, the optical device comprising:

a gallium and nitrogen containing member;

a chip formed from the gallium and nitrogen containing member, the chip having a width and a length, the width of the chip being a distance between sides of the chip and the length of the chip being a distance between ends of the chip, the chip also having a p-type region and an n-side contact opposite the p-type region;

a ridge waveguide configured to emit laser light, the ridge waveguide oriented substantially parallel to the length of the chip and having a pair of etched facets configured on the ends thereof, the ridge waveguide having a width that is less than the width of the chip;

at least one wirebond disposed on the n-side contact of the chip for coupling a wire to the chip, wherein the width of the chip is no more than a width of the at least one wirebond plus a minimum wirebonding placement tolerance; and

a submount coupled to the chip such that the p-type region of the chip is facing the submount.

8. The system of claim 7 , wherein the application is selected from an optical application, a laser application, a display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.

9. The system of claim 7 , wherein the width of the chip is less than 110 microns.

10. The system of claim 7 , wherein the width of the chip is less than 70 microns.

11. The system of claim 7 , wherein the optical device is operable at a wavelength from 430 nm to 480 nm.

12. The system of claim 7 , wherein the optical device is operable at a wavelength from 480 nm to 535 nm.

13. The system of claim 7 , wherein the optical device is operable at a wavelength from 390 nm to 430 nm.

14. The system of claim 7 , wherein the gallium and nitrogen containing member of the optical device has a semipolar surface orientation selected from the (20-21) or (20-2-1) or (30-31) or (30-3-1) or (11-22) plane orientations, or an offcut of any of the foregoing orientations.

15. The system of claim 7 , wherein the gallium and nitrogen containing member of the optical device has a nonpolar surface orientation, or an offcut thereof.

16. A system comprising:

a gallium and nitrogen containing optical device operable as a laser diode;

wherein the optical device is configured for use in an application, the optical device comprising:

a chip comprising a gallium and nitrogen containing member, the chip having a width and a length, the width of the chip being a distance between sides of the chip and the length of the chip being a distance between ends of the chip, the chip also having a p-type region and an n-side contact opposite the p-type region;

a ridge waveguide configured to emit laser light, the ridge waveguide oriented substantially parallel to the length of the chip and having a pair of etched facets configured on the ends thereof, the ridge waveguide having a width that is less than the width of the chip;

at least one wirebond on the n-side contact of the chip for coupling a wire to the chip, wherein the width of the chip is no more than a width of the at least one wirebond; and

a submount coupled to the chip such that the p-type region of the chip is facing the submount.

17. The system of claim 16 , wherein the width of the chip is either less than 110 microns or less than 70 microns.

18. The system of claim 16 , wherein the laser diode is operable at a wavelength from 430 nm to 480 nm or from 480 nm to 535 nm or from 390 nm to 430 nm.

19. The system of claim 16 , wherein the gallium and nitrogen containing member has a semipolar surface orientation selected from the (20-21) or (20-2-1) or (30-31) or (30-3-1) or (11-22) plane orientations, or an offcut of any of the foregoing orientations.

20. The system of claim 16 , wherein the application is selected from an optical application, a laser application, a display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.

Continuity (6)
Continuation 16658693 · Oct 21, 2019
Continuation 15982323 · May 17, 2018
Continuation 15485474 · Apr 12, 2017
Continuation 14742297 · Jun 17, 2015
Continuation 13928805 · Jun 27, 2013
Provisional Application 61666414 · Jun 29, 2012