Module for chemically processing a substrate

1. A module for chemically processing a substrate, comprising:

an immersion chamber,

a spray unit, and

a motion unit,

wherein the immersion chamber is configured to receive a first liquid and the substrate, so that the substrate is immersed in the first liquid,

wherein the spray unit comprises a plurality of spray nozzles, which are configured to spray a second liquid within the immersion chamber,

wherein the motion unit is configured to provide a relative motion between the substrate and the spray unit, and

wherein the spray unit extends along the substrate to be processed such that the second liquid is sprayed on the substrate substantially in a thickness direction of the substrate,

wherein the plurality of spray nozzles of the spray unit are arranged in several rows in the immersion chamber along a height direction of the immersion chamber, and wherein the spray nozzles are at least partially arranged in a wall of the immersion chamber.

2. The module according to claim 1 , further comprising an ultrasonic unit configured to provide ultrasound to agitate the first liquid in the immersion chamber.

3. The module according to claim 2 , wherein the ultrasound unit and the spray unit are at least partially arranged at a removable plate element configured to be moved relative to the immersion chamber.

4. The module according to claim 1 , further comprising an exhaust unit comprising an upper exhaust arranged above the first liquid and a bottom exhaust arranged at the bottom of the immersion chamber.

5. The module according to claim 1 , wherein the motion unit is configured to move the substrate relative to the immersion chamber in a first direction in and out of the immersion chamber and to move the substrate relative to the immersion chamber in another direction perpendicular to the first direction.

6. The module according to claim 1 , wherein the spray nozzles are at least partially arranged in spray bars.

7. The module according to claim 1 , wherein the spray unit is configured to spray the second liquid in a spray direction, which is non-perpendicular tilted relative to a wall of the immersion chamber and directed towards a bottom of the immersion chamber.

8. The module according to claim 1 , wherein in a row of adjacent first, second and third spray nozzles, the first and third spray nozzles are tilted similar and the second spray nozzle is arranged differently to the first and third spray nozzles.

9. The module according to claim 1 , further comprising a chamber cover unit comprising several cover elements configured to close an opening in the immersion chamber in a closed position and to surround a substrate to be transferred through the opening in a transfer position.

10. The module according to claim 9 , wherein the chamber cover unit is further configured to open the opening in an open position.

11. The module according to claim 9 , wherein the chamber cover unit further comprises a processing element configured to control a movement of the chamber cover elements depending on motion data received from the motion unit controlling the relative motion between the substrate and the spray unit.

12. The module according to claim 1 , further comprising a drain, rinse and dry unit configured to blow and/or to suck liquid and/or gas in and/or out of the immersion chamber and/or the spray unit.

13. The module according to claim 12 , wherein the drain, rinse and dry unit is configured for waterfall-rinsing, waterfall-chemical processing and/or waterfall quenching.

14. The module according to claim 12 , wherein the drain, rinse and dry unit comprises a temperature controlling element configured to heat or cool the liquid and/or gas to be blown or sucked through the immersion chamber and/or the spray unit.

15. The module according to claim 1 , wherein the plurality of spray nozzles are arranged in the immersion chamber such that they are horizontally and vertically aligned.

16. A method for chemically processing a substrate, comprising the following steps, not necessarily in this order:

inserting a first liquid and a substrate into an immersion chamber, so that the substrate is immersed in the first liquid,

removing the first liquid from the immersion chamber,

spraying a second liquid within the immersion chamber on the substrate in a thickness direction of the substrate by means of a spray unit comprising several rows of spray nozzles, arranged in the immersion chamber along a height direction of the immersion chamber, wherein the spray nozzles are at least partially arranged in a wall of the immersion chamber, and

relatively moving the substrate and the spray unit by means of a motion unit.

17. The method according to claim 16 , wherein the spraying of the second liquid is done while the substrate is at least partially immersed in the first liquid and before removing the first liquid from the immersion chamber.

18. The method according to claim 16 , further comprising the step of removing the substrate out of the immersion chamber while rinsing the immersion chamber for a subsequent processing of the same substrate.

19. The method according to claim 16 , wherein the plurality of spray nozzles are arranged in the immersion chamber such that they are horizontally and vertically aligned.