Granted Patent B2

US 12,280,545 · App. 17/613,763 · Granted Apr 22, 2025

Inventors: Christiane Thiel (Luebeck, DE); Daniel Brueck (Luebeck, DE); Ralf Labes (Ploen, DE)

Assignee: Nikon SLM Solutions AG

B29C64/255B22F12/38B22F12/70B29C64/135B29C64/393B33Y10/00B33Y30/00B33Y50/02A61C13/0019B22F10/28B22F10/36B22F12/90

Abstract

Claims (22)

1. An apparatus for producing a three-dimensional workpiece, the apparatus comprising:

a process chamber for receiving a material from which the three-dimensional workpiece is producible using an additive layer manufacturing technique, wherein the process chamber comprises a translucent window;

an irradiation device for irradiating, through the translucent window, the material for producing the three-dimensional workpiece; and

an enclosure arranged between the translucent window of the process chamber and the irradiation device, wherein at least a part of the enclosure is translucent and wherein the enclosure allows for an irradiation beam stemming from the irradiation device to travel from the irradiation device through the enclosure to the material for producing the three-dimensional workpiece,

wherein the enclosure comprises an inlet and an outlet,

wherein the apparatus is configured to control a flow of a fluid through the enclosure via the inlet and the outlet, and

the apparatus further comprising an optical control unit for controlling an irradiation beam path of a said irradiation beam based on an optical property of a said fluid and/or of an interface between a said fluid and the translucent part of the enclosure, and wherein said controlling of said flow of said fluid through the enclosure comprises controlling said flow based on said optical property for controlled steering of said irradiation beam.

2. An apparatus as claimed in claim 1 , wherein the enclosure forms at least a part of a wall of the process chamber.

3. An apparatus as claimed in claim 2 , wherein the enclosure comprises the translucent window.

4. An apparatus as claimed in claim 1 , further comprising one or more sensors coupled to and/or arranged within one or more of the inlet, the outlet and the enclosure for sensing the fluid and/or an area surrounding the enclosure, wherein the apparatus is configured to control, based on the sensed fluid and/or area, one or more parameters of the fluid within the enclosure.

5. An apparatus as claimed in claim 4 , wherein the one or more sensors comprises one or more temperature sensors for sensing a temperature of the fluid and/or a temperature of the irradiation device and/or a temperature of a volume within the process chamber, and wherein said controlling, by the apparatus, comprises adjusting the one or more parameters of the fluid within the enclosure to maintain the temperature of the fluid within the enclosure and/or the temperature of the irradiation device and/or the temperature of the volume within the process chamber at a target temperature or within a target temperature range.

6. An apparatus as claimed in claim 1 , wherein the inlet and/or the outlet comprises one or more control devices configured to control one or more properties of the fluid.

7. An apparatus as claimed in claim 1 , wherein the enclosure comprises a plurality of enclosures arranged within a beam path of the irradiation beam from the irradiation device to an interior of the process chamber.

8. An apparatus as claimed in claim 7 , wherein the apparatus is configured to control a said flow of a first said fluid through a first said enclosure and to control a said flow of a second said fluid through a second said enclosure, the first fluid being different from the second fluid.

9. An apparatus as claimed in claim 1 , wherein the irradiation device is configured to provide a plurality of beam paths for the irradiation beam from the irradiation device through the enclosure.

10. An apparatus as claimed in claim 1 , wherein a wall of the enclosure comprises a cavity for controlling, via a fluid within said cavity, a physical property of the enclosure.

11. An apparatus as claimed in claim 1 , wherein the optical property is based on a fluid composition and/or fluid temperature of a said fluid, and wherein said controlling of said flow of said fluid through the enclosure comprises controlling said flow based on said fluid composition and/or said fluid temperature for said controlled steering of said irradiation beam.

12. An apparatus as claimed in claim 1 , wherein the optical property comprises a refractive index of a said fluid, and wherein said controlling of said flow of said fluid through the enclosure comprises controlling said refractive index for said controlled steering of said irradiation beam.

13. An apparatus as claimed in claim 1 , wherein the optical control unit is configured to determine an irradiation beam spot diameter of said irradiation beam in the process chamber, and wherein said controlled steering of said irradiation beam comprises controlling said irradiation beam spot diameter based on said optical property controlled by controlling said flow of said fluid.

14. An apparatus as claimed in claim 1 , wherein the optical property of said interface between a said fluid and the translucent part of the enclosure comprises a shape and/or a temperature and/or a state of stress of said interface, and wherein said controlled steering of said irradiation beam comprises controlling said shape and/or said temperature and/or said state of stress of said interface by controlling said flow of said fluid.

15. An apparatus as claimed in claim 14 , wherein the apparatus is configured to control said shape and/or said temperature and/or said state of stress by controlling a pressure of said fluid within the enclosure.

16. An apparatus as claimed in claim 1 , wherein the translucent window and/or the translucent part of the enclosure respectively comprise an optical lens.

Assignments (2)

Priority Claims (1)

Continuity (1)

References Cited (33)