Diamond coated tool
A diamond coated tool includes a base material and a diamond layer provided on the base material. The diamond layer has a boron content of 1×10 3 ppma or more and 1×10 6 ppma or less and an oxygen content of 1×10 2 ppma or more and 1×10 5 ppma or less in a first region surrounded by a surface of the diamond layer and a first imaginary plane located at a distance of 1 μm from the surface in a thickness direction.
1. A diamond coated tool comprising:
a base material; and
a diamond layer provided on the base material, wherein in a first region surrounded by a surface of the diamond layer and a first imaginary plane located at a distance of 1 μm from the surface in a thickness direction, the diamond layer has a boron content of 1×10 3 ppma or more and 4×10 5 ppma or less, and an oxygen content of 1×10 2 ppma or more and 1×10 5 ppma or less.
2. The diamond coated tool according to claim 1 , wherein the diamond layer has a boron content of 1×10 3 ppma or less in a second region surrounded by an interface between the base material and the diamond layer, and a second imaginary plane located at a distance of 1 μm from the interface in the thickness direction.
3. The diamond coated tool according to claim 1 , wherein the diamond layer has a boron content of 5×10 2 ppma or less in a second region surrounded by an interface between the base material and the diamond layer, and a second imaginary plane located at a distance of 1 μm from the interface in the thickness direction.
4. The diamond coated tool according claim 1 , wherein
the diamond layer is formed of an alternating layer in which a first unit layer and a second unit layer are alternately stacked,
in the alternating layer, the first unit layer is disposed on an outermost surface side, and the second unit layer is disposed on a side in contact with the base material,
the first unit layer has a boron content of 1×10 3 ppma or more and 4×10 5 ppma or less, and an oxygen content of 1×10 2 ppma or more and 1×10 5 ppma or less,
the second unit layer has a boron content of 1×10 3 ppma or less,
the first unit layer has a thickness of 1 μm or more, and
the second unit layer has a thickness of 1 μm or more.
5. The diamond coated tool according to claim 1 , wherein the first region contains boron oxide.
6. The diamond coated tool according to claim 1 , wherein, in an XPS spectrum of the first region, a ratio I bo /I b is 0.1 or more and 0.8 or less, where the ratio I bo /I b represents a ratio of an integrated intensity I bo originating from binding energy of boron and oxygen to an integrated intensity I b originating from total binding energy of boron.
7. The diamond coated tool according to claim 5 , wherein, in a Raman spectrum of the first region, a ratio A bo /A dia is 0.1 or more and 10 or less, where the ratio A bo /A dia represents a ratio of a peak integrated intensity A bo originating from the boron oxide to a peak integrated intensity A dia originating from a diamond.
8. A diamond coated tool comprising:
a base material; and
a diamond layer provided on the base material, wherein
the diamond layer is formed of an alternating layer in which a first unit layer and a second unit layer are alternately stacked,
in the alternating layer, an outermost surface side corresponds to the first unit layer, and a side in contact with the base material corresponds to the second unit layer,
the first unit layer has a boron content of 1×10 3 ppma or more and 4×10 5 ppma or less and an oxygen content of 1×10 2 ppma or more and 1×10 5 ppma or less, and
the second unit layer has a boron content of 1×10 3 ppma or less.
9. The diamond coated tool according to claim 8 , wherein
the first unit layer has a thickness of 0.2 μm or more, and
the second unit layer has a thickness of 0.2 μm or more.