IP Library Granted Patent US 12,199,007
Granted Patent B2
US 12,199,007 · App. 17/876,488 · Granted Jan 14, 2025

Copper connected glass modules on a glass board

Inventor: Thomas Edward Dungan (Fort Collins, CO)
Assignee: Broadcom International Pte. Ltd.
H01L23/3735H01L21/4857H01L23/49822H01L25/18H01L25/50H05K1/18H01L25/0652H05K2201/10159
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Quick Facts
Patent No.
US 12,199,007
App. No.
17/876,488
Granted
Jan 14, 2025
Kind
B2
Abstract

Copper-connected glass modules on a glass board are provided. An apparatus includes one or more dies, an interposer formed of a first material, the interposer coupled to the one or more silicon dies, the interposer comprising an interconnection layer formed on one side of the interposer, wherein the interconnection layer includes a plurality of copper interconnects, and a substrate comprising a top layer, glass core, and a bottom layer, wherein the interconnection layer of the interposer and the top layer of the substrate are copper bonded.

Claims (39)

1. An apparatus comprising:

one or more dies;

an interposer formed of a first material, the interposer coupled to the one or more dies, the interposer comprising an interconnection layer formed on one side of the interposer, wherein the interconnection layer includes a plurality of copper interconnects; and

a substrate comprising a top layer, glass core, and a bottom layer, wherein the interconnection layer of the interposer and the top layer of the substrate are copper bonded.

2. The apparatus of claim 1 , wherein the glass core and the first material of the interposer respectively have matched coefficients of thermal expansion.

3. The apparatus of claim 2 , wherein the glass core has a coefficient of thermal expansion of silicon.

4. The apparatus of claim 1 , wherein the top layer of the substrate includes a copper routing layer.

5. The apparatus of claim 1 , wherein the bottom layer of the substrate includes a copper routing layer.

6. The apparatus of claim 1 , wherein the interposer comprises one or more interposer partitions, each interposer partition at least partially overlapped by at least one of the one or more dies.

7. The apparatus of claim 6 , further comprising:

one or more bridging dies, wherein each bridging die of the one or more bridging dies is coupled to at least two interposer partitions.

8. The apparatus of claim 1 , wherein the one or more dies includes:

one or more first I/O dies configured to facilitate on-board communications; and

one or more second I/O dies coupled to at least one of co-packaged optics or copper cable, the at least one of co-packaged optics or copper cable configured to carry off-board communication.

9. A semiconductor device comprising:

a plurality of semiconductor modules, each semiconductor module respectively comprising:

one or more dies;

an interposer formed of a first material, the interposer coupled to the one or more dies, the interposer comprising a first interconnection layer formed on one side of the interposer, wherein the first interconnection layer includes a plurality of copper interconnects; and

a substrate comprising a first top layer, a first glass core, and a first bottom layer, wherein the first interconnection layer of the interposer and the top layer of the substrate are copper bonded;

a circuit board coupled to the one or more semiconductor modules, the circuit board comprising a second top layer, second bottom layer, and a second glass core, wherein the first bottom layer of the substrate and the second top layer of the circuit board are copper bonded.

10. The semiconductor device of claim 9 , wherein each of the respective first glass cores, the first material of the interposers, and second glass core have matched coefficients of thermal expansion.

11. The semiconductor device of claim 10 , wherein the coefficient of thermal expansion of the second glass core has a coefficient of thermal expansion of silicon.

12. The semiconductor device of claim 9 , wherein the plurality of semiconductor modules are arranged in two rows of semiconductor modules.

13. The semiconductor device of claim 12 , wherein the one or more dies includes:

one or more first I/O dies configured to facilitate on-board communications, and positioned at at least one interior-facing edge of the respective row of the respective semiconductor module; and

one or more second I/O dies coupled to at least one of co-packaged optics or copper cable, the at least one of co-package optics or copper cable configured to carry off-board communication, the one or more second I/O dies positioned at at least one exterior-facing edge of the respective row of the respective semiconductor module.

14. The semiconductor device of claim 9 , wherein each of the respective interposers comprises one or more interposer partitions, each interposer partition at least partially overlapped by at least one of the one or more dies.

15. A method comprising:

forming a first interconnection layer on a first side of an interposer, wherein the first interconnection layer includes a first plurality of copper interconnects, wherein the first interconnection layer is configured to couple the interposer to a substrate, and wherein the interposer is formed of a first material;

bonding, via a copper bonding process, the first interconnection layer to a first top layer of the substrate, the substrate comprising the first top layer, a first glass core, and a first bottom layer;

forming a second interconnection layer on the first bottom layer of the substrate, wherein the second interconnection layer includes a second plurality of copper interconnects, wherein the second interconnection layer is configured to couple the substrate to a circuit board; and

bonding, via the copper bonding process, the second interconnection layer to a second top layer of the circuit board, the circuit board comprising the second top layer, and a second glass core.

16. The method of claim 15 , further comprising:

forming the first glass core and the second glass core to have a coefficient of thermal expansion equal to a coefficient of thermal expansion of the first material of the interposer.

17. The method of claim 15 , wherein the interposer comprises one or more interposer partitions, wherein copper bonding the first interconnection layer to the first top layer of the substrate comprises copper bonding each of the one or more interposer partitions to the substrate.

18. The method of claim 15 , further comprising:

arranging a plurality of semiconductor modules into an array of two or more rows of semiconductor modules on the circuit board, wherein each semiconductor module comprises a respective substrate having a respective second interconnection layer, wherein each semiconductor module is copper bonded to the circuit board via respective second interconnection layer.

19. The method of claim 18 , wherein each semiconductor module respectively comprises one or more dies coupled to a respective interposer, wherein each of the respective one or more dies includes one or more I/O dies configured to facilitate on-board communications, wherein arranging the plurality of semiconductor modules further comprises positioning the one or more I/O dies configured to manage on-board communications at at least one interior-facing edge of the respective row of the respective semiconductor module.

20. The method of claim 18 , wherein each semiconductor module respectively comprises one or more dies coupled to a respective interposer, wherein each of the respective one or more dies includes one or more I/O dies coupled to at least one of co-packaged optics or copper cable, the at least one of co-packaged optics or copper cable configured to carry off-board communication, wherein arranging the plurality of semiconductor modules further comprises positioning the one or more I/O dies coupled to the at least one of co-packaged optics or copper cable at at least one exterior-facing edge of the respective row of the respective semiconductor module.

Assignments (2)
MERGER Recorded Mar 3, 2023
From: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED; BROADCOM INTERNATIONAL PTE. LTD.
To: AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED
Reel/Frame 062952/0850 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 1, 2022
From: DUNGAN, THOMAS EDWARD
To: BROADCOM INTERNATIONAL PTE. LTD.
Reel/Frame 060688/0351 →
Continuity (2)
Provisional Application 63319092 · Mar 11, 2022
Related Publication 20230290703A1 · Sep 14, 2023
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