VESSELS AND METHODS FOR STORING AND DELIVERY A REAGENT
A storage vessel to contain reagent material. The storage vessel includes a vessel with a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior including a volume, and an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.
1 . A storage vessel to contain reagent material, comprising:
a vessel comprising a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, a valve at the outlet, and an interior defined by the bottom, the top, and the sidewalls, the interior comprising a volume, and
an extension tube having a first end engaged with the valve and a second end located toward a center of the interior volume from the first end such that, regardless of orientation of the vessel, the second end is above at least 25 percent of a volume of the interior volume.
2 . A vessel of claim 1 , further comprising a reagent material selected from: SbF 5 , Al(CH 3 ) 3 , Ga(CH 3 ) 3 , WF 6 , MoF 6 , and SiCl 4 .
3 . A vessel of claim 2 , wherein the reagent material is antimony pentafluoride (SbF 5 ).
4 . A vessel of claim 1 , wherein the second end is located:
axially from the sidewalls, and
at a distance in a range from 25 to 75 percent of a height of the vessel.
5 . A vessel of claim 4 , wherein the second end is located at a distance in a range from 40 to 60 percent of the height of the vessel.
6 . A vessel of claim 1 , wherein the vessel is cylindrical.
7 . A method of adding reagent material to a storage vessel, the method comprising:
to a storage vessel that comprises:
a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, and an interior defined by the bottom, the top, and the sidewalls,
an extension tube having a first end engaged with the outlet and a second end that is located:
axially from the sidewalls, and
at a distance is in a range from 25 to 75 percent of the height of the vessel, and
adding liquid reagent material to the interior to a level of the liquid that is below the second end of the extension tube with the vessel in any orientation, including: in an upright orientation; in a horizontal orientation, and in an upside-down orientation.
8 . A method of claim 7 , comprising adding the liquid reagent material to the interior to fill at least 20 percent of a total volume of the storage vessel.
9 . A method of claim 7 , comprising adding the liquid reagent material to the interior to fill less than 45 percent of a total volume of the storage vessel.
10 . A storage vessel adapted to store reagent material in a liquid phase and a gas phase, the storage vessel comprising:
a bottom, a top, an outlet at the top, sidewalls extending from the bottom to the top, an interior defined by the bottom, the top, and the sidewalls, and a valve at the outlet,
an extension tube having a first end engaged with the valve and a second end that is located:
axially from the sidewalls, and
at a distance that is in a range from 25 to 75 percent of a height of the vessel.