IP Library Granted Patent US 12,421,122
Granted Patent B2
US 12,421,122 · App. 17/550,740 · Granted Sep 23, 2025

Gas storage systems and method thereof

Inventors: Oleg Byl (Southbury, CT); Diego Troya (Blacksburg, VA); Nathan B. Jones (Blacksburg, VA); John R. Morris (Blacksburg, VA)
Assignee: ENTEGRIS, INC.
C01B35/02B01D53/04B01J20/103B01J20/3433B01J20/3483C01B33/122F17C11/00B01D2253/106B01D2259/40088B01D2259/4525F17C2270/0518
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Quick Facts
Patent No.
US 12,421,122
App. No.
17/550,740
Granted
Sep 23, 2025
Kind
B2
Abstract

Described are gas storage medium and methods of storing source gases in the gas storage medium, particularly relating to using hydroxylated metal oxides or hydroxylated metalloid oxides as a storage medium for storing diborane.

Claims (6)

1. A composition for gas storage, comprising hydroxylated silica, wherein the hydroxylated silica includes surface silicon atoms and isolated hydroxyl groups attached to the surface silicon atoms; and further including diborane atoms reversibly adsorbed to the isolated hydroxyl groups, wherein the diborane atoms are bonded to the surface silicon atoms by bifurcated di-hydrogen bond.

2. The composition of claim 1 , wherein the diborane is adsorbed as non-dissociated B 2 H 6 as indicated by infrared absorbance at 1585 cm −1 and 1881 cm −1 .

3. The composition of claim 1 , wherein the hydroxylated silica contains less than one percent of a monolayer of water.

4. The composition of claim 1 , wherein diborane atoms are the only gas adsorbed at the surfaces of the hydroxylated silica.

5. The composition of claim 1 , wherein over 70% of surface silicon atoms are covered by isolated hydroxyl groups.

6. The composition of claim 5 , wherein the hydroxylated silica contains less than 20% of geminal hydroxyl groups.

Assignments (2)
SECURITY INTEREST Recorded Jun 2, 2023
From: ENTEGRIS, INC.; CMC MATERIALS LLC
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 063857/0199 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 23, 2022
From: BYL, OLEG; TROYA, DIEGO; JONES, NATHAN B.; MORRIS, JOHN R.
To: ENTEGRIS, INC.
Reel/Frame 059082/0240 →