IP Library Patent Application 18008878
Patent Application
App. No. 18/008,878

METHODS AND DEVICES FOR OPTIMIZING CONTRAST FOR USE WITH OBSCURED IMAGING SYSTEMS

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Patent No.
US None
App. No.
18/008,878
Abstract

A system for outputting partially spatially coherent light to an imaging system is disclosed herein, which includes a spatially coherent light source configured to output a spatially coherent signal, at least one optical device having an optical device body with a first device surface formed thereon and configured to reflect a portion of the spatially coherent signal to form at least one coherent reflected signal. The optical device body also includes a second device surface having one or more surface irregularities configured to diffuse a portion of the spatially coherent light source output signal transmitted through the optical device body, to produce at least one spatially incoherent signal. The combination of the coherent reflected signal and the spatially incoherent signal form the partially spatially coherent light signal.

Claims (25)

1 . A system for outputting partially spatially coherent light to an imaging system, comprising:

at least one spatially coherent light source configured to output at least one spatially coherent light source output signal;

at least one optical device having at last one optical device body;

a first device surface formed on the at least one optical device body and configured to reflect at least a portion of the at least one spatially coherent light source output signal to form at least one coherent reflected signal;

at least a second device surface formed on the at least one optical device body, the at least one second device surface having one or more surface irregularities formed thereon, the one or more surface irregularities configured to diffuse at least a portion of the at least one spatially coherent light source output signal transmitted through the optical device body to produce at least one spatially incoherent signal;

at least one reflective coating applied to the at least a second device surface and configured to reflect the at least one spatially incoherent signal from the at least a second device surface through the first device surface formed on the optical device body, wherein the combination of the at least one coherent reflected signal and the at least one spatially incoherent signal to form at least one partially spatially coherent light signal.

2 . The system for outputting partially spatially coherent light to an imaging system of claim 1 , wherein the optical device body is manufactured from silica-based glass.

3 . The system for outputting partially coherent partially spatially coherent light to an imaging system of claim 1 , wherein the optical device body is manufactured from at least one material selected from the group consisting of optical crystals, composite materials, and ceramic materials.

4 . The system for outputting partially spatially coherent light to an imaging system of claim 1 , further comprising at least one optical coating applied to the first device surface.

5 . The system for outputting partially coherent partially spatially coherent light to an imaging system of claim 1 , further comprising at least one optical coating applied to the at least a second device surface.

6 . The system for outputting partially spatially coherent light to an imaging system of claim 1 , further comprising at least one optical coating applied to at least one of the first device surface in the at least a second device surface.

7 . The system for outputting partially spatially coherent light to an imaging system of claim 1 , wherein the optical element is configured to be selectively rotated about an optical axis.

8 . The system for outputting partially spatially coherent light to an imaging system of claim 1 , further comprising at least one imaging system in optical communication with the system for outputting partially spatially coherent light, the at least one imaging system comprising a catoptric objective system.

9 . The system for outputting partially spatially coherent light to an imaging system of claim 1 , further comprising at least one imaging system in optical communication with the system for outputting partially spatially coherent light, the at least one imaging system comprising a catadioptric objective system.

10 . An imaging system using partially spatially coherent light, comprising:

at least one spatially coherent light source configured to output at least one spatially coherent light source output signal;

at least one partially spatially coherent light system configured to receive the at least one spatially coherent light source output signal and transmit at least one partially spatially coherent light signal; and

at least one catoptric focusing/objective system in optical communication with the at least one partially spatially coherent light system, the at least one catoptric focusing/objective system configured to focus the at least one partially spatially coherent light signal to at least one focal point on a substrate.

11 . The imaging system using partially spatially coherent light of claim 10 , further comprising at least one optical fiber in communication with the at least one spatially coherent light source and the at least one partially spatially coherent light system, the at least one optical fiber configured to transmit the at least one spatially coherent light source output signal to the at least one partially spatially coherent light system.

12 . The imaging system using partially spatially coherent light of claim 11 , wherein the at least one optical fiber comprises a single mode fiber.

13 . The imaging system using partially spatially coherent light of claim 11 , wherein the at least one optical fiber comprises a multi-mode fiber.

14 . The imaging system using partially spatially coherent light of claim 10 , wherein the at least one partially spatially coherent light system comprises at least one optical device body having a first surface and at least a second surface, the second surface having at least one surface irregularity formed thereon and at least one optical coating applied thereto.

15 . The imaging system using partially spatially coherent light of claim 10 , wherein at least one optical device body is configured to be rotated about at least one optical axis.

16 . The imaging system using partially spatially coherent light of claim 10 , wherein the partially spatially coherent light system comprises at least one mode scrambling system having a first mode scrambling body and at least a second mode scrambling body formed therein.

17 . The imaging system using partially spatially coherent light of claim 10 , further comprising at least one autofocus module configured to transmit at least one autofocus signal, the at least one autofocus signal co-aligned with the at least one partially spatially coherent light signal.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 8, 2022
From: VICKROY, PATRICK; RANALLI, ELISEO
To: MKS INSTRUMENTS, INC.
Reel/Frame 062020/0908 →