Reticle pod having latch including ramped surface
Reticle pods include interfacing surfaces to secure segments of the reticle pod to one another. At least one of the interfacing surfaces is a ramped surface, such that when the reticle pods are secured to one another, the reticle is clamped between reticle contacts provided on the segments of the reticle pod. When the reticle pod is assembled and contains a reticle, a purge gas flow passage can be formed in the reticle pod. The height of the reticle contacts and the thickness of the reticle can be such that the reticle pod segments are spaced apart from one another by a gap, with the gap providing the purge gas flow passage. The reticle pod can be a stocker pod for the transportation and storage of reticles.
1. An article, comprising:
a reticle pod, the reticle pod including:
a first reticle pod segment, including a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches including a first interface surface; and
a second reticle pod segment, including a plurality of second reticle contacts and a plurality of second interface surfaces;
wherein each of the first interface surfaces of the plurality of latches is configured to contact one of the plurality of second interface surfaces when the first interface surfaces are in a latching position;
one or both of the first interface surfaces and the second interface surfaces are ramped surfaces;
the reticle pod is configured to accommodate a reticle in a reticle accommodation space such that when the reticle is within the reticle accommodation space and the first interface surfaces contact the second interface surfaces, the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts
wherein when the reticle is contacted by the plurality of first reticle contacts and the plurality of second reticle contacts, the reticle pod defines a purge gas flow path from an exterior of the reticle pod through the reticle space.
2. The article of claim 1 , wherein the purge gas flow path is formed by a gap between the first reticle pod segment and the second reticle pod segment.
3. The article of claim 2 , wherein the gap is in the range from 0.5 to 6 millimeters (mm).
4. The article of claim 2 , wherein the gap is formed by heights of each of the plurality of first reticle contacts and the plurality of second reticle contacts and a thickness of the reticle.
5. The article of claim 1 , wherein at least one of the first reticle pod segment and the second reticle pod segment includes a plurality of reticle contact bosses, and wherein at least some of the first plurality of reticle contacts or at least some of the second plurality of reticle contacts are partially disposed in the plurality of reticle contact bosses.
6. The article of claim 1 , wherein the plurality of first reticle contacts and the plurality of second reticle contacts include a polyether ether ketone (PEEK) material.
7. The article of claim 1 , wherein at least one of the first reticle pod segment and the second reticle pod segment includes aluminum.
8. The article of claim 1 , wherein both the first interface surfaces and the second interface surfaces are ramped surfaces.
9. The article of claim 1 , wherein each of the second interface surfaces is disposed on an outer surface of the second reticle pod segment.
10. The article of claim 9 , wherein an opening is provided on the second reticle pod segment, the opening configured to allow a portion of the latching member body including the first interface surface to pass through said opening, and wherein the opening is positioned adjacent to each of the second interface surfaces.
11. The article of claim 1 , wherein each of the second interface surfaces is disposed on a flange, each flange projecting towards the first reticle pod segment when the reticle pod is assembled.
12. The article of claim 1 , wherein each of the latches includes:
a channel;
a latching member body configured to be movable within the channel, the latching member body including one of the plurality of first interface surfaces; and
a spring, the spring configured to drive the latching member body along the channel such that the latching member body is driven towards the latching position.
13. The article of claim 12 , wherein an angle of each of the first interface surfaces and each of the second interface surfaces and a coefficient of friction of each of the first interface surfaces and each of the second interface surfaces are selected such that the latch main body resists backing out of the latching position when the first interface surfaces contact the second interface surfaces.
14. The article of claim 12 , wherein an angle of each of the first interface surfaces and each of the second interface surfaces is 30° or less.
15. A method of storing a reticle, comprising placing the reticle into a reticle pod, wherein the reticle pod includes:
a first reticle pod segment, including a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches including a first interface surface; and
a second reticle pod segment, including a plurality of second reticle contacts and a plurality of second interface surfaces;
wherein each of the first interface surfaces of the plurality of latches is configured to contact one of the plurality of second interface surfaces when the first interface surfaces are in a latching position;
one or both of the first interface surfaces and the second interface surfaces are ramped surfaces;
the reticle pod is configured to accommodate a reticle in a reticle accommodation space such that when the reticle is within the reticle accommodation space and the first interface surfaces contact the second interface surfaces, the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts
wherein when the reticle is contacted by the plurality of first reticle contacts and the plurality of second reticle contacts, the reticle pod defines a purge gas flow path from an exterior of the reticle pod through the reticle space.
16. The method of claim 15 , wherein when the reticle is contacted by the plurality of first reticle contacts and the plurality of second reticle contacts, the reticle pod defines a purge gas flow path from an exterior of the reticle pad through the reticle space, and wherein the method further comprises providing a purge gas flow through the purge gas flow path.
17. The method of claim 16 , wherein each of the latches includes:
a channel;
a latching member body configured to be movable within the channel, the latching member body including one of the plurality of first interface surfaces; and
a spring, the spring configured to drive the latching member body along the channel such that the latching member body is driven towards the latching position; and
wherein placing the reticle into the article includes:
drawing each of the latching member bodies into an unlatching position;
bringing the first reticle pod segment and the second reticle pod segment together such that the reticle is contacted by the plurality of first reticle contacts and the plurality of second reticle contacts; and
releasing each of the latching member bodies such that the springs can drive the latching member bodies to the latching position.
18. A reticle storage system, including:
a pod container;
a purge gas supply; and
a plurality of reticle pods each configured to be contained within the pod container, each reticle pod including:
a first reticle pod segment, including a plurality of first reticle contacts and a plurality of latches, each of the plurality of latches including a first interface surface; and
a second reticle pod segment, including a plurality of second reticle contacts and a plurality of second interface surfaces;
wherein each of the first interface surfaces of the plurality of latches is configured to contact one of the plurality of second interface surfaces when the first interface surfaces are in a latching position;
one or both of the first interface surfaces and the second interface surfaces are ramped surfaces;
the reticle pod is configured to accommodate a reticle in a reticle accommodation space such that when the reticle is within the reticle accommodation space and the first interface surfaces contact the second interface surfaces, the reticle is clamped by the plurality of first reticle contacts and the plurality of second reticle contacts.