Backside emitter solar cell structure having a heterojunction and method and device for producing the same

1. A method for producing a backside emitter solar cell structure having a heterojunction, the method comprising the following steps in the following order:

providing a crystalline semiconductor substrate having a doping of a first conductivity type to form an absorber of the backside emitter solar cell structure;

producing on a back side of the semiconductor substrate at least one backside intrinsic layer made of an intrinsic, amorphous semiconductor material;

producing on a front side of the semiconductor substrate at least one frontside intrinsic layer from an intrinsic, amorphous semiconductor material;

producing on the at least one frontside intrinsic layer at least one frontside doping layer from an amorphous semiconductor material having a doping of the first conductivity type which is higher than the doping of the semiconductor substrate;

forming an emitter of the backside emitter solar cell structure having heterojunction on the at least one backside intrinsic layer, by producing at least one backside doping layer from an amorphous semiconductor material with a doping of a second conductivity type opposite to the first conductivity type;

producing on the at least one frontside doping layer at least one electrically conductive, transparent frontside conduction layer;

producing on the at least one backside doping layer at least one electrically conductive, transparent backside conduction layer;

producing a frontside contact on the at least one electrically conductive, transparent frontside conduction layer; and

producing a backside contact on the at least one electrically conductive, transparent backside conduction layer;

wherein the at least one electrically conductive, transparent backside conduction layer is deposited on the at least one backside doping layer at a spacing distance from a side edge of the semiconductor substrate, so that an edge region on the back side of the backside emitter solar cell structure having heterojunction is not coated with the electrically conductive, transparent backside conduction layer and in all process steps for forming the electrically conductive, transparent backside conduction layer, there is no electrical contact between the electrically conductive, transparent backside conduction layer and the frontside conduction layer.

2. The method according to claim 1 , which comprises providing an n-doped semiconductor substrate as the semiconductor substrate, producing the frontside doping layer with an amorphous semiconductor material doped with phosphorus, and producing the backside doping layer with an amorphous semiconductor material doped with boron.

3. The method according to claim 1 , which comprises producing the at least one frontside intrinsic layer on the front side of the semiconductor substrate and producing the at least one frontside doping layer on the at least one frontside intrinsic layer in processes taking place one after another in one and the same layer deposition reactor.

4. A backside emitter solar cell structure having a heterojunction, the solar cell structure comprising:

an absorber made of a crystalline semiconductor substrate having a doping of a first conductivity type;

at least one frontside intrinsic layer formed on a front side of said absorber and made of an intrinsic, amorphous semiconductor material;

at least one backside intrinsic layer formed on a back side of said absorber and made of an intrinsic, amorphous semiconductor material;

at least one frontside doping layer formed on said at least one frontside intrinsic layer made of an amorphous semiconductor material having a doping of the first conductivity type which is higher than the doping of said absorber;

an emitter of at least one backside doping layer formed on said at least one backside intrinsic layer and made of an amorphous semiconductor material having a doping of a second conductivity type opposite the first conductivity type;

at least one electrically conductive, transparent frontside conduction layer formed on said at least one frontside doping layer;

at least one electrically conductive, transparent backside conduction layer formed on said at least one backside doping layer;

a frontside contact formed on said at least one electrically conductive, transparent frontside conduction layer; and

a backside contact formed on said at least one electrically conductive, transparent backside conduction layer;

wherein at one side edge of the backside emitter solar cell structure, on an edge region of the semiconductor substrate, a layer sequence having layers in the following sequence are present from inside to outside:

said at least one backside intrinsic layer;

said at least one frontside intrinsic layer on said at least one backside intrinsic layer;

said at least one frontside doping layer on said at least one frontside intrinsic layer; and

said at least one backside doping layer on said at least one frontside doping layer; and

wherein said at least one electrically conductive, transparent backside conduction layer is deposited on the at least one backside doping layer at a distance from said side edge of said semiconductor substrate, so that an edge area on a back side of said backside emitter solar cell structure is not coated with said electrically conductive, transparent backside conduction layer and there is no electrical contact between said electrically conductive, transparent backside conduction layer and said frontside conduction layer.

5. The backside emitter solar cell structure according to claim 4 , wherein said semiconductor substrate is an n-doped semiconductor substrate, said frontside doping layer is doped with phosphorus, and said backside doping layer is doped with boron.