IP Library Granted Patent US 12,464,834
Granted Patent B2
US 12,464,834 · App. 17/607,479 · Granted Nov 4, 2025

Terahertz and sub-terahertz devices

Inventor: Michael Shur (Vienna, VA)
Assignee: Rensselaer Polytechnic Institute
H10F30/282H10F77/122H10F77/1246H10F77/1248H10F77/413
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Quick Facts
Patent No.
US 12,464,834
App. No.
17/607,479
Granted
Nov 4, 2025
Kind
B2
Abstract

One embodiment provides a semiconducting device for at least one of detecting, producing or manipulating electromagnetic radiation having a frequency of at least 100 gigahertz (GHz). The semiconducting device includes a heterodimensional plasmonic structure, and an active layer. The heterodimensional plasmonic structure includes at least one nanostructure configured to form a heterodimensional junction with the active layer and having a tunable resonant plasmon frequency.

Claims (27)

1 . A semiconducting device for at least one of detecting, producing or manipulating electromagnetic radiation having a frequency of at least 100 gigahertz (GHz), the semiconducting device comprising:

a heterodimensional plasmonic structure; and

a periodically modulated active layer selected from the group consisting of a two-dimensional electron gas, a three-dimensional electron gas, a two-dimensional hole gas and a three-dimensional hole gas,

the heterodimensional plasmonic structure comprising at least one nanostructure configured to form a heterodimensional junction with the active layer and having a tunable resonant plasmon frequency and fabricated with a material selected from the group comprising silicon (Si), gallium-nitride (GaN), indium gallium arsenide (InGaAs), and graphene.

2 . The semiconducting device of claim 1 , wherein the nanostructure is selected from the group comprising a nanodot, a nanoparticle, a nanocolumn, a nanocone, a nanowire, a nanotube, or a combination thereof.

3 . The semiconducting device of claim 1 , wherein the active layer is fabricated with a material selected from the group comprising silicon (Si), gallium-nitride (GaN), indium gallium arsenide (InGaAs), and graphene.

4 . The semiconducting device according to claim 1 , further comprising a gate coupled to the active layer, the gate configured receive a bias voltage, the bias voltage configured to tune the resonant plasmon frequency.

5 . The semiconducting device of claim 4 , further comprising a drain contact and a source contact contacting the active layer, a configuration of the drain contact and the source contact selected from the group comprising continuous side contacts, split side contacts, side contacts in an opposing configuration and side contacts in a cross configuration.

6 . The semiconducting device of claim 4 , wherein at least one of the heterodimensional plasmonic structure and the gate comprise an asymmetric feature configured to provide an asymmetry between the source and the drain.

7 . The semiconducting device according to claim 1 , wherein the heterodimensional plasmonic structure comprises a plurality of nanostructures, the plurality of nanostructures periodically modulated.

8 . A semiconducting device for at least one of detecting, producing or manipulating electromagnetic radiation having a frequency of at least 100 gigahertz (GHz), the semiconducting device comprising:

a heterodimensional plasmonic structure; and

an active layer selected from the group consisting of a two-dimensional electron gas, a three-dimensional electron gas, a two-dimensional hole gas and a three-dimensional hole gas,

wherein the heterodimensional plasmonic structure comprises at least one nanostructure configured to form a heterodimensional junction with the active layer and having a tunable resonant plasmon frequency and fabricated with a material selected from the group comprising silicon (Si), gallium-nitride (GaN), indium gallium arsenide (InGaAs), and graphene, and

wherein the heterodimensional plasmonic structure comprises a plurality of nanostructures, a first portion of the plurality of nanostructures fabricated with a first set of parameters and a second portion of the plurality of nanostructures fabricated with a second set of parameters, a selected first parameter of the first set differing from a selected second parameter of the second set by at least one percent (%).

9 . A field effect device for at least one of detecting, producing or manipulating electromagnetic radiation having a frequency of at least 100 gigahertz (GHz), the field effect device comprising:

a heterodimensional plasmonic structure;

a periodically modulated active layer selected from the group consisting of a two-dimensional electron gas, a three-dimensional electron gas, a two-dimensional hole gas and a three-dimensional hole gas; and

a gate, a drain, and a source coupled to the active layer,

the heterodimensional plasmonic structure comprising at least one nanostructure configured to form a heterodimensional junction with the active layer and having a tunable resonant plasmon frequency and fabricated with a material selected from the group comprising silicon (Si), gallium-nitride (GaN), indium gallium arsenide (InGaAs), and graphene.

