Long-wave infrared sensor and electronic device including the same
Provided is a long-wave infrared (LWIR) sensor including a substrate, a magnetic resistance device on the substrate, and an LWIR absorption layer on the magnetic resistance device, wherein a resistance of the magnetic resistance device changes based on temperature, and wherein the LWIR absorption layer is configured to absorb LWIR rays and generate heat.
1. A long-wave infrared (LWIR) sensor comprising:
a substrate;
a magnetic resistance device on the substrate; and
an LWIR absorption layer on the magnetic resistance device, the LWIR absorption layer being configured to absorb LWIR rays and generate heat,
wherein a resistance of the magnetic resistance device changes based on temperature change based on the heat generated by the LWIR absorption layer.
2. The LWIR sensor of claim 1 , wherein the magnetic resistance device comprises:
a first magnetic layer;
a second magnetic layer on the first magnetic layer; and
a tunneling barrier layer between the first magnetic layer and the second magnetic layer.
3. The LWIR sensor of claim 1 , wherein a thermal stability of the magnetic resistance device is less than 10.
4. The LWIR sensor of claim 1 , wherein a width of the magnetic resistance device ranges from 1 nm to 100 nm.
5. The LWIR sensor of claim 1 , further comprising a reflective layer provided between the substrate and the magnetic resistance device.
6. The LWIR sensor of claim 1 , further comprising an insulating layer provided adjacent to a side surface of the magnetic resistance device.
7. The LWIR sensor of claim 1 , further comprising a transmissive cap provided on the substrate,
wherein the transmissive cap is provided on the magnetic resistance device and the LWIR absorption layer.
8. The LWIR sensor of claim 7 , wherein an air pressure of an area inside of the transmissive cap is lower than an air pressure outside of the transmissive cap.
9. The LWIR sensor of claim 8 , wherein the transmissive cap is configured to selectively transmit LWIR rays.
10. The LWIR sensor of claim 7 , further comprising a focusing lens provided on a first side of the transmissive cap, the side being opposite to a second side of the transmission cap on which the LWIR absorption layer is provided.
11. The LWIR sensor of claim 10 , wherein the focusing lens is configured to selectively transmit LWIR rays.
12. A long-wave infrared (LWIR) sensor comprising:
a plurality of pixels provided in a plurality of rows and a plurality of columns,
wherein each of the plurality of pixels comprises:
a substrate;
a magnetic resistance device on the substrate; and
an LWIR absorption layer on the magnetic resistance device,
wherein a resistance of the magnetic resistance device changes based on temperature, and
wherein the LWIR absorption layer is configured to absorb LWIR rays and emit heat.
13. The LWIR sensor of claim 12 , wherein the magnetic resistance device comprises:
a first magnetic layer;
a second magnetic layer on the first magnetic layer; and
a tunneling barrier layer between the first magnetic layer and the second magnetic layer.
14. The LWIR sensor of claim 13 , wherein a thermal stability of the magnetic resistance device is less than 10.
15. The LWIR sensor of claim 12 , wherein the plurality of pixels further comprise a plurality of transmissive caps, respectively, and
wherein each of the plurality of transmissive caps is provided on the magnetic resistance device and the LWIR absorption layer.
16. The LWIR sensor of claim 15 , wherein an air pressure of areas inside of the plurality of transmissive caps is lower than an air pressure outside of the plurality of transmissive caps.
17. The LWIR sensor of claim 12 , wherein the plurality of pixels further comprise a plurality of focusing lenses, respectively, and
wherein the plurality of focusing lenses face the plurality of transmissive caps, respectively.
18. The LWIR sensor of claim 12 , wherein the plurality of pixels further comprise a plurality of reflective layers, respectively, and
wherein each of the plurality of reflective layers is provided between the substrate and the magnetic resistance device.
19. The LWIR sensor of claim 12 , wherein in each of the plurality of pixels, the magnetic resistance device is provided as a single magnetic resistance device or a plurality of magnetic resistance devices.
20. An electronic device comprising:
a long-wave infrared (LWIR) sensor; and
a processor configured to receive a sensing signal from the LWIR sensor and process the sensing signal,
wherein the LWIR sensor comprises:
a substrate;
a magnetic resistance device on the substrate; and
an LWIR absorption layer on the magnetic resistance device,
wherein a resistance of the magnetic resistance device changes based on temperature, and
wherein the LWIR absorption layer is configured to absorb LWIR rays and emit heat.