IP Library Granted Patent US 12,635,541
Granted Patent B2
US 12,635,541 · App. 17/889,238 · Granted May 19, 2026

Conformable die bond film (DBF) in glass cavity

Inventors: Jeremy D. Ecton (Gilbert, AZ); Brandon C. Marin (Gilbert, AZ); Srinivas V. Pietambaram (Chandler, AZ); Gang Duan (Chandler, AZ); Suddhasattwa Nad (Chandler, AZ)
Assignee: Intel Corporation
H10W70/65H10W70/611H10W70/614H10W70/68H10W70/685H10W70/692H10W90/00H10W90/401H10W90/701H10W70/60H10W70/682H10W74/15H10W90/724H10W90/734
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Quick Facts
Patent No.
US 12,635,541
App. No.
17/889,238
Filed
Aug 16, 2022
Granted
May 19, 2026
Kind
B2
Art Unit
2893
USPC
257/406
Abstract

Embodiments disclosed herein include electronic packages. In an embodiment, the electronic package comprises a first substrate with a cavity, where the first substrate comprises glass. In an embodiment, a second substrate is in the cavity. In an embodiment, a bond film covers a bottom of the second substrate and extends up sidewalls of the second substrate.

Claims (49)

1 . An electronic package, comprising:

a first substrate with a cavity, wherein the first substrate comprises glass, and wherein a bottom surface of the cavity is not parallel to a top surface of the first substrate;

a second substrate in the cavity; and

a bond film that covers a bottom of the second substrate.

2 . The electronic package of claim 1 , wherein a top surface of the second substrate is substantially coplanar with a top surface of the first substrate.

3 . The electronic package of claim 1 , wherein the bond film has a variable thickness along the bottom surface of the cavity.

4 . The electronic package of claim 1 , wherein a bottom surface of the second substrate is parallel to the top surface of the first substrate.

5 . The electronic package of claim 1 , wherein through substrate vias are provided through the second substrate.

6 . The electronic package of claim 5 , wherein vias through the first substrate below the cavity are electrically coupled to the through substrate vias.

7 . The electronic package of claim 1 , further comprising:

a first die electrically coupled to the second substrate; and

a second die electrically coupled to the second substrate, wherein the second substrate is an electrical bridge between the first die and the second die.

8 . The electronic package of claim 7 , wherein the first die and the second die are coupled to the second substrate through a redistribution layer.

9 . The electronic package of claim 7 , wherein the first die and the second die are coupled to the second substrate through hybrid bonding or solder bonding.

10 . The electronic package of claim 1 , wherein a fill layer fills a remainder of the cavity not occupied by the second substrate and the bond film.

11 . The electronic package of claim 1 , wherein the bond film comprises one or more of a low filler buildup film, a liquid buildup film, and a PDMS material.

12 . The electronic package of claim 1 , wherein the bond film comprises a solder, wherein the solder is a high melting point solder or alloy.

13 . The electronic package of claim 1 , wherein the bond film extends up the sidewalls of the second substrate a distance up to approximately 100 μm.

14 . An electronic package, comprising:

a substrate, wherein the substrate comprises glass;

a cavity in the substrate, wherein the bottom of the cavity is sloped;

a bridge in the cavity; and

a bond film between the bridge and a bottom of the cavity, wherein the bond film conforms to the bridge to enable a top surface of the bridge to be substantially coplanar with a top surface of the substrate.

15 . The electronic package of claim 14 , wherein the bond film extends up sidewalls of the bridge so that bond film is between sidewalls of the bridge and sidewalls of the cavity.

16 . The electronic package of claim 15 , wherein the bond film extends up sidewalls of the bridge a distance between approximately 10% and approximately 90% of a depth of the cavity.

17 . The electronic package of claim 14 , wherein the bridge comprises through substrate vias.

18 . The electronic package of claim 17 , wherein the through substrate vias are electrically coupled to vias through the substrate, wherein the vias through the substrate are below the cavity.

19 . The electronic package of claim 14 , wherein the bond film has a variable thickness along the bottom of the cavity.

20 . The electronic package of claim 14 , further comprising:

a first die coupled to the bridge; and

a second die coupled to the bridge, wherein the bridge electrically couples the first die to the second die.

21 . The electronic package of claim 20 , wherein the first die and the second die are hybrid bonded to the bridge.

22 . The electronic package of claim 20 , wherein the first die and the second die are coupled to the bridge by solder.

23 . The electronic package of claim 14 , wherein a remainder of the cavity not occupied by the bridge and the bond film is filled with a filler material.

24 . An electronic system, comprising:

a board;

a package substrate coupled to the board, wherein the package substrate comprises glass;

a cavity in the package substrate, wherein a bottom of the cavity is non-parallel to a top surface of the package substrate;

a bridge in the cavity, wherein a bond film in the cavity conforms to a bottom surface and sidewall surfaces of the bridge; and

a first die and a second die electrically coupled together by the bridge.

25 . The electronic system of claim 24 , wherein the bond film has a variable thickness along the bottom of the cavity.

26 . An electronic package, comprising:

a first substrate with a cavity, wherein the first substrate comprises glass;

a second substrate in the cavity; and

a bond film that covers a bottom of the second substrate and extends up sidewalls of the second substrate, wherein a fill layer fills a remainder of the cavity not occupied by the second substrate and the bond film.

27 . An electronic package, comprising:

a first substrate with a cavity, wherein the first substrate comprises glass;

a second substrate in the cavity; and

a bond film that covers a bottom of the second substrate and extends up sidewalls of the second substrate, wherein the bond film comprises a solder, wherein the solder is a high melting point solder or alloy.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 22, 2023
From: ECTON, JEREMY D.; MARIN, BRANDON C.; PIETAMBARAM, SRINIVAS V.; DUAN, GANG; NAD, SUDDHASATTWA
To: INTEL CORPORATION
Reel/Frame 063060/0748 →
Continuity (1)
Related Publication 20240063127A1 · Feb 22, 2024
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