COMPOSITE ADSORBENT-CONTAINING BODIES AND RELATED METHODS
Described are composite adsorption media that contain two or more different types of adsorbent material in binder, that may preferably be prepared by additive manufacturing techniques, as well as methods of preparing the structures by additive manufacturing methods.
1 . Composite adsorption media comprising:
first adsorbent particles,
second adsorbent particles, and
binder that holds together the first adsorbent particles and the second adsorbent particles as composite adsorption media.
2 . The composite adsorption media of claim 1 comprising multiple layers of the composite formed by an additive manufacturing method.
3 . The composite adsorption media of claim 1 :
the first adsorbent particles comprising metal organic framework adsorbent, activated carbon adsorbent, porous organic polymer adsorbent, or zeolite adsorbent, and
the second adsorbent particles comprising metal organic framework adsorbent, activated carbon adsorbent, porous organic polymer adsorbent, or zeolite adsorbent, that is different from the first adsorbent particles.
4 . The composite adsorption media of claim 1 , the binder comprising polymeric binder.
5 . The composite adsorption media of claim 1 , the binder comprising inorganic particles.
6 . The composite adsorption media of claim 1 , wherein:
the first adsorbent particles are capable of adsorbing a first gas contained in a gas mixture that comprises the first gas and a second gas, and
the second adsorbent particles are capable of adsorbing the second gas contained in the gas mixture.
7 . The composite adsorption media of claim 1 , wherein the first gas can be adsorbed onto and selectively desorbed from the first adsorbent at selective desorption conditions that cause selective desorption of the first gas from the first adsorbent without substantial desorption of the second gas from the second adsorbent.
8 . The composite adsorption media of claim 1 , wherein:
the first adsorbent particles are capable of adsorbing GeF 4 ,
the second adsorbent particles are capable of adsorbing HF, PF 3 , or both, and
the GeF 4 gas can be adsorbed onto and selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the GeF 4 from the first adsorbent particles and a reduced amount of desorption of HF, PF 3 , or both, from the second adsorbent particles.
9 . The composite adsorption media of claim 1 , wherein a form of a composite adsorption media body is selected from: a geometrically-shaped particle, a repeating lattice structure, a matrix, a honeycomb, and a monolith.
10 . A storage vessel comprising:
composite adsorption media of claim 1 at an interior; and
a valve to control flow of gas into and out of the storage vessel.
11 . The storage vessel of claim 10 , further comprising:
GeF 4 adsorbed on the first adsorbent particles, and
HF, PF 3 , or both, adsorbed on the second adsorbent particles,
wherein the GeF 4 can be selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the GeF 4 from the first adsorbent particles, and a reduced amount of desorption of HF, PF 3 , or both, from the second adsorbent particles.
12 . The storage vessel of claim 10 , further comprising:
hydride (e.g., SiH 4 , GeH 4 , AsH 3 ) or halide adsorbed on the first adsorbent particles, and
H 2 O adsorbed on the second adsorbent particles,
wherein the hydride or halide can be selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the hydride or halide from the first adsorbent particles, and a reduced amount of desorption of H 2 O from the second adsorbent particles.
13 . The storage vessel of claim 10 , further comprising:
hydride (e.g., SiH 4 , GeH 4 , AsH 3 ) or halide adsorbed on the first adsorbent particles, and
hydrogen adsorbed on the second adsorbent particles,
wherein the hydride can be selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the hydride from the first adsorbent particles, and a reduced amount of desorption of hydrogen from the second adsorbent particles.
14 . The storage vessel of claim 10 , further comprising:
phosphine adsorbed on the first adsorbent particles, and
diphosphine adsorbed on the second adsorbent particles,
wherein the phosphine can be selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the phosphine from the first adsorbent particles, and a reduced amount of desorption of diphosphine from the second adsorbent particles.
15 . The storage vessel of claim 10 , further comprising:
germane adsorbed on the first adsorbent particles, and
digermane adsorbed on the second adsorbent particles,
wherein the germane can be selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the germane from the first adsorbent particles, and a reduced amount of desorption of digermane from the second adsorbent particles.
16 . The storage vessel of claim 10 , further comprising:
fluoride (e.g., BF 3 , GeF 4 , SiF 4 , PF 3 ) adsorbed on the first adsorbent particles, and
hydrogen fluoride (HF) adsorbed on the second adsorbent particles,
wherein the fluoride can be selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the fluoride from the first adsorbent particles, and a reduced amount of desorption of hydrogen fluoride from the second adsorbent particles.
17 . A method of adsorbing multiple different gases contained in a gas mixture onto composite adsorption media, the method comprising:
contacting a gas mixture with composite adsorption media that comprises:
first adsorbent particles,
second adsorbent particles, and
binder that holds together the first adsorbent particles and the second adsorbent particles as composite adsorption media,
adsorbing a first gas contained in the gas mixture onto the first adsorbent particles, and
adsorbing a second gas contained in the gas mixture onto the second adsorbent particles.
18 . The method of claim 17 , wherein:
the gas mixture comprises a reagent gas and two or more impurities,
the first impurity adsorbs onto the first adsorbent particles, and
the second impurity adsorbs onto the second adsorbent particles.
