IP Library Granted Patent US 11,906,667
Granted Patent B2
US 11,906,667 · App. 17/890,243 · Granted Feb 20, 2024

Optical coupler for LIDAR sensor

Inventors: Sen Lin (Santa Clara, CA); Andrew Steil Michaels (Santa Clara, CA)
Assignee: AURORA OPERATIONS, INC.
G01S7/4818G01S17/34G01S17/931G02B6/021
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Quick Facts
Patent No.
US 11,906,667
App. No.
17/890,243
Granted
Feb 20, 2024
Kind
B2
Abstract

A LIDAR device for a vehicle includes an integrated chip. The integrated chip includes a substrate layer, a cladding layer, a waveguide, a scattering array, and a reflector layer. The cladding layer is disposed on the substrate layer to form an interface with the substrate layer. The waveguide is disposed within the cladding layer and configured to route an infrared optical field. The scattering array is disposed within the cladding layer between the waveguide and the interface and perturbs the infrared optical field and scatters the infrared optical field into a first beam propagating toward a surface of the cladding layer and into a second beam propagating towards the interface. The reflector layer is disposed within the cladding layer between the waveguide and the surface of the cladding layer to reflect the first beam towards the interface.

Claims (41)

1. A light detection and ranging (LIDAR) device for a vehicle, the LIDAR device comprising an integrated chip that includes:

a substrate layer;

a cladding layer disposed on the substrate layer to form an interface with the substrate layer, wherein the cladding layer includes a surface;

a waveguide disposed within the cladding layer and configured to route an infrared optical field;

a scattering array disposed within the cladding layer between the waveguide and the interface, wherein the scattering array is configured to perturb the infrared optical field and scatter the infrared optical field into a first beam propagating toward the surface of the cladding layer and into a second beam propagating towards the interface; and

a reflector layer disposed within the cladding layer between the waveguide and the surface of the cladding layer, wherein the reflector layer is configured to reflect the first beam towards the interface.

2. The LIDAR device of claim 1 , wherein the first beam and the second beam are configured to interfere to form a beam of light that propagates through the interface into the substrate layer.

3. The LIDAR device of claim 2 , wherein the beam of light is configured to exit the LIDAR device through a side of the substrate layer that is opposite the interface.

4. The LIDAR device of claim 1 , wherein the waveguide has a first refractive index that is higher than a second refractive index of the cladding layer.

5. The LIDAR device of claim 1 , wherein the substrate layer is transparent to infrared light.

6. The LIDAR device of claim 1 , wherein the reflector layer comprises a metallic reflector layer.

7. The LIDAR device of claim 6 , wherein the metallic reflector layer comprises Copper.

8. The LIDAR device of claim 1 , wherein the reflector layer comprises at least one diffractive structure configured to reflect a linewidth of the first beam.

9. The LIDAR device of claim 1 , wherein the waveguide is tapered and flares outward as the waveguide approaches the scattering array, and wherein the scattering array progressively flares outward.

10. The LIDAR device of claim 1 , wherein the cladding layer comprises silicon dioxide, the substrate layer comprises silicon, and the interface is a silicon-glass interface.

11. The LIDAR device of claim 1 , wherein the scattering array is formed of silicon.

12. The LIDAR device of claim 1 , wherein the infrared optical field comprises tails that extend outside the waveguide as the infrared optical field propagates through the waveguide, and wherein the scattering array is configured to interact with the tails of the infrared optical field to scatter the infrared optical field into the first beam and the second beam.

13. An autonomous vehicle control system, comprising:

a LIDAR device comprising an integrated chip that includes:

a substrate layer;

a cladding layer disposed on the substrate layer to form an interface with the substrate layer, wherein the cladding layer includes a surface;

a waveguide disposed within the cladding layer and configured to route an infrared optical field;

a scattering array disposed within the cladding layer between the waveguide and the interface, wherein the scattering array is configured to perturb the infrared optical field and scatter the infrared optical field into a first beam propagating toward the surface of the cladding layer and into a second beam propagating towards the interface; and

a reflector layer disposed within the cladding layer between the waveguide and the surface of the cladding layer, wherein the reflector layer is configured to reflect the first beam towards the interface; and

one or more processors coupled to the LIDAR device and configured to generate control signals for control of an autonomous vehicle in response the LIDAR device.

14. The autonomous vehicle control system of claim 13 , wherein the first beam and the second beam are configured to interfere to form a beam of light that propagates through the interface into the substrate layer.

15. The autonomous vehicle control system of claim 14 , wherein the beam of light is configured to exit the LIDAR device through a side of the substrate layer that is opposite the interface.

16. The autonomous vehicle control system of claim 15 , wherein the LIDAR device is configured to receive a return infrared beam that is a reflection of the beam of light off of a target in an external environment.

17. The autonomous vehicle control system of claim 13 , wherein the infrared optical field comprises tails that extend outside the waveguide as the infrared optical field propagates through the waveguide, and wherein the scattering array is configured to interact with the tails of the infrared optical field to scatter the infrared optical field into the first beam and the second beam.

18. An autonomous vehicle, comprising:

a LIDAR sensor comprising an integrated chip that includes:

a substrate layer;

a cladding layer disposed on the substrate layer to form an interface with the substrate layer, wherein the cladding layer includes a surface;

a waveguide disposed within the cladding layer and configured to route an infrared optical field;

a scattering array disposed within the cladding layer between the waveguide and the interface, wherein the scattering array is configured to perturb the infrared optical field and scatter the infrared optical field into a first beam propagating toward the surface of the cladding layer and into a second beam propagating towards the interface; and

a reflector layer disposed within the cladding layer between the waveguide and the surface of the cladding layer, wherein the reflector layer is configured to reflect the first beam towards the interface; and

a vehicle control system that includes one or more processors coupled to the LIDAR sensor and configured to generate control signals for control of the autonomous vehicle in response the LIDAR sensor.

19. The autonomous vehicle of claim 18 , wherein:

the first beam and the second beam are configured to interfere to form a beam of light that propagates through the interface into the substrate layer; and

the beam of light is configured to exit the LIDAR sensor through a side of the substrate layer that is opposite the interface.

20. The autonomous vehicle of claim 19 , wherein the LIDAR sensor is configured to receive a return infrared beam that is a reflection of the beam of light off of a target in an external environment.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 20, 2023
From: OURS TECHNOLOGY, LLC
To: AURORA OPERATIONS, INC.
Reel/Frame 065630/0417 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 24, 2022
From: LIN, SEN; MICHAELS, ANDREW STEIL
To: OURS TECHNOLOGY, LLC
Reel/Frame 060888/0246 →