Electro acoustic filter component and method of manufacturing to reduce influence of chipping
An electro acoustic filter component with improved acoustic and/or electro acoustic performance is provided. The component comprises a piezoelectric material (PM) the sides of which are plane and preferably free from chipping defects. The piezoelectric material may be arranged above a carrier substrate (CS). A functional layer (FL) with plane sides may be arranged above an electrode structure (ES) as trimming, TCF or passivation layer. In the manufacturing method the piezoelectric material and the functional layer are removed from the dicing line, such that no chipping occurs for these layers.
1. An electro acoustic filter component, comprising:
a piezoelectric material in a piezoelectric layer disposed over a substrate;
an electrode structure arranged on the piezoelectric layer;
a functional layer encapsulating the electrode structure and sides of the piezoelectric material; and
a cavity disposed over the functional layer,
wherein the sides of the piezoelectric material are planar and wherein sides of the functional layer are planar.
2. The electro acoustic filter component according to claim 1 , wherein the planar sides of the piezoelectric layer are free from chipping.
3. The electro acoustic filter component according to claim 1 , wherein the planar sides of the functional layer are free from chipping.
4. The electro acoustic filter component according to claim 1 , wherein the functional layer comprises:
a temperature compensation layer, a trimming layer or a passivation layer; and
a material selected from a dielectric material, a nitride, SiN 4 , an oxide, a silicon oxide, SiO 2 .
5. The electro acoustic filter component according to claim 1 , wherein the cavity is formed by a thin film package.
6. The electro acoustic filter component according to claim 1 , wherein the piezoelectric material is arranged on or above a carrier substrate.
7. The electro acoustic filter component according to claim 6 , wherein the piezoelectric material or a functional layer has an extension in a lateral direction that is smaller than the extension of the carrier substrate.
8. The electro acoustic filter component according to claim 6 , wherein the carrier substrate has diced sides.
9. The electro acoustic filter component according to claim 6 , further comprising an additional layer between the piezoelectric material and the carrier substrate.
10. The electro acoustic filter component according to claim 9 , wherein the additional layer comprises a waveguiding layer.