Joined body, holding device, and electrostatic chuck
A joining layer of a joined body includes a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.
1. A joined body in which a first member and a second member are joined together via a joining layer, wherein
the joining layer includes
a joining material which contains, as a main component, a metal having a surface tension of 1000 mN/m or less at its melting point, and
a metal layer which has a plurality of pores formed therein and in which at least some of the pores are impregnated with the joining material.
2. The joined body according to claim 1 , wherein the metal layer is formed of a material which contains molybdenum or tungsten as a main component.
3. The joined body according to claim 1 , wherein the metal layer is formed of a material which contains aluminum or titanium as a main component.
4. The joined body according to claim 1 , wherein
the metal layer is a mesh member, and
surfaces of wires of the mesh member are formed of a material which contains gold, silver, or copper as a main component.
5. The joined body according to claim 1 , wherein
the metal layer is a mesh member formed such that a plurality of wires intersect with each other in a plain weave fashion, a twill weave fashion, or a Dutch weave fashion, and
portions of each wire which intersect with other wires located adjacent to the wire are not connected to the other wires.
6. The joined body according to claim 1 , wherein
the metal layer is a mesh member, and
the mesh member has a mesh interval of 70 to 1500 micrometers.
7. The joined body according to claim 1 , wherein
the metal layer is a mesh member, and
wires of the mesh member have a diameter of 50 to 400 micrometers.
8. The joined body according to claim 1 , wherein
the joining material contains indium as a main component.
9. A holding apparatus comprising the joined body according to claim 1 , wherein the first member has a placement surface on which an object to be held is placed.
10. An electrostatic chuck comprising the holding apparatus according to claim 9 , wherein the first member has an electrostatic attraction electrode disposed therein.
11. The joined body according to claim 2 , wherein
the metal layer is a mesh member, and
surfaces of wires of the mesh member are formed of a material which contains gold, silver, or copper as a main component.
12. The joined body according to claim 3 , wherein
the metal layer is a mesh member, and
surfaces of wires of the mesh member are formed of a material which contains gold, silver, or copper as a main component.
13. The joined body according to claim 2 , wherein
the metal layer is a mesh member formed such that a plurality of wires intersect with each other in a plain weave fashion, a twill weave fashion, or a Dutch weave fashion, and
portions of each wire which intersect with other wires located adjacent to the wire are not connected to the other wires.
14. The joined body according to claim 3 , wherein
the metal layer is a mesh member formed such that a plurality of wires intersect with each other in a plain weave fashion, a twill weave fashion, or a Dutch weave fashion, and
portions of each wire which intersect with other wires located adjacent to the wire are not connected to the other wires.
15. The joined body according to claim 4 , wherein
the metal layer is a mesh member formed such that a plurality of wires intersect with each other in a plain weave fashion, a twill weave fashion, or a Dutch weave fashion, and
portions of each wire which intersect with other wires located adjacent to the wire are not connected to the other wires.
16. The joined body according to claim 2 , wherein
the metal layer is a mesh member, and
the mesh member has a mesh interval of 70 to 1500 micrometers.
17. A joined body according to claim 2 , wherein
the metal layer is a mesh member, and
wires of the mesh member have a diameter of 50 to 400 micrometers.
18. The joined body according to claim 2 , wherein
the joining material contains indium as a main component.
19. A holding apparatus comprising the joined body according to claim 2 , wherein the first member has a placement surface on which an object to be held is placed.
20. An electrostatic chuck comprising the holding apparatus according to claim 19 , wherein the first member has an electrostatic attraction electrode disposed therein.