IP Library Granted Patent US 11,845,216
Granted Patent B2
US 11,845,216 · App. 17/666,695 · Granted Dec 19, 2023

3D printed electronics using directional plasma jet

Inventors: Ramprasad Gandhiraman (Sunnyvale, CA); Meyya Meyyappan (Pacifica, CA); Jessica E. Koehne (Portola Valley, CA)
Assignee: UNIVERSITIES SPACE RESEARCH ASSOCIATION
B29C64/106B22F10/25B22F10/50B22F10/60B22F12/22B22F12/53B22F12/55B22F12/70B22F12/82B29C64/188B29C64/205B29C64/209B29C64/321B33Y30/00B33Y50/02B33Y70/00B22F2202/13B22F2999/00
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Quick Facts
Patent No.
US 11,845,216
App. No.
17/666,695
Granted
Dec 19, 2023
Kind
B2
Abstract

A device and method for printing 3D articles including electronic and functional elements including 3D printer and a plasma jet printer based on a dielectric barrier atmospheric pressure plasma jet system in which both printing and in-situ treatment and post-deposition treatment can be carried out to tailor the materials characteristics. Plasma jet printer comprising of electrodes in the nozzle/print head for applying electric field and generating atmospheric plasma that could be used for non-gravity based highly directional printing in any direction. Integration of dielectric barrier plasma printer and plasma treatment jets with the 3D printer increases the capability of embedding high performance electronics in a 3D printed structure aiding in additive manufacturing of functional devices. Ability to use a range of materials for print head assembly including micro machined silicon increases the resolution of the plasma jet printer to sub-micron level.

Claims (11)

1. An apparatus for high resolution printing of electronic materials comprising,

(i) a plasma jet print head comprising a first dielectric tube with one or more electrodes connected to said first dielectric tube, said one or more electrodes connected to a high voltage power supply to generate plasma inside the said first dielectric tube; a print inlet connected to a first end of said first dielectric tube through which gas and electronic material to be printed are introduced to said first dielectric tube; a print nozzle connected to a second end of said first dielectric tube downstream from said one or more electrodes; wherein said print nozzle comprises multiple orifices through which the electronic material is printed; and each orifice opening is smaller than the diameter of the first dielectric tube to enable printing and

(ii) a post treatment jet comprising a second dielectric tube with one or more electrodes attached to said second dielectric tube, said one or more electrodes attached to said second dielectric tube are configured to generate atmospheric pressure plasma within said second dielectric tube; a gas inlet connected to one end of said second dielectric tube; a post treatment nozzle connected to a second end of said second dielectric tube and downstream from said one or more electrodes attached to said second dielectric tube; the said post treatment nozzle in said second dielectric tube has opening larger than the print nozzle in said first dielectric tube.

2. The apparatus of claim 1 , wherein the plasma jet print head is made of dielectric materials comprising of ceramic, plastic, quartz, glass or a combination thereof.

3. The apparatus of claim 1 , wherein the one or more electrodes connected to said first dielectric tube and the one or more electrodes attached to said second dielectric tube are made of conducting metals.

4. The apparatus of claim 1 , wherein the each orifice opening of the print nozzle varies from 1 micrometer to 1 cm.

5. The apparatus of claim 1 , wherein said post treatment nozzle of said post treatment jet is used to treat the electronic materials printed using the plasma jet print head.

6. The apparatus of claim 5 , wherein said post treatment nozzle opening is larger than each orifice opening of the print nozzle.

7. The apparatus of claim 1 , wherein said deposit print inlet of said plasma jet print head is a source of the electronic material to be printed by said plasma jet print head.

8. The apparatus of claim 7 , wherein the electronic material comprises metal particles, colloids, wire, metal salt or a combination thereof.

9. The apparatus of claim 8 , wherein the electronic material comprises conducting material particles, semi-conducting material particles, magnetic material particles, dielectric material particles, low band gap material particles, wide band gap material particles, electrolytic material particles, ionic conducting material particles, electronic conducting material particles, thermally conducting material particles, catalytic material particles, insulating material particles, or a combination thereof.

Continuity (3)
Continuation 15454920 · Mar 9, 2017
Provisional Application 62305967 · Mar 9, 2016
Related Publication 20220234293A1 · Jul 28, 2022