Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters

1. A radio frequency filter, comprising:

at least a first sub-filter and a second sub-filter connected in parallel between a first port and a second port, each of the first and second sub-filters comprising:

at least one piezoelectric layer attached either directly or via one or more intermediate layers to a substrate, the at least one piezoelectric layer having portions that form a plurality of diaphragms over respective cavities of the respective sub-filter; and

a conductor pattern at only one surface of the at least one piezoelectric layer, the conductor pattern including a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms,

wherein a thickness of the respective portion of the at least one piezoelectric layer of the first sub-filter is different from a thickness of the respective portion of the at least one piezoelectric layer of the second sub-filter, and

wherein the at least one piezoelectric layer and the respective IDTs of the first and second sub-filters are configured such that radio frequency signals applied to the respective IDTs excite primary shear acoustic modes in the respective portions of the at least one piezoelectric layer that form the respective diaphragms.

2. The filter of claim 1 , wherein the at least one piezoelectric layer of the first sub-filter is a same layer as the at least one piezoelectric layer of the second sub-filter.

3. The filter of claim 1 , wherein the at least one piezoelectric layer of the first sub-filter is a different layer than the at least one piezoelectric layer of the second sub-filter.

4. The filter of claim 3 , wherein the first port is an input of the filter, and the second port is an output of the filter.

5. The filter of claim 1 , wherein

the respective thicknesses of the portions of the at least one piezoelectric layer of the first and second sub-filters are selected to tune the primary shear acoustic modes in the respective portions of the at least one piezoelectric layer.

6. The filter of claim 1 , further comprising:

a third sub-filter connected in parallel between the first port and the second port, the third sub-filter comprising:

a piezoelectric layer attached either directly or via one or more intermediate layers to the substrate, the piezoelectric layer having portions that form a plurality of diaphragms spanning respective cavities of the third sub-filter; and

a conductor pattern at a surface of the piezoelectric layer, the conductor pattern including a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms,

wherein a thickness of the piezoelectric layer of the third sub-filter is different from a thickness of the at least one piezoelectric layer of the first and second sub-filters.

7. The filter of claim 6 , wherein the thickness of the portion of the at least one piezoelectric layer of the first sub-filter is between 720 nm and 740 nm extending between a front surface and a back surface of the portion of the at least one piezoelectric layer of the first sub-filter; wherein the thickness of the portion of the at least one piezoelectric layer of the second sub-filter is between 752 nm and 772 nm extending between a front surface and a back surface of the portion of the at least one piezoelectric layer of the second sub-filter; and wherein the thickness of the piezoelectric layer of the third sub-filter is between 734 nm and 754 nm extending between a front surface and a back surface of the piezoelectric layer of the third sub-filter.

8. The filter of claim 6 , wherein each sub-filter further comprises:

three resonators connected in series between the first port and the second port; and

two coupling capacitors, each of which is connected between ground and a respective node between two of the resonators of the sub-filter.

9. The filter of claim 8 , further comprising:

a first low-edge resonator, from the three resonators, connected between the first port and ground;

a second low-edge resonator, from the three resonators, connected between the second port and ground;

wherein respective resonance frequencies of the first and second low-edge resonators are adjacent to a lower edge of a passband of the filter.

10. The filter of claim 9 , wherein:

two of the three resonators of each sub-filter are symmetrical in response;

the low-edge resonators have the same response;

each of the coupling capacitors is a metal-insulator-metal capacitor; and

the sub-filters and the low-edge resonators form a matrix filter having a contiguous passband formed by passbands of the sub-filters; and a center frequency of a passband of each sub-filter is different from a center frequency of any other sub-filter.

11. The filter of claim 6 , wherein:

the thickness of the portion of the at least one piezoelectric layer of the first sub-filter is thinner than the thickness of the portion of the at least one piezoelectric layer of the second sub-filter; and

the thickness of the portion of the at least one piezoelectric layer of the second sub-filter is thinner than the thickness of the piezoelectric layer of the third sub-filter.

