Semiconductor device
A semiconductor device, includes: a first conductive type semiconductor region including a first semiconductor structure, wherein the first semiconductor structure includes one or more pairs of stack, the one or more pairs of stack respectively includes a first layer and a second layer, the first layer includes Al x Ga 1-x N, the second layer includes Al y Ga 1-y N, wherein 0≤x<1, 0<y<1, x<y, wherein one of the one or more pairs of stack includes an interface region located between the first layer and the second layer adjacent to the first layer; a second conductive type semiconductor region located on the first conductive type semiconductor region; and an active region located between the first conductive type semiconductor region and the second conductive type semiconductor region; wherein the first semiconductor structure includes a first dopant having a first doping concentration with a peak value at the interface region.
1. A semiconductor device, comprising:
a first conductive type semiconductor region comprising a first semiconductor structure, wherein the first semiconductor structure comprises one or more pairs of stack, the one or more pairs of stack respectively comprise a first layer and a second layer, the first layer comprises Al x Ga 1-x N, the second layer comprises Al y Ga 1-y N, wherein 0≤x≤1, 0≤y≤1, x≤y; wherein one of the one or more pairs of stack comprises an interface region located between the first layer and the second layer adjacent to the first layer;
a second conductive type semiconductor region located on the first conductive type semiconductor region; and
an active region located between the first conductive type semiconductor region and the second conductive type semiconductor region;
wherein the first semiconductor structure comprises a first dopant having a first doping concentration with a peak value at the interface region.
2. The semiconductor device according to claim 1 , wherein 0≤x≤0.1.
3. The semiconductor device according to claim 1 , wherein 0≤y≤0.1.
4. The semiconductor device according to claim 1 , wherein the first layer or the second layer has a thickness between 5 nm and 100 nm (including end values).
5. The semiconductor device according to claim 1 , wherein the first layer or the second layer has a thickness between 20 nm and 70 nm (including end values).
6. The semiconductor device according to claim 1 , wherein the first doping concentration in the first layer gradually changes toward the interface region from a side away from the interface region, the first doping concentration in the second layer gradually changes toward the interface region from a side away from the interface region.
7. The semiconductor device according to claim 1 , wherein the first doping concentration of the first dopant of the first semiconductor structure is between 1×10 19 /cm 3 and 2×10 19 /cm 3 .
8. The semiconductor device according to claim 1 , wherein the first doping concentration has a minimum value, and a ratio of the peak value to the minimum value is not less than 1.1.
9. The semiconductor device according to claim 8 , wherein the ratio of the peak value to the minimum value is not greater than 10.
10. The semiconductor device according to claim 9 , wherein the ratio of the peak value to the minimum value is between 1.2 and 5 (including end values).
11. The semiconductor device according to claim 1 , further comprising an electrode located on the first conductive type semiconductor region, wherein the first semiconductor structure of the first conductive type semiconductor region has a surface not overlapped with the active region, and the electrode is in direct contact with the surface of the first semiconductor structure.
12. The semiconductor device according to claim 1 , wherein the first conductive type semiconductor region further comprises a second semiconductor structure located on another side of the first semiconductor structure opposite to the active region, the first semiconductor structure and the second semiconductor structure respectively comprise a second dopant, the second dopant of the first semiconductor structure has a third doping concentration, the second dopant of the second semiconductor structure has a fourth doping concentration, and the fourth doping concentration is higher than the third doping concentration.
13. The semiconductor device according to claim 12 , wherein the second dopant comprises carbon (C).
14. The semiconductor device according to claim 12 , wherein the second semiconductor structure comprises the first dopant, the first dopant of the second semiconductor structure has a second doping concentration, the second doping concentration is not greater than the first doping concentration.
15. The semiconductor device according to claim 14 , wherein the second doping concentration is not greater than 3×10 19 /cm 3 .
16. The semiconductor device according to claim 12 , wherein the fourth doping concentration is greater than 1×10 17 /cm 3 .
17. The semiconductor device according to claim 12 , wherein the second semiconductor structure comprises Al z1 In z2 Ga 1-z1-z2 N, wherein 0≤z2≤z1≤1 and z1≥y.
18. The semiconductor device according to claim 12 , wherein the material composition of aluminum of the second semiconductor structure is higher than that of the first semiconductor structure.