IP Library Granted Patent US 11,942,356
Granted Patent B2
US 11,942,356 · App. 18/025,577 · Granted Mar 26, 2024

Clipping mechanism for fastening a substrate for a surface treatment of the substrate

Inventors: Andreas Gleissner (Dobriach, AT); Ulrich Tschinderle (Villach, AT)
Assignee: SEMSYSCO GMBH
H01L21/68721H01L21/68707H01L21/68728H01L21/68742
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Quick Facts
Patent No.
US 11,942,356
App. No.
18/025,577
Granted
Mar 26, 2024
Kind
B2
Abstract

The disclosure relates to a clipping mechanism for fastening a substrate for a surface treatment of the substrate, a clipping module for holding a substrate for a surface treatment of the substrate and a method for assembling a clipping mechanism for fastening a substrate for a surface treatment of the substrate. The clipping mechanism for fastening a substrate for a surface treatment of the substrate comprises a clipping bracket and an actuation unit. The clipping bracket comprises in a cross-section a first arm and a second arm. The first arm is moveable relative to the second arm to a receiving position for the substrate with a receiving distance between the first arm and the second arm. The first arm is moveable relative to the second arm to a fastening position for the substrate with a fastening distance between the first arm and the second arm. The fastening distance is smaller than the receiving distance. The actuation unit is at least partially surrounded by the clipping bracket. At least a portion of the actuation unit is moveable relative to the clipping bracket to move the first arm in the receiving position or the fastening position.

Claims (29)

1. A clipping mechanism for fastening a substrate for a surface treatment of the substrate, comprising:

a clipping bracket, and

an actuation unit comprising an inflatable body,

wherein the clipping bracket comprises in a cross-section a first arm and a second arm,

wherein the first arm is moveable relative to the second arm to a receiving position for the substrate with a receiving distance between the first arm and the second arm and to a fastening position for the substrate with a fastening distance between the first arm and the second arm,

wherein the fastening distance is smaller than the receiving distance,

wherein the actuation unit is at least partially surrounded by the clipping bracket,

wherein the actuation unit comprises a channel extending at least partially along a longitudinal axis (L) of the actuation unit and at least an opening connected to the channel and directed to the clipping bracket to apply a fluid or a gas to the substrate and/or the clipping bracket, and

wherein the inflatable body of the actuation unit is inflatable relative to the clipping bracket to move the first arm in the receiving position or the fastening position.

2. The clipping mechanism according to claim 1 , further comprising a pump unit configured to inflate the inflatable body relative to the clipping bracket.

3. A clipping module for holding a substrate for a surface treatment of the substrate, comprising:

a first clapping mechanism for fastening a substrate, comprising:

a clipping bracket, and

an actuation unit,

wherein the clipping bracket comprises in a cross-section a first arm and a second arm,

wherein the first arm is moveable relative to the second arm to a receiving position for the substrate with a receiving distance between the first arm and the second arm and to a fastening position for the substrate with a fastening distance between the first arm and the second arm,

wherein the fastening distance is smaller than the receiving distance,

wherein the actuation unit is at least partially surrounded by the clipping bracket, and

wherein at least a portion of the actuation unit is moveable relative to the clipping bracket to move the first arm in the receiving position or the fastening position,

a second clipping mechanism, and

a connecting unit,

wherein the connecting unit is arranged between the first clipping mechanism and the second clipping mechanism to connect the first clipping mechanism and the second clipping mechanism so that the first clipping mechanism, the connecting unit and the second clipping mechanism together at least partially surround three lateral sides of the substrate,

wherein the actuation unit comprises a channel extending at least partially along a longitudinal axis (L) of the actuation unit and at least an opening connected to the channel and directed to the clipping bracket to apply a fluid or a gas to the substrate and/or the clipping bracket.

4. The clipping module according to claim 3 , further comprising a positioning unit configured to rotate at least the first clipping mechanism relative to the connecting unit into a loading position for the substrate.

5. A method for assembling a clipping mechanism for fastening a substrate for a surface treatment of the substrate, comprising:

providing a clipping bracket comprising in a cross-section a first arm and a second arm, wherein at least the first arm is moveable relative to the second arm to a receiving position for the substrate with a receiving distance between the first arm and the second arm and to a fastening position for the substrate with a fastening distance between the first arm and the second arm, wherein the fastening distance is smaller than the receiving distance, and

providing an actuation unit comprising an inflatable body to be at least partially surrounded by the clipping bracket, wherein the actuation unit comprises a channel extending at least partially along a longitudinal axis (L) of the actuation unit and at least an opening connected to the channel and directed to the clipping bracket to apply a fluid or a gas to the substrate and/or the clipping bracket, and wherein the inflatable body of the actuation unit is inflatable relative to the clipping bracket to move the first arm in the receiving position or the fastening position.

6. The method according to claim 5 , further comprising:

providing a substrate in an opening provided by the first arm, when the first arm is in the receiving position.

Assignments (2)
CHANGE OF NAME Recorded Mar 11, 2026
From: SEMSYSCO GMBH
To: LAM RESEARCH SALZBURG GMBH
Reel/Frame 075091/0218 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2023
From: GLEISSNER, ANDREAS; TSCHINDERLE, ULRICH
To: SEMSYSCO GMBH
Reel/Frame 062989/0216 →
Priority Claims (1)
EP 20202781 · Oct 20, 2020 · regional
Continuity (1)
Related Publication 20230260823A1 · Aug 17, 2023