12. A radio frequency filter, comprising:

a first sub-filter and a second sub-filter connected in parallel between a first port and a second port, the first sub-filters comprising:

a first piezoelectric layer attached either directly or via one or more intermediate layers to a first substrate of a first die, the first piezoelectric layer having first portions that form a first plurality of diaphragms over first respective cavities of the respective first sub-filter; and

a first conductor pattern at a surface of the first piezoelectric layer, the first conductor pattern including a first plurality of interdigital transducers (IDTs) of a first respective plurality of resonators, first interleaved fingers of each first IDT disposed on a first respective diaphragm of the first plurality of diaphragms;

the second sub-filters comprising:

a second piezoelectric layer attached either directly or via one or more intermediate layers to a second substrate of a second die, the second piezoelectric layer having second portions that form a second plurality of diaphragms over second respective cavities of the respective second sub-filter; and

a second conductor pattern at a surface of the second piezoelectric layer, the second conductor pattern including a second plurality of interdigital transducers (IDTs) of a second respective plurality of resonators, second interleaved fingers of each second IDT disposed on a second respective diaphragm of the second plurality of diaphragms; and

wherein a thickness of the portions of the first piezoelectric layer are thicker than a thickness of the portions of the second piezoelectric layer,

wherein the first port is an input of the filter, and the second port is an output of the filter, and

wherein the first and second piezoelectric layers and the first and second plurality of IDTs are configured such that radio frequency signals applied to the first and second plurality of IDTs excite primary shear acoustic modes in the first and second portions of the respective piezoelectric layers.

13. The filter of claim 12 , wherein the first piezoelectric layer is a same layer as the second piezoelectric layer.

14. The filter of claim 12 , wherein the first piezoelectric layer is a different layer than the second piezoelectric layer.

15. The filter of claim 12 , wherein

the thicknesses of the first and second portions of the respective piezoelectric layers are selected to tune the primary shear acoustic modes in the first and second portions.

16. The filter of claim 12 ,

wherein each sub-filter further comprises:

three resonators connected in series between the first port and the second port;

two coupling capacitors, each of which is connected between ground and a respective node between two of the resonators of the sub-filter; and

wherein the filter further comprises:

a first low-edge resonator, from the three resonators, connected between the first port and ground;

a second low-edge resonator, from the three resonators, connected between the second port and ground;

wherein respective resonance frequencies of the first and second low-edge resonators are adjacent to a lower edge of a passband of the filter.

17. A radio frequency filter, comprising:

a first sub-filter, a second sub-filter and a third sub-filter that are each connected in parallel between a first port and a second port, each of the first, second and third sub-filters comprising:

at least one piezoelectric layer attached either directly or via one or more intermediate layers to a substrate, the at least one piezoelectric layer having portions that form plurality of diaphragms over respective and separate cavities of the respective sub-filter; and

a conductor pattern at a surface of the at least one piezoelectric layer, the conductor pattern including a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms,

wherein a thickness of the portion of the at least one piezoelectric layer of the first sub-filter is different from a thickness of the portion of the at least one piezoelectric layer of the second and third sub-filter,

wherein a thickness of the portion of the at least one piezoelectric layer of the second sub-filter is different from a thickness of the portion of the at least one piezoelectric layer of the third sub-filter, and

wherein the respective portions of the at least one piezoelectric layer and the plurality of IDTs of the first, second and third sub-filter are configured such that radio frequency signals applied to the plurality of IDTs excite primary shear acoustic modes in the respective portions of the at least one piezoelectric layer.

18. The filter of claim 17 , wherein the at least one piezoelectric layer of the first sub-filter is a different layer than each of the at least one piezoelectric layer of the second sub-filter and the third sub-filter, and wherein

the at least one piezoelectric layer of the second sub-filter is a different layer than the at least one piezoelectric layer of the third sub-filter.

19. The filter of claim 18 , wherein the substrate of the second sub-filter is different than the substrate of the third sub-filter.

20. The filter of claim 17 , wherein

the thicknesses of the respective portions of the at least one piezoelectric layer of the first, second and third sub-filters are selected to tune the primary shear acoustic modes in the respective portions of the at least one piezoelectric layer.