10 . The field effect device of claim 9 , wherein the nanostructure is selected from the group comprising a nanodot, a nanoparticle, a nanocolumn, a nanocone, a nanowire, a nanotube, or a combination thereof.

11 . The field effect device of claim 9 , wherein the active layer is fabricated with a material selected from the group comprising silicon (Si), gallium-nitride (GaN), indium gallium arsenide (InGaAs), and graphene.

12 . The field effect device of claim 9 , wherein the gate is configured receive a bias voltage, the bias voltage configured to tune the resonant plasmon frequency.

13 . The field effect device according to claim 9 , further comprising a drain contact contacting the drain and a source contact contacting the source, a configuration of the drain contact and the source contact selected from the group comprising continuous side contacts, split side contacts, side contacts in an opposing configuration and side contacts in a cross configuration.

14 . The field effect device according to claim 9 , wherein each nanostructure is capacitively coupled to the gate.

15 . The field effect device according to claim 9 , wherein at least one of the heterodimensional plasmonic structure and the gate comprise an asymmetric feature configured to provide an asymmetry between the source and the drain.

16 . The field effect device according to claim 9 , wherein the heterodimensional plasmonic structure comprises a plurality of nanostructures, a first portion of the plurality of nanostructures fabricated with a first set of parameters and a second portion of the plurality of nanostructures fabricated with a second set of parameters, a selected first parameter of the first set differing from a selected second parameter of the second set by at least one percent (%).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 20, 2022
From: SHUR, MICHAEL
To: RENSSELAER POLYTECHNIC INSTITUTE
Reel/Frame 059645/0366 →
Continuity (2)
Provisional Application 62839830 · Apr 29, 2019
Related Publication 20220231182A1 · Jul 21, 2022
References Cited (29)
US 5986291A · Currie · 1999 [cited by examiner]
US 6015991A · Wheeler et al. · 2000 [cited by applicant]
US 7170085B2 · Raspopin et al. · 2007 [cited by applicant]
US 8120014B2 · Nabet et al. · 2012 [cited by applicant]
US 8148688B2 · Kawano · 2012 [cited by examiner]
US 8215489B1 · Roberts et al. · 2012 [cited by applicant]
US 8433170B2 · Cooke · 2013 [cited by applicant]
US 8994005B2 · Mitin et al. · 2015 [cited by applicant]
US 9105791B1 · Dyer · 2015 [cited by examiner]
US 9368667B1 · Kim · 2016 [cited by examiner]
US 9513171B2 · Cumming et al. · 2016 [cited by applicant]
US 9759689B2 · Guo · 2017 [cited by applicant]
US 10084102B2 · Cai et al. · 2018 [cited by applicant]
US 10084107B2 · Fu et al. · 2018 [cited by applicant]
US 20060289761A1 · Nabet et al. · 2006 [cited by applicant]
US 20090140801A1 · Ozyilmaz et al. · 2009 [cited by applicant]
US 20100059792A1 · Shur et al. · 2010 [cited by applicant]
US 20110170208A1 · Zhao · 2011 [cited by examiner]
US 20120148252A1 · Turchinovich · 2012 [cited by applicant]
US 20140225067A1 · Kim · 2014 [cited by examiner]
US 20160218237A1 · Perera et al. · 2016 [cited by applicant]
US 20160380121A1 · Suzuki · 2016 [cited by examiner]
US 20170005207A1 · Li · 2017 [cited by examiner]
US 20180122912A1 · Kim · 2018 [cited by examiner]
US 20180315880A1 · Jadidi et al. · 2018 [cited by applicant]
WO 2013055429A2 · 2013 [cited by applicant]
WO 2017119978A2 · 2017 [cited by applicant]
M.S Shur et al., “Novel heterodimensional diodes and transistors” Solid-State Electronics, vol. 38, Issue 9, Sep. 1995, pp. 1727-1730, https://doi.org/10.1016/0038-1101(95)00038-U (Year: 1995). [cited by examiner]
International Search Report and The Written Opinion of the International Searching Authority, International Application No. PCT/US2020/030248, mailed Dec. 18, 2020. [cited by applicant]