Stacked acoustic wave (AW) filter packages, including cross-talk reduction layers, and related fabrication methods
A stacked AW filter package includes a first substrate stacked on a second substrate. The first substrate has a first AW filter circuit on first surface and a metal layer on a second surface. The second substrate has a second AW filter circuit disposed in a cavity between the metal layer of the first substrate and a third surface of the second substrate. The metal layer is coupled to the second AW filter circuit by a metal interconnect formed in a metallization layer on a side surface of the first substrate. The metal layer provides isolation to reduce cross-talk (e.g., electromagnetic interference) within the stacked AW filter package between the first AW filter circuit and the second AW filter circuit. Including the metal layer in the stacked AW filter package improves signal quality of transmitted and received signals filtered in the first and second AW filter circuits.
1. A stacked acoustic wave (AW) filter circuit, comprising:
a first substrate comprising a first AW filter circuit on a first surface;
a metal layer on a second surface of the first substrate;
a second substrate comprising a second AW filter circuit on a third surface, the second AW filter circuit disposed in a cavity between the metal layer on the first substrate and the third surface of the second substrate;
a metallization layer comprising at least one metal interconnect disposed on a side surface of the first substrate, the at least one metal interconnect coupled to the metal layer, and the second AW filter circuit; and
a portion of the metal layer extending onto the side surface of the first substrate between the at least one metal interconnect and the side surface of the first substrate.
2. The stacked AW filter package of claim 1 , wherein the at least one metal interconnect is coupled to a ground pad coupled to the second AW filter circuit.
3. The stacked AW filter package of claim 2 , wherein the ground pad is further coupled to the first AW filter circuit.
4. The stacked AW filter package of claim 1 integrated into a device selected from the group consisting of: a set-top box; an entertainment unit; a navigation device; a communications device; a fixed location data unit; a mobile location data unit; a global positioning system (GPS) device; a mobile phone; a cellular phone; a smartphone; a session initiation protocol (SIP) phone; a tablet; a phablet; a server; a computer; a portable computer; a mobile computing device; a wearable computing device; a desktop computer; a personal digital assistant (PDA); a monitor; a computer monitor; a television; a tuner; a radio; a satellite radio; a music player; a digital music player; a portable music player; a digital video player; a video player; a digital video disc (DVD) player; a portable digital video player; an automobile; a vehicle component; avionics systems; a drone; and a multicopter.
5. The stacked AW filter package of claim 1 , further comprising a frame disposed between the third surface of the second substrate and the metal layer.
6. The stacked AW filter package of claim 1 , further comprising:
a cap substrate disposed on the first surface of the first substrate;
a second frame disposed between the cap substrate and the first substrate; and
a contact disposed on the cap substrate;
wherein the at least one metal interconnect is coupled to the contact.
7. A method for manufacturing a stacked acoustic wave (AW) filter package, the method comprising:
forming a first AW filter circuit on a first surface of a first substrate;
forming a metal layer on a second surface of the first substrate;
forming a second AW filter circuit on a third surface of a second substrate;
forming a cavity around the second AW filter circuit between the metal layer and the third surface of the second substrate; and
forming a metallization layer comprising at least one metal interconnect on a side surface of the first substrate; and
coupling the at least one metal interconnect of the metallization layer to the metal layer and the second AW filter circuit,
wherein forming the metal layer further comprises forming the metal layer extending onto the side surface of the first substrate between the at least one metal interconnect and the side surface of the first substrate.
8. The method of claim 7 , further comprising coupling the at least one metal interconnect of the metallization layer to a ground pad coupled to the second AW filter circuit.
9. The method of claim 7 , further comprising forming an insulation layer on the side surface of the first substrate, wherein forming the metallization layer further comprises forming at least a second metal interconnect on the insulation layer, the second metal interconnect insulated from the first substrate.
10. The method of claim 7 , further comprising forming a frame on the third surface of the second substrate.
11. The method of claim 7 , further comprising:
disposing a cap substrate on the first surface of the first substrate; and
forming a contact on the cap substrate, the contact coupled to the at least one metal interconnect.
12. The method of claim 7 , wherein forming the metal layer further comprises patterning the metal layer to dispose the metal layer on at least a first portion of the second surface of the first substrate and not disposed on at least a second portion of the second surface of the first substrate.
13. The method of claim 7 , wherein forming the metallization layer further comprises coupling the at least one metal interconnect to the first AW filter circuit on the first substrate.
