IP Library Granted Patent US 11,888,109
Granted Patent B2
US 11,888,109 · App. 17/964,369 · Granted Jan 30, 2024

Lithium anode device stack manufacturing

Inventor: Subramanya P. Herle (Mountain View, CA)
Assignee: APPLIED MATERIALS, INC.
H01M10/0525H01M4/134H01M4/661H01M4/662H01M4/667H01M10/052H01M10/0562H01M10/0431
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Quick Facts
Patent No.
US 11,888,109
App. No.
17/964,369
Granted
Jan 30, 2024
Kind
B2
Abstract

Metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same are provided. In one or more embodiments, an anode electrode structure is provided and includes a current collector comprising copper, a lithium metal film formed on the current collector, a copper film formed on the lithium metal film, and a protective film formed on the copper film. The protective film is a lithium-ion conducting film can include lithium-ion conducting ceramic, a lithium-ion conducting glass, or ion conducting liquid crystal.

Claims (42)

1. An anode electrode structure, comprising:

a current collector comprising copper;

a lithium metal film formed on the current collector;

a metal film formed on the lithium metal film and in direct contact with the current collector; and

a protective film formed on the metal film,

wherein the protective film is a lithium-ion conducting film comprising lithium-ion conducting ceramic, lithium-ion conducting glass, lithium-ion conducting polymer, lithium- ion conducting liquid crystal, or combinations thereof, and

wherein the metal film is selected from a copper film, a bismuth film, or combinations thereof.

2. The anode electrode structure of claim 1 , wherein the metal film has a thickness in a range from about 5 nanometers to about 40 nanometers.

3. The anode electrode structure of claim 2 , wherein the metal film comprises copper and has a thickness in a range from about 10 nanometers to about 20 nanometers.

4. The anode electrode structure of claim 2 , wherein the lithium-ion conducting film comprises one or more of aluminum oxide, LiPON, Li 7 La 3 Zr 2 O 12 (LLZO), Li 2 S—P 2 S 5 , Li 10 GeP 2 S 12 , Li 3 PS 4 , (1-x)LiI-(x)Li 4 SnS 4 , (x)LiI-(1-x)Li 4 SnS 4 , (1-x)LiI-(x)Li 4 SnS 4 , (x)LiI-(1-x)Li 4 SnS 4 ), wherein 0<x<1.

5. The anode electrode structure of claim 2 , wherein the lithium metal film has a thickness in a range from about 1 micrometer to about 20 micrometers.

6. The anode electrode structure of claim 5 , wherein the current collector has a thickness in a range from about 2 micrometers to about 8 micrometers.

7. The anode electrode structure of claim 1 , wherein the current collector comprises:

a first nickel or chromium containing film;

a second copper film formed on the first nickel or chromium containing film and having a thickness in a range from about 50 nanometers to about 500 nanometers; and

a second nickel or chromium containing film formed on the second copper film and having a thickness in a range from about 20 nanometers to about 50 nanometers.

8. The anode electrode structure of claim 1 , wherein the current collector comprises:

a polyethylene terephthalate (PET) polymer substrate; and

a second copper film formed on the PET polymer substrate.

9. An anode electrode structure, comprising:

a current collector comprising copper;

a lithium metal film formed on the current collector;

a copper film formed on the lithium metal film and in direct contact with the current collector; and

a protective film formed on the copper film,

wherein the protective film is a lithium-ion conducting film comprising lithium-ion conducting ceramic, lithium-ion conducting glass, lithium-ion conducting polymer, lithium- ion conducting liquid crystal, or combinations thereof.

10. The anode electrode structure of claim 9 , wherein the copper film has a thickness in a range from about 5 nanometers to about 40 nanometers.

11. The anode electrode structure of claim 9 , wherein the copper film has a thickness in a range from about 10 nanometers to about 20 nanometers.

12. The anode electrode structure of claim 9 , wherein the lithium-ion conducting film comprises one or more of aluminum oxide, LiPON, Li 7 La 3 Zr 2 O 12 (LLZO), Li 2 S—P 2 S 5 , Li 10 GeP 2 S 12 , Li 3 PS 4 , (1-x)LiI-(x)Li 4 SnS 4 , (x)LiI-(1-x)Li 4 SnS 4 , (1-x)LiI— (x)Li 4 SnS 4 , (x)LiI-(1-x)Li 4 SnS 4 ), wherein 0<x<1.

13. The anode electrode structure of claim 9 , wherein the lithium metal film has a thickness in a range from about 1 micrometer to about 20 micrometers.

14. The anode electrode structure of claim 9 , wherein the current collector has a thickness in a range from about 2 micrometers to about 8 micrometers.

15. The anode electrode structure of claim 1 , wherein the metal film is a bismuth film.

16. An anode electrode structure, comprising:

a current collector comprising copper;

a lithium metal film formed on the current collector;

a copper film formed on the lithium metal film, in direct contact with the current collector, and having a thickness in a range from about 5 nanometers to about 40 nanometers; and

a protective film formed on the copper film;

wherein the protective film is a lithium-ion conducting film comprising lithium-ion conducting ceramic, lithium-ion conducting glass, lithium-ion conducting polymer, lithium- ion conducting liquid crystal, or combinations thereof; and

wherein the lithium-ion conducting film comprises one or more of aluminum oxide, LiPON, Li 7 La 3 Zr 2 O 12 (LLZO), Li 2 S-P 2 S 5 , Li 10 GeP 2 S 12 , Li 3 PS 4 , (1-x)LiI-(x)Li 4 SnS 4 , (x)LiI- (1-x)Li 4 SnS 4 , (1-x)LiI-(x)Li 4 SnS 4 , (x)LiI-(1-x)Li 4 SnS 4 ), wherein 0<x<1.

17. The anode electrode structure of claim 16 , wherein the copper film has a thickness in a range from about 10 nanometers to about 20 nanometers.

18. The anode electrode structure of claim 16 , wherein the lithium-ion conducting film comprises one or more of (1-x)LiI-(x)Li 4 SnS 4 , (x)LiI-(1-x)Li 4 SnS 4 , (1-x)LiI-(x)Li 4 SnS 4 , (x)LiI-(1-x)Li 4 SnS 4 ), wherein 0<x<1.

19. The anode electrode structure of claim 16 , wherein the lithium metal film has a thickness in a range from about 1 micrometer to about 20 micrometers.

20. The anode electrode structure of claim 16 , wherein the current collector has a thickness in a range from about 2 micrometers to about 8 micrometers.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 24, 2025
From: APPLIED MATERIALS, INC.
To: ELEVATED MATERIALS US LLC
Reel/Frame 071036/0188 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 5, 2023
From: HERLE, SUBRAMANYA P.
To: APPLIED MATERIALS, INC.
Reel/Frame 062287/0387 →
Continuity (3)
Division 16129002 · Sep 12, 2018
Provisional Application 62561442 · Sep 21, 2017
Related Publication 20230035547A1 · Feb 2, 2023