Optoelectronic semiconductor device and method for manufacturing an optoelectronic semiconductor device
In an embodiment a method for manufacturing an optoelectronic semiconductor device includes providing a semiconductor body having an active region configured to generate electromagnetic radiation and a coupling-out surface along a main radiation direction, forming a mask layer having a plurality of recesses on the coupling-out surface on the semiconductor body, depositing metallic separators in the recesses and applying a wavelength conversion element to the coupling-out surface of the semiconductor body such that the metallic separators are at least partially embedded therein.
1. A method for manufacturing an optoelectronic semiconductor device, the method comprising:
providing a semiconductor body including an active region configured to generate electromagnetic radiation and a coupling-out surface along a main radiation direction;
applying an adhesive layer to the semiconductor body on a side facing the coupling-out surface;
forming a mask layer having a plurality of recesses on the coupling-out surface of the semiconductor body, wherein the recesses extend from a surface of the mask layer facing away from the semiconductor body to the adhesive layer and completely penetrate the mask layer;
depositing metallic separators in the recesses; and
applying a wavelength conversion element to the coupling-out surface of the semiconductor body such that the metallic separators are at least partially embedded therein.
2. The method according to claim 1 , further comprising removing the adhesive layer after depositing the metallic separators.
3. The method according to claim 1 ,
wherein the recesses are aligned with emission regions of the semiconductor body in a direction transverse to the main radiation direction.
4. The method according to claim 1 , wherein the metallic separators form a grid which divides the wavelength conversion element into conversion regions.
5. The method according to claim 1 , further comprising removing the mask layer after depositing the metallic separators.
6. The method according to claim 5 , wherein depositing the metallic separators comprises galvanically depositing the metallic separators.
7. The method according to claim 1 , further comprising electrolessly depositing a reflective layer on the metallic separators.
8. The method according to claim 1 , further comprising removing a material of the wavelength conversion element from a side of the metallic separators facing away from the semiconductor body.
9. The method according to claim 1 , further comprising forming the wavelength conversion element with an extension in the main radiation direction in a range of 5 μm to 20 μm.
10. The method according to claim 1 , further comprising forming a reflective layer on the metallic separators.
11. The method according to claim 1 , further comprising forming the metallic separators such that they completely penetrate the wavelength conversion element on a side facing away from the semiconductor body.
12. A method for manufacturing an optoelectronic semiconductor device, the method comprising:
providing a semiconductor body including an active region configured to generate electromagnetic radiation along a main radiation direction and a coupling-out surface, the semiconductor body comprising a plurality of independently controllable emission regions;
applying an adhesive layer to the semiconductor body on a side facing the coupling-out surface;
forming a mask layer having a plurality of recesses on the coupling-out surface of the semiconductor body, wherein the recesses extend from a surface of the mask layer facing away from the semiconductor body to the adhesive layer and completely penetrate the mask layer;
depositing metallic separators in the recesses; and
applying a wavelength conversion element to the coupling-out surface of the semiconductor body such that the metallic separators are at least partially embedded therein.
13. The method according to claim 12 , further comprising assigning each emission region to exactly one conversion region of the wavelength conversion element.
14. The method according to claim 13 , further comprising arranging different converter materials in different conversion regions.