19 . The method of claim 18 , wherein:
reagent gas contacts the composite adsorption media and does not become adsorbed, and
the reagent gas is delivered to a semiconductor manufacturing tool (e.g., an ion implantation tool or a deposition tool).
20 . The method of claim 17 , wherein:
the gas mixture comprises reagent gas and impurity,
the reagent gas adsorbs onto the first adsorbent particles,
the impurity adsorbs onto the second adsorbent particles, and
the reagent gas can be selectively desorbed from the first adsorbent at selective desorption conditions that cause desorption of the reagent gas from the first adsorbent, and a reduced amount of desorption of the impurity from the second adsorbent.
21 . The method of claim 20 , wherein the composite adsorption media is contained in a storage vessel that comprises a cylinder having an interior and a valve to control flow of gas into and out of the storage vessel.
22 . The method of claim 21 , further comprising desorbing the reagent gas from the first adsorbent particles and dispensing the reagent gas from storage vessel to a semiconductor manufacturing tool.
23 . The method of claim 22 , wherein the reagent gas is GeF 4 and the impurity comprises HF, PF 3 , or both.
24 . The method of claim 17 , wherein:
the gas mixture comprises reagent gas, stabilizing gas, and impurity,
the stabilizing gas adsorbs onto the first adsorbent particles,
the impurity adsorbs onto the second adsorbent particles.
25 . The method of claim 17 , wherein:
the gas mixture comprises an exhaust gas that comprises reagent gas and impurity,
the reagent gas adsorbs onto the first adsorbent particles,
the impurity adsorbs onto the second adsorbent particles, and
the reagent gas can be selectively desorbed from the first adsorbent particles at selective desorption conditions that cause desorption of the reagent gas from the first adsorbent particles, and a reduced amount of desorption of the impurity from the second adsorbent particles.
26 . The method of claim 25 , wherein the exhaust gas is from a semiconductor manufacturing tool.
27 . The method of claim 25 , wherein the impurity is impurity inert gas such as nitrogen, helium, xenon, or argon.
28 . A method of making a composite adsorption media, the method comprising:
forming a first feedstock layer on a surface, the feedstock layer comprising feedstock that includes at least one of first adsorption media particles and second adsorption media particles;
forming solidified feedstock from the first feedstock layer;
forming a second feedstock layer over the first feedstock layer, the second feedstock layer comprising feedstock that includes adsorption media particles;
forming second solidified feedstock from second feedstock layer,
wherein the combination of first and second feedstock layers form a multilayer composite that contains the first adsorption media particles and second adsorption media particles.
29 . The method of claim 28 , comprising:
forming a first feedstock layer on a surface, the first feedstock layer comprising feedstock that contains at least one of first adsorption media particles and second adsorption media particles;
at portions of the first feedstock layer, selectively applying liquid to the feedstock layer to produce a solidified feedstock form the first feedstock layer;
forming a second feedstock layer over the layer that contains the solidified feedstock, the second layer comprising feedstock that contains adsorption media particles; and
at portions of the second feedstock layer, selectively applying liquid to the second feedstock layer to form second solidified feedstock.
30 . The method of claim 29 wherein:
the feedstock layer comprises inorganic particles as a binder component,
the liquid comprises distilled water, and
applying the liquid to the feedstock layer produces the solidified feedstock.
31 . The method of claim 30 , comprising reducing the temperature of the first solidified feedstock layer and the second feedstock layer to a temperature below zero degrees Celsius, to cause the liquid to freeze.
32 . The method of claim 28 , comprising:
forming a first feedstock layer on a surface, the first feedstock layer comprising feedstock that contains binder composition and at least one of first adsorption media particles and second adsorption media particles;
at portions of the first feedstock layer, selectively applying radiation to the first feedstock layer to produce a solidified feedstock comprising the first feedstock layer;
forming a second feedstock layer over the layer that contains the solidified feedstock of the first feedstock layer, the second feedstock layer comprising feedstock that contains adsorption media particles and binder composition;
at portions of the second feedstock layer, selectively applying radiation to the second feedstock layer to form second solidified feedstock layer.
33 . The method of claim 28 , comprising:
providing feedstock that contains first adsorption media particles, second adsorption media particles, and binder composition;
selectively applying the feedstock to a surface to form a path of the feedstock on the surface, the path having an upper path surface;
causing the feedstock of the path to solidify; then
applying the feedstock to the upper surface to form a second path of the feedstock on the second surface.
34 . The method of claim 28 , wherein the feedstock for the first feedstock layer and the feedstock for the second feedstock layer both comprise the first adsorption media particles and the second adsorption media particles.
35 . The method of claim 28 , wherein the feedstock for the first feedstock layer comprises one of the first adsorption media particles and the second adsorption media particles and the feedstock for the second feedstock layer comprises the other of the first adsorption media particles and the second adsorption media particles.
36 . A method of preparing composite adsorption media for processing a gas mixture, the method comprising:
for a gas mixture that includes a first gas and a second gas,
selecting first adsorbent particles to adsorb the first gas,
selecting second adsorbent particles to adsorb the second gas, and
forming a composite adsorption media comprising:
the first adsorbent particles,
the second adsorbent particles, and
binder that holds together the first adsorbent particles and the second adsorbent particles as composite adsorption media.