COMPOSITIONS AND METHODS FOR REDUCING INTERACTION BETWEEN ABRASIVE PARTICLES AND A CLEANING BRUSH
Described are methods for removing abrasive particles from a polymeric surface, such as from a polymeric surface of a cleaning brush used in a post chemical-mechanical processing cleaning step, as well as related cleaning solutions.
1 - 15 . (canceled)
16 . A cleaning solution concentrate useful for cleaning a substrate in a post-chemical-mechanical processing step, the cleaning solution comprising:
cleaning agent, and
at least 0.1 weight percent particle removal agent that includes a hydrogen bonding group.
17 . The concentrate of claim 16 comprising:
from 0.1 to 20 weight percent cleaning agent, and
from 0.1 to 20 weight percent of the particle removal agent.
18 . The concentrate of claim 16 , wherein the cleaning agent comprises one or more of a chelating agent and an organic solvent.
19 . The concentrate of claim 16 , wherein the cleaning agent comprising citric acid, monoethanol amine, polyacrylic acid, or a combination thereof.
20 . The concentrate of claim 16 , wherein the cleaning solution as a pH that is below 2.5.