CLEANED PACKAGING SUBSTRATE AND CLEANED PACKAGING SUBSTRATE MANUFACTURING METHOD
A manufacturing method for a cleaned packaging substrate is provided. The method is applied to a manufacturing process for a glass substrate or a packaging substrate comprising the same, and comprises a preparing process of disposing a target substrate inside a chamber; and a removing process of jetting ionized air on at least one surface of the target substrate to separate particle impurities, and manufacturing a cleaned packaging substrate. The target substrate is a glass packaging substrate, or a packaging substrate, and the packaging substrate comprises the glass packaging substrate and a redistribution layer disposed on at least one surface of the glass packaging substrate.
1 . A cleaned packaging substrate manufacturing method, the method comprising:
disposing, in a preparing process, a target substrate inside a chamber; and
jetting, in a removing process, ionized air on at least one surface of the target substrate to separate particle impurities, and obtain a cleaned packaging substrate,
wherein the target substrate is at least one of a glass packaging substrate; and a packaging substrate, and
wherein the packaging substrate comprises the glass packaging substrate and a redistribution layer disposed on at least one surface of the glass packaging substrate.
2 . The method of claim 1 , wherein the removing process is configured to inhibit the occurrence of static electricity by ionized air by irradiating soft X-rays to the target substrate.
3 . The method of claim 1 , wherein an atmosphere of a chamber in the removing process has a flow of air which is applied with a force in a direction opposite to a direction of gravity.
4 . The method claim 1 , wherein the ionized air that is jetted in the removing process is one of an inert gas and dry air.
5 . The method of claim 1 , wherein the residual electrification potential of the substrate in the removing process is 0 V.
6 . The method of claim 1 , wherein a space inside the chamber in the removing process is maintained at a low-pressure atmosphere of 0.9 atmospheric pressure or less.
7 . The method of claim 1 ,
wherein the jetting of the ionized air in the removing process is performed on one of a first surface of the substrate and a second surface of the substrate, and
wherein the air flows at an angle of 30 degrees to 150 degrees based on the first surface of the substrate.
8 . The method of claim 1 ,
wherein the glass packaging substrate comprises a through via that penetrates in a thickness direction thereof, and
wherein the through via has an opening with a maximum length of 300 μm or less.
9 . The method of claim 1 ,
wherein the redistribution layer of the packaging substrate comprises a blind via, and
wherein the blind via comprises an opening with a maximum length of 20 μm or less.
10 . A packaging substrate manufactured by the manufacturing method for a cleaned packaging substrate according to claim 1 .