IP Library Patent Application 17732446
Patent Application
App. No. 17/732,446

VESSELS AND METHODS FOR STORING AND DELIVERY A REAGENT

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Quick Facts
Patent No.
US None
App. No.
17/732,446
Abstract

A storage vessel to contain reagent material. The storage vessel includes a vessel with a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior including a volume, and an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.

Claims (24)

1 . A storage vessel to contain reagent material, comprising:

a vessel comprising a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior comprising a volume, and

an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.

2 . A vessel of claim 1 , further comprising a reagent material selected from: SbF 5 , Al(CH 3 ) 3 , Ga(CH 3 ) 3 , WF 6 , MoF 6 , and SiCl 4 .

3 . A vessel of claim 2 , wherein the reagent material is antimony pentafluoride (SbF 5 ).

4 . A vessel of claim 1 , wherein the second end is located:

axially from the sidewalls, and

at a distance in a range from 25 to 75 percent of a height of the vessel.

5 . A vessel of claim 4 , wherein the second end is located at a distance in a range from 40 to 60 percent of the height of the vessel.

6 . A vessel of claim 1 , wherein the vessel is cylindrical.

7 . A method of adding reagent material to a storage vessel, the method comprising:

to a storage vessel that comprises:

a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, and an interior defined by the bottom, the top, and the sidewalls,

an extension tube having a first end engaged with the outlet and a second end that is located:

axially from the sidewalls, and

at a distance is in a range from 25 to 75 percent of the height of the vessel, and

adding liquid reagent material to the interior to a level of the liquid that is below the second end of the extension tube with the vessel in any orientation, including: in an upright orientation; in a horizontal orientation, and in an upside-down orientation.

8 . A method of claim 7 , comprising adding the liquid reagent material to the interior to fill at least 20 percent of a total volume of the storage vessel.

9 . A method of claim 7 , comprising adding the liquid reagent material to the interior to fill less than 45 percent of a total volume of the storage vessel.

10 . A storage vessel adapted to store reagent material in a liquid phase and a gas phase, the storage vessel comprising:

a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, an interior defined by the bottom, the top, and the sidewalls, and a valve at the outlet,

an extension tube having a first end engaged with the valve and a second end that is located:

axially from the sidewalls, and

at a distance that is in a range from 25 to 75 percent of a height of the vessel.

Assignments (2)
SECURITY INTEREST Recorded Jun 2, 2023
From: ENTEGRIS, INC.; CMC MATERIALS LLC
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 063857/0199 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 10, 2022
From: BYL, OLEG; EDWARDS, DOUGLAS; VERBISKY, JESSICA
To: ENTEGRIS, INC.
Reel/Frame 060162/0283 →