Chemical delivery system and method of operating the chemical delivery system

1. A method of operating a chemical delivery system comprising at least one bulk container, at least one run/refill chamber, and at least one deposition chamber, the method comprising: storing a precursor in at least one of the bulk containers; transporting the precursor in vapor form from the bulk container to a first run/refill chamber; receiving the precursor in vapor form in the first run/refill chamber; condensing and storing the precursor in solid form in the first run/refill chamber; causing sublimation of the solid precursor within the first run/refill chamber; and transporting the sublimed precursor in vapor form from the first run/refill chamber to a first deposition chamber, wherein at least one of the run/refill chambers includes a plurality of spaced tubes having a plurality of surfaces configured to receive the precursor in vapor form and store the precursor in solid form.

2. The method of claim 1 further comprising:

transporting the precursor in vapor form from the bulk container to a second run/refill chamber;

receiving the precursor in vapor form in the second run/refill chamber; and condensing and storing the precursor in solid form in the second run/refill chamber.

3. The method of claim 2 , wherein the precursor is received in vapor form in the second run/refill chamber while the solid precursor is sublimed within the first run/refill chamber.

4. The method of claim 2 , further comprising:

causing sublimation of the solid precursor within the second run/refill chamber; and

transporting the sublimed precursor in vapor form from the second run/refill chamber to the first deposition chamber.

5. The method of claim 4 , wherein the solid precursor is sublimed within the second run/refill chamber while the precursor is received in vapor form in the first run/refill chamber.

6. The method of claim 2 , further comprising:

causing sublimation of the solid precursor within the second run/refill chamber; and transporting the sublimed precursor in vapor form from the second run/refill chamber to a second deposition chamber.

7. The method of claim 2 , wherein transporting the precursor in vapor form from the bulk container to the first run/refill chamber alternates with transporting the precursor in vapor form from the bulk container to the second run/refill chamber.

8. The method of claim 1 , wherein the precursor stored in the bulk container is in a solid form in the bulk container.

9. The method of claim 1 , wherein transporting the precursor in vapor form comprises heating the bulk container to sublimate the precursor and transporting the vapor through a heated conduit.

10. The method of claim 1 , wherein storing the precursor in solid form includes storing the precursor in a fabrication area, and storing the precursor in the bulk container includes storing the precursor outside the fabrication area.

11. The method of claim 1 , wherein

transporting the precursor in vapor form from the bulk container to the first run/refill chamber comprises heating the bulk container and transporting the vapor in a first heated conduit;

condensing and storing the precursor in solid form in the first run/refill chamber comprises cooling the first run/refill chamber; and

transporting the sublimed precursor in vapor form from the first run/refill chamber to a first deposition chamber comprises heating the first run/refill chamber and transporting the vapor in a second heated conduit.

12. A method of operating a chemical delivery system comprising at least one bulk container, multiple run/refill chambers, and at least one deposition chamber, the method comprising: storing a precursor in at least one of the bulk containers; transporting the precursor in vapor form from the bulk container(s) to a first run/refill chamber; receiving the precursor in vapor form in the first run/refill chamber; condensing and storing the precursor in solid form in the first run/refill chamber; causing sublimation of the solid precursor within the first run/refill chamber while transporting the precursor in vapor form from the bulk container(s) to a second run/refill chamber; and transporting the sublimed precursor in vapor form from the first run/refill chamber to a first deposition chamber, wherein at least one of the run/refill chambers includes a plurality of spaced tubes having a plurality of surfaces configured to receive the precursor in vapor form and store the precursor in solid form.

13. The method of claim 12 , further comprising causing sublimation of the solid precursor within the second run/refill chamber while transporting the precursor in vapor form from the bulk container(s) to the first run/refill chamber.

14. The method of claim 12 , wherein condensing and storing the precursor in solid form in the first run/refill chamber comprises cooling the first run/refill chamber.

15. The method of claim 14 , wherein causing sublimation of the solid precursor within the first run/refill chamber while transporting the precursor in vapor form from the bulk container(s) to a second run/refill chamber comprises heating the first run/refill chamber.

16. The method of claim 12 , wherein the multiple run/refill chambers provide an uninterrupted flow of precursor in vapor form to at least one deposition chamber.

17. The method of claim 12 , wherein the at least one bulk container provides precursor in vapor form to the multiple run/refill chambers sequentially.

18. The method of claim 12 , wherein the run/refill chambers are located in a fabrication area, and the bulk container(s) is located outside the fabrication area.