14. The method of claim 7 , wherein forming the metal layer on the second surface of the first substrate further comprises:
forming a titanium layer on the second surface and the side surface of the first substrate; and
forming a copper layer on the titanium layer.
15. The method of claim 7 , wherein forming the metal layer on the second surface of the first substrate further comprises:
forming a resist layer on the metal layer;
dispose a patterned mask on the resist layer;
develop the resist layer in exposed areas exposed by the patterned mask;
removing the resist layer from the exposed areas; and
etch the metal layer from the exposed areas.
16. A stacked acoustic wave (AW) filter circuit, comprising:
a first substrate comprising a first AW filter circuit on a first surface;
a metal layer on a second surface of the first substrate;
a second substrate comprising a second AW filter circuit on a third surface, the second AW filter circuit disposed in a cavity between the metal layer on the first substrate and the third surface of the second substrate; and
a metallization layer comprising at least one metal interconnect disposed on a side surface of the first substrate, the at least one metal interconnect coupled to the metal layer, and the second AW filter circuit;
at least a second metal interconnect disposed on the side surface of the first substrate; and
an insulation layer disposed on the side surface of the first substrate between the side surface and the at least a second metal interconnect, the at least a second metal interconnect electrically insulated from the first substrate.
17. The stacked AW filter package of claim 16 , wherein the at least one metal interconnect is coupled to a ground pad coupled to the second AW filter circuit.
18. The stacked AW filter package of claim 17 , wherein the ground pad is further coupled to the first AW filter circuit.
19. The stacked AW filter package of claim 16 , further comprising a frame disposed between the third surface of the second substrate and the metal layer.
20. The stacked AW filter package of claim 16 , further comprising:
a cap substrate disposed on the first surface of the first substrate;
a second frame disposed between the cap substrate and the first substrate; and
a contact disposed on the cap substrate;
wherein the at least one metal interconnect is coupled to the contact.
21. A stacked acoustic wave (AW) filter circuit, comprising:
a first substrate comprising a first AW filter circuit on a first surface;
a metal layer on a second surface of the first substrate;
a second substrate comprising a second AW filter circuit on a third surface, the second AW filter circuit disposed in a cavity between the metal layer on the first substrate and the third surface of the second substrate; and
a metallization layer comprising at least one metal interconnect disposed on a side surface of the first substrate, the at least one metal interconnect coupled to the metal layer, and the second AW filter circuit,
wherein the metal layer comprises a patterned metal layer comprising metal disposed on at least a first portion of the second surface of the first substrate and not disposed on at least a second portion of the second surface of the first substrate.
22. The stacked AW filter package of claim 21 , wherein the at least one metal interconnect is coupled to a ground pad coupled to the second AW filter circuit.
23. The stacked AW filter package of claim 22 , wherein the ground pad is further coupled to the first AW filter circuit.
24. The stacked AW filter package of claim 21 , further comprising a frame disposed between the third surface of the second substrate and the metal layer.
25. The stacked AW filter package of claim 21 , further comprising:
a cap substrate disposed on the first surface of the first substrate;
a second frame disposed between the cap substrate and the first substrate; and
a contact disposed on the cap substrate;
wherein the at least one metal interconnect is coupled to the contact.
26. A stacked acoustic wave (AW) filter circuit, comprising:
a first substrate comprising a first AW filter circuit on a first surface;
a metal layer on a second surface of the first substrate;
a second substrate comprising a second AW filter circuit on a third surface, the second AW filter circuit disposed in a cavity between the metal layer on the first substrate and the third surface of the second substrate; and
a metallization layer comprising at least one metal interconnect disposed on a side surface of the first substrate, the at least one metal interconnect coupled to the metal layer, and the second AW filter circuit,
wherein the metal layer on the second surface of the first substrate further comprises:
a titanium layer on the second surface of the first substrate; and
a copper layer on the titanium layer.
27. The stacked AW filter package of claim 26 , wherein the at least one metal interconnect is coupled to a ground pad coupled to the second AW filter circuit.
28. The stacked AW filter package of claim 27 , wherein the ground pad is further coupled to the first AW filter circuit.
29. The stacked AW filter package of claim 26 , further comprising a frame disposed between the third surface of the second substrate and the metal layer.
30. The stacked AW filter package of claim 26 , further comprising:
a cap substrate disposed on the first surface of the first substrate;
a second frame disposed between the cap substrate and the first substrate; and
a contact disposed on the cap substrate;
wherein the at least one metal interconnect is coupled to the contact.