LiDAR with metasurface beam steering
A light detection and ranging system can have a metasurface that continuously extends between a pair of electrical contacts. The metasurface may be separated from an underlying silicon substrate by an air gap with the silicon substate doped with a P-i-N configuration to create electrostatic force that alters a size of the air gap in response to a voltage bias between the pair of electrical contacts.
1 . An apparatus comprising an optical source coupled to a resonator, the resonator suspending a metasurface above an electrical junction, the metasurface arranged to steer light beams to a selected vector in response to a predetermined applied voltage.
2 . The apparatus of claim 1 , wherein the metasurface continuously extends to a length that is greater than a length of the electrical junction.
3 . The apparatus of claim 2 , wherein the length of the metasurface is 1550 nm or less.
4 . The apparatus of claim 1 , wherein the electrical junction has a P-i-N configuration.
5 . The apparatus of claim 1 , wherein the metasurface comprises a single layer of material.
6 . The apparatus of claim 5 , wherein the single layer of material is Si.
7 . The apparatus of claim 1 , wherein the metasurface comprises a lamination of layers.
8 . The apparatus of claim 7 , wherein the lamination of layers consists of an air gap separating a first semiconductor layer and a second semiconductor layer.
9 . The apparatus of claim 8 , wherein the air gap is uniformly 100 nm.
10 . The apparatus of claim 8 , wherein the first semiconductor layer is Si.
11 . The apparatus of claim 8 , wherein the second semiconductor layer is SiN.
12 . A method comprising:
coupling an optical source to a resonator, the resonator suspending a metasurface above an electrical junction;
activating the optical source, with a controller connected to the optical source, to generate a light beam oriented at a first angle relative to the metasurface;
applying a first voltage across electrodes of the resonator to alter the metasurface to a first shape; and
steering the light beam to a second angle relative to the metasurface while the metasurface maintains the first shape.
13 . The method of claim 12 , wherein the metasurface is bent towards the electrical junction to form the first shape in response to the application of the first voltage.
14 . The method of claim 12 , wherein the metasurface has a horizontal orientation in response to no voltage being applied to the electrodes.
15 . The method of claim 12 , wherein the light beam travels along the second angle towards a downrange target.
16 . The method of claim 15 , wherein a position of the downrange target is sensed by the controller in response to reflected portions of the light beam.
17 . The method of claim 16 , wherein the controller alters the applied voltage to change the metasurface to a second shape in response to sensed downrange target.
18 . A method comprising:
coupling an optical source to a first resonator and a second resonator, each resonator suspending a metasurface above an electrical junction;
activating the optical source, with a controller connected to the optical source, to generate a light beam oriented at a first angle relative to the metasurface of each resonator;
applying a first voltage across electrodes of the first resonator to alter the metasurface of the first resonator to a first shape;
steering the light beam to a second angle relative to the metasurface of the first resonator while the metasurface of the first resonator maintains the first shape; and
steering the light beam to a third angle relative to the metasurface of the second resonator in response to application of a second voltage across electrodes of the second resonator, the metasurface of the second resonator maintaining a second shape.
19 . The method of claim 18 , wherein the controller selects the first voltage and second voltage operate in concert to intersect the second angle and third angle at a downrange target.