Remote optimization of purge flow rates in a container
Optimizing purge flow parameters in a substrate container, includes streaming a purge working fluid into an interior of the substrate container, discharging the purge working fluid from the interior of the substrate container, and varying purge flow parameters of the purge working fluid for a predetermined period of time, detecting at least one environmental condition in the interior of the substrate container during the predetermined period of time, determining optimized purge flow parameters based on the varied purge flow parameters and the at least one detected environmental condition during the predetermined period of time, and adjusting the streaming and the discharging in accordance with the optimized purge flow parameters. The substrate container may include, for example, a front opening unified pod or a reticle pod.
1 . An equipment front end module system, comprising:
A substrate container having an internal space;
a first controller attached to the substrate container a second controller external to the interior space a sensor within the internal space, communicatively coupled to the first controller, the sensor being configured to detect at least one environmental condition in the interior space;
wherein the second controller is configured to determine optimized purge flow parameters based on varied purge flow parameters of a purge working fluid and the at least one detected environmental condition during a predetermined period of time, and
wherein the first controller adapts purge flow parameters during open or closed door purge processes based on the at least one environmental condition.
2 . The equipment front end module system according to claim 1 ,
wherein the second controller is configured to control:
streaming a purge working fluid into the interior space, and
discharging the purge working fluid from the interior space
wherein the first controller is configured to communicate the at least one environmental condition to the second controller.
3 . The equipment front end module system according to claim 2 , wherein the purge working fluid includes one or more of nitrogen, clean dry air, and gas for conditioning a container environment;
wherein the at least one environmental condition includes one or more of relative humidity, pressure, oxygen levels, temperature, and a measured presence of airborne molecular contaminant or one or more volatile organic components.
4 . The equipment front end module system according to claim 2 , wherein the optimized purge flow parameters are determined to adjust one or more of relative humidity, oxygen levels, temperature, and a measured presence of airborne molecular contaminant or one or more volatile organic compounds in the interior of the substrate container to a respective predetermined threshold.
5 . The equipment front end module system according to claim 2 , wherein the optimized purge flow parameters are determined to produce a desired pressure in the interior of the substrate container.
6 . The equipment front end module system according to claim 2 , wherein a door to the interior of the substrate container is open during the predetermined period of time.
7 . The equipment front end module system according to claim 1 , wherein the first controller communicates the at least one environmental condition to an automation apparatus or database.
8 . The equipment front end module system according to claim 1 , wherein the substrate container is a front opening unified pod or a reticle pod.
9 . The equipment front end module system according to claim 1 , wherein the first controller adapts the purge process in real-time.