Single substrate multiplexer
At least three acoustic filters circuits FC are arranged on a single chip CH. At least two of them are electrically connected already on the chip for multiplexing. This reduces space consumption and leads to smaller device size.
1. A multiplexer, comprising:
a monolithic stack comprising:
a carrier substrate;
a piezoelectric layer above the carrier substrate having a main surface; and
at least one dielectric layer arranged between the piezoelectric layer and the carrier substrate;
a metallization on top of the main surface comprising:
an antenna terminal for connection with an antenna;
three signal pads;
a trap-rich layer (TRL) provided between the carrier substrate and the piezoelectric layer, wherein the trap-rich layer comprises a polycrystalline silicon layer;
three surface acoustic wave (SAW) filter circuits connected in parallel between the antenna terminal and a respective signal pad, wherein each of the three SAW filter circuits comprises a corresponding series signal line and a number of SAW resonators connected in series with or parallel to the corresponding series signal line; and
a package providing a cavity on top of the monolithic stack, wherein the three SAW filter circuits are enclosed in the cavity that is formed between the main surface of the piezoelectric layer and a lid and/or a cover.
2. The multiplexer of claim 1 ,
wherein the carrier substrate comprises Si,
wherein the piezoelectric layer is a monocrystalline thin film layer of lithium tantalate or lithium niobate having a thickness of 400 nm to 2000 nm.
3. The multiplexer of claim 1 ,
wherein the at least one dielectric layer is a silicon oxide layer having a thickness of 300 nm to 2000 nm and a smooth top surface.
4. The multiplexer of claim 1 ,
wherein the polycrystalline silicon layer comprises a thickness between 300 nm to 2000 nm.
5. The multiplexer of claim 1 ,
wherein the carrier substrate has a thermal conductivity that is at least ten times larger than the thermal conductivity of the piezoelectric layer.
6. The multiplexer of claim 1 ,
comprising a multilayer board having contact pads on a bottom surface thereof and an integrated wiring, connecting the contact pads with respective external contacts on a top surface opposite to the bottom surface,
wherein the multilayer board is mounted to the monolithic stack by a connection technique to electrically connect the contact pads with respective signal pads and the antenna terminal,
wherein the connection comprises bumps,
wherein a sealing means is provided to seal the cavity formed between the multilayer board and the main surface.
7. The multiplexer of claim 6 ,
wherein the multilayer board is selected from a group consisting of multilayer laminate, HTCC and LTCC.
8. The multiplexer of claim 1 ,
wherein the three SAW filter circuits are enclosed in the cavity, and wherein the cavity is integrally formed as a thin film acoustic package.
9. The multiplexer of claim 1 ,
wherein four SAW filter circuits (FC) are provided to form a quadplexer comprising two duplexers, wherein the two duplexers are configured to operate in bands B1 and B3, or in bands B25 and B66.
10. The multiplexer of claim 1 ,
comprising a trimming layer on top of the monolithic stack wherein one or more layers of the monolithic stack are trimmed to meet the specifications of band B3 or B25.
11. The multiplexer of claim 1 ,
comprising a filter circuit that is an Rx filter having a DMS filter in the corresponding series signal line.