Granted Patent B2

US 12,575,369 · App. 17/703,419 · Granted Mar 10, 2026

Inventors: Makoto Hino (Nagoya, JP); Hiroaki Suzuki (Nagoya, JP)

Assignee: NITERRA CO., LTD.

H10P72/722H05B3/143

Abstract

Claims (32)

1 . An electrode-embedded member comprising:

a disc-shaped base including a ceramic sintered body;

an electrode embedded in the base; and

a plurality of pin-shaped projections that project upward from an upper surface of the base,

wherein the upper surface of the base is a curved surface having a shape protruding toward a center of the base,

wherein the plurality of pin-shaped projections include

first pin-shaped projections whose heights from the upper surface to respective upper ends are substantially identical to each other, and

second pin-shaped projections whose heights from the upper surface to respective upper ends are each lower than the height of each of the first pin-shaped projections, and

wherein the second pin-shaped projections are disposed in a ring-shaped area in the upper surface surrounded by concentric circles centered at the center,

wherein ΔH>ΔG≥0.5×ΔH is satisfied where

ΔG is a difference between the height of each of the first pin-shaped projections and the height of, among the second pin-shaped projections, the second pin-shaped projection whose height is lowest, and

ΔH is a difference in a vertical direction between the upper end of the first pin-shaped projection that is closest to the center of the base and the upper end of the first pin-shaped projection that is closest to an outer edge of the base.

2 . An electrode-embedded member comprising:

a disc-shaped base including a ceramic sintered body;

an electrode embedded in the base; and

a plurality of pin-shaped projections that project upward from an upper surface of the base,

wherein the upper surface of the base is a curved surface having a shape protruding toward a center of the base,

wherein the plurality of pin-shaped projections include

first pin-shaped projections whose heights from the upper surface to respective upper ends are substantially identical to each other, and

second pin-shaped projections whose heights from the upper surface to respective upper ends are each lower than the height of each of the first pin-shaped projections, and

wherein the second pin-shaped projections are disposed in a ring-shaped area in the upper surface surrounded by concentric circles centered at the center,

wherein, with a vertical straight line that passes through the center of the base being set as a center axis, when a placement curved surface constituted by the upper ends of the first pin-shaped projections is cut by mutually orthogonal two cross-sections that pass through the center axis to obtain two profile curves, a determination coefficient R 2 with respect to an approximate expression when one of the profile curves is subjected to quadratic curve approximation and a determination coefficient R 2 with respect to an approximate expression when another of the profile curves is subjected to quadratic curve approximation are each 0.99 or more.

3 . A substrate holding member comprising:

the electrode-embedded member according to claim 1 or claim 2 ; and

a supporting member that is bonded to a lower surface of the base opposite to the upper surface and that supports the electrode-embedded member.

4 . A ceramic heater comprising:

the substrate holding member according to claim 3 ,

wherein the electrode is a heater electrode.

5 . An electrostatic chuck comprising:

the substrate holding member according to claim 3 ,

wherein the electrode is a heater electrode, and

wherein the substrate holding member further includes an electrostatic attraction electrode.

Assignments (2)

Priority Claims (2)

Continuity (1)

References Cited (18)