Image device and motherboard for image device
At a motherboard for an image device, which is used for manufacturing an image device such as a liquid crystal device, an organic electroluminescence device, a mirror device, and an image-capturing device, a mark for alignment is provided on an outer side of a pixel area in which a plurality of pixels are arranged. In the photo-lithography process, a light exposure mask is arranged by using the mark as a reference position. For the mark, a recessed portion provided in a motherboard main body is filled with a filling film. The recessed portion includes a first groove extending along a first direction and a second groove extending along a second direction intersecting with the first direction, the second groove not intersecting with the first groove in plan view.
1. An image device comprising:
a substrate body; and
a mark including:
a recessed portion provided in the substrate body and
a filling film filled in the recessed portion, wherein
the recessed portion includes:
a first groove extending along a first direction and
a second groove extending along a second direction intersecting with the first direction, the second groove disconnected from the first groove in a plan view,
wherein
a pixel electrode for applying a voltage to an electro-optical layer, a light-emitting element, a mirror, or a photoreceptor element is provided in a pixel.
2. The image device according to claim 1 , wherein
at least one of the first groove and the second groove is provided in plurality.
3. The image device according to claim 2 , wherein
a plurality of the first grooves and a plurality of the second grooves are provided.
4. The image device according to claim 3 , wherein
the plurality of the first grooves and the plurality of the second grooves are arranged along an outline of the mark.
5. The image device according to claim 1 , wherein
the first groove and the second groove are away from each other.
6. The image device according to claim 1 , wherein
the substrate body is transmissive, and
the filling film includes a light-shielding film.
7. The image device according to claim 1 , wherein
the substrate body has a light-shielding property, and
the filling film is transmissive.
8. A motherboard for an image device, the motherboard comprising:
a motherboard main body; and
a mark including:
a recessed portion provided in the motherboard main body and
a filling film filled in the recessed portion, wherein
the recessed portion includes:
a first groove extending along a first direction and
a second groove extending along a second direction intersecting with the first direction, the second groove disconnected from the first groove in a plan view,
wherein
a pixel electrode for applying a voltage to an electro-optical layer, a light-emitting element, a mirror, or a photoreceptor element is provided in a pixel.
9. An image device comprising:
a substrate body including:
a first recess provided in a pixel region, and
a second recess provided outside the pixel region;
a capacitance element including a multi-layered film provided in the first recess; and
a mark including a filling film in the second recess including a multi-layered film identical to the multi-layered film constituting the capacitance element, wherein
the first recess includes:
a first groove extends along a first direction, and
a second groove extends along a second direction that intersects the first direction and disconnects from the first groove in a planar view, and
the second recess includes:
a third groove extends along the first direction, and
a fourth groove extends along the second direction and connects to the third groove in the planar view.
10. The imaging device according to claim 9 , wherein the second groove of the first recess is provided at a position away from the first groove of the first recess.
11. The imaging device according to claim 9 , wherein in the second recess, the third groove is provided to connect to one of an opposing side surfaces of the fourth groove, and the fourth groove is provided to connect to one of an opposing side surfaces of the third groove.
12. The imaging device according to claim 9 , wherein in the second recess, the third groove and the fourth groove are alternately arranged along an outer edge of the mark.