Inclination adjusting device and robot provided with the same
At least three spherical surface sliding bearings provided between a first member and a second member and disposed at mutually different positions when seen in the height direction, are provided. Each of the at least three spherical surface sliding bearings has an inner ring and an outer ring, either one of the inner ring and the outer ring is attached to the first member, and the other is attached to the second member. In at least two of the at least three spherical surface sliding bearings, the height adjustment mechanism intervenes, at least either one of between one of the inner ring and the outer ring, and the first member, and between the other and the second member.
1. A robot configured as a part of a semiconductor manufacturing device, and configured to transfer a semiconductor substrate, while holding the semiconductor substrate, the robot comprising:
an inclination adjusting device configured to adjust an inclination of a second structure to a first structure, the first structure constituting a part of the semiconductor manufacturing device and the second structure constituting another part of the semiconductor manufacturing device, the inclination adjusting device including:
the first structure;
the second structure provided opposing to the first structure; and
a spherical surface sliding bearing provided between the first structure and the second structure, wherein
the spherical surface sliding bearing has an inner ring and an outer ring, either one of the inner ring and the outer ring being attached to the first structure, and the other being attached to the second structure,
in the spherical surface sliding bearing, a height adjustment structure intervenes at least either one of between one of the inner ring and the outer ring, and the first structure, and between the other and the second structure,
the height adjustment structure includes:
a motor;
a male threaded structure that is rotated by the motor; and
a female threaded structure that moves in a height direction by rotation of the male threaded structure, and
the female threaded structure is attached to the inner ring;
a blade where a holding position at which the semiconductor substrate is held is defined;
a hold structure configured to hold a base end of the blade; and
a wrist part provided on a base-end side from the hold structure.
2. The robot of claim 1 , wherein the height adjustment structure further includes a speed-reduction structure configured to reduce power by the motor and output the power to the female threaded structure.
3. The robot of claim 1 , further comprising a support structure configured to support the hold structure,
wherein the hold structure is linearly movable on the support structure, and
wherein the inclination adjusting device is provided between the wrist part and the support structure so that the first structure is located on the wrist part side and the second structure is located on a support structure side.
4. The robot of claim 3 , further comprising a rotation shaft extending in a height direction and attached to the second structure,
wherein the support structure is rotatable around the rotation shaft.
5. The robot of claim 1 , further comprising a base body extending in a height direction, a base end of the wrist part being attached to the base body,
wherein the wrist part is movable on the base body in the height direction of the base body.