Microelectronic device assemblies and packages including multiple device stacks and related methods
Disclosed is a microelectronic device assembly comprising a substrate having conductors exposed on a surface thereof. Two or more stacks of microelectronic devices are located on the substrate, and microelectronic devices of the stacks are connected to vertical conductive paths external to the stacks and extending to the substrate and to lateral conductive paths extending between the stacks. Methods of fabrication are also disclosed.
1. A microelectronic device assembly, comprising:
a substrate;
two or more stacks of multiple levels of microelectronic devices, the microelectronic devices of different stacks of a same level operably coupled to conductive traces carried by a common dielectric film to via locations outside a footprint of at least one of the two or more stacks and to other conductive traces carried by the common dielectric film extending laterally between at least some of the microelectronic devices of the two or more stacks of multiple levels of microelectronic devices; and
conductive vias extending through the common dielectric film at the via locations to exposed conductor of the substrate and in contact with at least some of the conductive traces or the other conductive traces.
2. The microelectronic device assembly of claim 1 , wherein at least some of the conductive traces or the other conductive traces are operably coupled to route signals between microelectronic devices of different stacks.
3. The microelectronic device assembly of claim 1 , wherein at least some of the conductive vias comprising conductive materials are configured, in combination with at least some of the conductive traces or the other conductive traces of the microelectronic devices of the two or more stacks, to route signals between at least one of two or more microelectronic devices of different stacks or two or more microelectronic devices of the same stack.
4. The microelectronic device assembly of claim 1 , wherein at least some of the conductive vias at the via locations and extending to the substrate are between at least two of the two or more stacks.
5. The microelectronic device assembly of claim 1 , wherein at least some of the microelectronic devices comprise semiconductor dice.
6. The microelectronic device assembly of claim 1 , wherein all of the microelectronic devices comprise semiconductor dice configured in a master/slave DDR architecture comprising a master memory die on the substrate at a base of at least one stack and a remainder of the semiconductor dice in the microelectronic device assembly comprise slave memory dice.
7. The microelectronic device assembly of claim 6 , further comprising a master memory die at the base of each stack.
8. The microelectronic device assembly of claim 1 , wherein the microelectronic devices comprise semiconductor dice configured as memory dice and at least one logic die, a logic die being located at a base of at least one stack.
9. The microelectronic device assembly of claim 8 , wherein the logic die is located at the base of each stack.
10. The microelectronic device assembly of claim 1 , wherein the microelectronic devices of the two or more stacks comprise semiconductor dice exhibiting at least two different functionalities.
11. The microelectronic device assembly of claim 1 , wherein the conductive traces and the other conductive traces carried by the common dielectric film are electrically isolated at different levels by dielectric material.
12. The microelectronic device assembly of claim 1 , wherein at least some of the conductive traces, the other conductive traces, or both, carried by at least some of the common dielectric film of different levels differ in configuration.
13. The microelectronic device assembly of claim 1 , wherein at least one of power or ground\bias for the microelectronic devices of at least one level of the two or more stacks may be gang coupled to a common via.
14. The microelectronic device assembly of claim 1 , wherein at least one of power or ground\bias for the microelectronic devices of at least one level of the two or more stacks may be individually coupled to different vias.
15. The microelectronic device assembly of claim 1 , wherein the microelectronic devices comprise one or more of DRAM, NAND Flash or 3D Xpoint (SXP) memory.
16. The microelectronic device assembly of claim 1 , wherein the two or more stacks are at least laterally encapsulated by a dielectric material.
17. The microelectronic device assembly of claim 16 , further comprising a heat sink over a thermal interface material (TIM) on an uppermost microelectronic device of at least one of the two or more stacks.
18. The microelectronic device assembly of claim 1 , wherein the microelectronic devices comprise semiconductor dice devoid of through silicon vias (TSVs).
19. The microelectronic device assembly of claim 1 , wherein the microelectronic devices comprise semiconductor dice characterized as known good die (KGD).
20. A method comprising:
providing a reconstructed wafer or panel comprising semiconductor dice in mutually spaced relationship and having a polymer film over active surfaces of the semiconductor dice;
exposing bond pads on the active surfaces through the polymer film;
forming conductive traces from the exposed bond pads over the polymer film to via locations beyond one or more lateral peripheries of the semiconductor dice and between the semiconductor dice;
singulating groups of two or more semiconductor dice through the polymer film and stacking the singulated groups of two or more semiconductor dice;
forming via holes through the polymer film on stacks of the singulated groups at the via locations; and
filling the via holes with conductive material.