IP Library Granted Patent US 11,635,568
Granted Patent B2
US 11,635,568 · App. 17/809,580 · Granted Apr 25, 2023

Photonics light signal transmission

Inventors: Douglas Coolbaugh (Albany, NY); Gerald L. Leake, Jr. (Albany, NY)
Assignee: THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK
G02B6/122G02B6/136H01L21/486H01L21/76202G02B2006/12061H01L21/4857
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Quick Facts
Patent No.
US 11,635,568
App. No.
17/809,580
Granted
Apr 25, 2023
Kind
B2
Abstract

There is set forth herein a photonics device. The photonics device can comprise a substrate, a conductive material formation, a dielectric stack, and a barrier layer. The photonics device can transmit a light signal.

Claims (47)

1. A photonics device, comprising:

a substrate;

a photonics structure on the substrate, the photonics structure having a light signal transmitting region;

a conductive material formation on the substrate, the conductive material formation having an elevation thereof;

a dielectric stack on the substrate;

a barrier layer having a first portion that extends through the light signal transmitting region of the photonics structure and a second portion formed over the conductive material formation, wherein the first portion further formed over the dielectric stack, the barrier layer further including an exposed portion of the dielectric stack within the light signal transmitting region; and

a cladding dielectric material layer over the barrier layer such that a portion of the layer of cladding dielectric material is formed over the exposed portion of the dielectric stack, the cladding dielectric material layer further having a top surface with a horizontal plane.

2. The device of claim 1 , wherein:

the photonics structure further having a planar top surface thereof that is partially defined by the dielectric stack and partially defined by the conductive material formation; and

the barrier layer is formed over the planar top surface of the photonics structure.

3. The device of claim 1 , wherein:

the light signal transmitting region of the photonics structure is defined between a first vertically extending plane and a spaced apart second vertically extending plane; and

the barrier layer includes an elevation thereof, and the first portion of the barrier layer facilitates transmitting of a light signal within the light signal transmitting region through the elevation.

4. The device of claim 1 , further comprising a second conductive material formation being spaced apart from the conductive material formation and being at an elevation in common with the elevation of the conductive material formation, and wherein the barrier layer further includes a third portion formed on the second conductive material formation.

5. The device of claim 1 , wherein the conductive material formation is a metallization layer formed of copper.

6. The device of claim 1 , wherein the dielectric stack further includes a photonics device configured to transmit or receive a light signal.

7. The device of claim 1 , further comprising a photonics structure on the cladding dielectric material layer.

8. A photonics device, comprising:

a substrate;

a photonics structure on the substrate, the photonics structure having a light signal transmitting region;

a conductive material formation on the substrate, the conductive material formation having an elevation thereof;

a dielectric stack on the substrate;

a barrier layer having a first portion that extends through the light signal transmitting region of the photonics structure and a second portion formed over the conductive material formation, wherein the first portion further formed over the dielectric stack, the barrier layer further including an exposed portion of the dielectric stack within the light signal transmitting region;

a cladding dielectric material layer over the barrier layer such that a portion of the layer of cladding dielectric material is formed over the exposed portion of the dielectric stack, the cladding dielectric material layer further having a top surface with a horizontal plane; and

a waveguide material layer on the cladding dielectric material layer, the waveguide material layer patterned to define a waveguide, and the waveguide material layer having a layer of planarized deposited oxide thereover.

9. The device of claim 8 , wherein the photonics structure includes a planar top surface such that the planar top surface is partially defined by the dielectric stack and partially defined by the conductive material formation.

10. The device of claim 8 , wherein the light signal transmitting region of the photonics structure is defined between a first vertically extending plane and a spaced apart second vertically extending plane.

11. The device of claim 8 , further including a second conductive material formation on the substrate, and wherein the barrier layer further includes a third portion formed on the second conductive material formation.

12. The device of claim 8 , wherein the conductive material formation is a metallization layer.

13. The device of claim 8 , further comprising a photonics device within the dielectric stack, the photonics device configured to transmit or receive a light signal.

14. The device of claim 8 , wherein:

the photonics structure further having a planar top surface thereof that is partially defined by the dielectric stack and partially defined by the conductive material formation; and

the barrier layer is formed over the planar top surface of the photonics structure.

15. The device of claim 8 , wherein:

the light signal transmitting region of the photonics structure is defined between a first vertically extending plane and a spaced apart second vertically extending plane; and

the barrier layer includes an elevation thereof, and the first portion of the barrier layer facilitates transmitting of a light signal within the light signal transmitting region through the elevation.

16. The device of claim 8 , wherein the barrier layer further includes a third portion formed on a second conductive material formation, the second conductive material formation being spaced apart from the conductive material formation and being at an elevation in common with the elevation of the conductive material formation.

17. The device of claim 8 , further comprising a photonics structure on the cladding dielectric material layer.

18. A photonics device, comprising:

a substrate;

a light signal transmission means for transmitting a light signal, the light signal transmission means located on the substrate;

a conductive means for conducting an electrical signal, the conductive means on the substrate;

a dielectric stack on the substrate;

a barrier layer having a first portion that extends through the light signal transmission means and a second portion formed over the conductive means, wherein the first portion further formed over the dielectric stack, the barrier layer further including an exposed portion of the dielectric stack within the light signal transmission means; and

a cladding dielectric material layer over the barrier layer such that a portion of the layer of cladding dielectric material is formed over the exposed portion of the dielectric stack formed within the light signal transmission means.

19. The device of claim 18 , further including a waveguide means for defining a waveguide, the waveguide means on the cladding dielectric material layer.

20. The device of claim 18 , wherein the dielectric stack further includes a signaling means for transmitting or receiving a light signal.

Assignments (2)
CONFIRMATORY LICENSE Recorded Sep 4, 2025
From: THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK
To: GOVERNMENT OF THE UNITED STATES AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE
Reel/Frame 072853/0304 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 29, 2022
From: COOLBAUGH, DOUGLAS; LEAKE, GERALD L., JR.
To: THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK
Reel/Frame 060349/0648 →
Continuity (4)
Continuation 16998736 · Aug 20, 2020
Continuation 16372763 · Apr 2, 2019
Provisional Application 62653232 · Apr 5, 2018
Related Publication 20220350076A1 · Nov 3, 2022