Engineered substrate structures for power and RF applications
A substrate including a support structure. The support structure including a polycrystalline ceramic core and a first adhesion layer coupled to the polycrystalline ceramic core. The support structure further including a conductive layer coupled to the first adhesion layer, a second adhesion layer coupled to the conductive layer, and a barrier layer coupled to the second adhesion layer. The substrate further including a bonding layer coupled to the support structure. The substrate further including a substantially single crystal layer comprising at least one of silicon carbide, sapphire, or gallium nitride coupled to the bonding layer. The substrate further including an epitaxial semiconductor layer coupled to the substantially single crystal layer.
1. A substrate comprising:
a support structure comprising:
a polycrystalline ceramic core;
a first adhesion layer coupled to the polycrystalline ceramic core;
a conductive layer coupled to the first adhesion layer;
a second adhesion layer coupled to the conductive layer; and
a barrier layer coupled to the second adhesion layer;
a bonding layer coupled to the support structure;
a substantially single crystal layer comprising at least one of silicon carbide, sapphire, or gallium nitride coupled to the bonding layer; and
an epitaxial semiconductor layer coupled to the substantially single crystal layer.
2. The substrate of claim 1 wherein the polycrystalline ceramic core comprises aluminum nitride.
3. The substrate of claim 1 wherein the bonding layer comprises silicon oxide.
4. The substrate of claim 1 wherein the epitaxial semiconductor layer comprises an epitaxial III-V layer.
5. The substrate of claim 4 wherein the epitaxial III-V layer comprises an epitaxial gallium nitride layer having a thickness of about 5 μm or greater.
6. The substrate of claim 4 further comprising a plurality of vias passing from the epitaxial III-V layer to the epitaxial semiconductor layer.
7. The substrate of claim 1 wherein the epitaxial semiconductor layer comprises an epitaxial single crystal silicon layer, the substrate further comprising an epitaxial III-V layer coupled to the epitaxial single crystal silicon layer.
8. The substrate of claim 1 wherein:
the first adhesion layer encapsulates the polycrystalline ceramic core;
the conductive layer encapsulates the first adhesion layer; and
the second adhesion layer encapsulates the conductive layer.
9. The substrate of claim 1 further comprising forming an epitaxial silicon layer on the substantially single crystal layer.
10. The substrate of claim 1 wherein:
the first adhesion layer comprises a first tetraethyl orthosilicate (TEOS) layer encapsulating the polycrystalline ceramic core;
the conductive layer comprises a polysilicon layer encapsulating the first TEOS layer;
the second adhesion layer comprises a second TEOS layer encapsulating the polysilicon layer; and
the barrier layer comprises a silicon nitride layer encapsulating the second TEOS layer.