JOINED BODY, HOLDING DEVICE, AND ELECTROSTATIC CHUCK
A joined body includes a first member and a second member which are joined together via a joining portion including a metal layer having a plurality of pores communicating with each other. The first member and the metal layer have respective through holes formed in the first member and the metal layer, respectively, and communicating with each other. A tubular member is disposed between an inner side portion of the through hole formed in the metal layer and an interior portion of the metal layer.
1 . A joined body in which a first member and a second member are joined together via a joining portion including a metal layer having a plurality of pores communicating with each other, wherein
the first member and the metal layer have respective through holes formed in the first member and the metal layer, respectively, and communicating with each other, and
a tubular member is disposed between an inner side portion of the through hole formed in the metal layer and an interior portion of the metal layer.
2 . The joined body according to claim 1 , wherein
a through hole communicating with the through holes formed in the first member and the metal layer, respectively, is formed in the second member.
3 . The joined body according to claim 2 , wherein
one end portion of the tubular member is disposed in the through hole formed in the first member, and the other end portion of the tubular member is disposed in the through hole formed in the second member.
4 . The joined body according to claim 1 , wherein
a bellows portion is formed along a circumference of the tubular member to extend in a circumferential direction.
5 . The joined body according to claim 1 , wherein
the tubular member is formed of the same material as the metal layer.
6 . The joined body according to claim 1 , wherein
the tubular member has a circular cross section taken perpendicular to an axial direction of the tubular member.
7 . A holding apparatus comprising the joined body according to claim 1 , wherein
the second member has a placement surface on which an object to be held is placed.
8 . An electrostatic chuck comprising the holding apparatus according to claim 7 , wherein
the second member has an electrostatic attraction electrode disposed therein.
9 . The joined body according to claim 2 , wherein
a bellows portion is formed along a circumference of the tubular member to extend in a circumferential direction.
10 . The joined body according to claim 3 , wherein
a bellows portion is formed along a circumference of the tubular member to extend in a circumferential direction.
11 . The joined body according to claim 2 , wherein
the tubular member is formed of the same material as the metal layer.
12 . The joined body according to claim 3 , wherein
the tubular member is formed of the same material as the metal layer.
13 . The joined body according to claim 4 , wherein
the tubular member is formed of the same material as the metal layer.
14 . The joined body according to claim 2 , wherein
the tubular member has a circular cross section taken perpendicular to an axial direction of the tubular member.
15 . The joined body according to claim 3 , wherein
the tubular member has a circular cross section taken perpendicular to an axial direction of the tubular member.
16 . The joined body according to claim 4 , wherein
the tubular member has a circular cross section taken perpendicular to an axial direction of the tubular member.
17 . The joined body according to claim 5 , wherein
the tubular member has a circular cross section taken perpendicular to an axial direction of the tubular member.
18 . A holding apparatus comprising the joined body according to claim 2 , wherein
the second member has a placement surface on which an object to be held is placed.
19 . A holding apparatus comprising the joined body according to claim 3 , wherein
the second member has a placement surface on which an object to be held is placed.
20 . A holding apparatus comprising the joined body according to claim 4 , wherein
the second member has a placement surface on which an object to be held is placed.