Granted Patent B2

US 12,422,700 · App. 18/043,427 · Granted Sep 23, 2025

Inventors: Wolfgang Heni (Zurich, CH); Eva De Leo (Zurich, CH); Patrick Habegger (Zurich, CH)

Assignee: Polariton Technologies AG

G02F1/065G02B5/008G02B6/1226G02F2203/10

Abstract

Claims (80)

1. A plasmonic device comprising

a substrate,

a plasmonic section arranged on the substrate, the plasmonic section including at least one inorganic confining structure adjacent to an organic optical material providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

a protective layer covering and/or enclosing the organic optical material,

wherein the protective layer has a water-vapor transmission rate below at least one of 1×10 −1 g/(m 2 day), 1×10 −3 g/(m 2 day), and 1×10 −5 g/(m 2 day).

2. A plasmonic device comprising

a substrate,

a plasmonic section arranged on the substrate, the plasmonic section including at least one inorganic confining structure adjacent to an organic optical material providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

a protective layer covering and/or enclosing the organic optical material,

wherein the protective layer has an oxygen permeation rate below at least one of 100 cm 3 /(m 2 day), 1×10 −0 cm 3 /(m 2 day), 1×10 −2 cm 3 /(m 2 day), and 1×10 −4 cm 3 /(m 2 day).

3. A plasmonic device comprising

a substrate,

a plasmonic section arranged on the substrate, the plasmonic section including at least one inorganic confining structure adjacent to an organic optical material providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

a protective layer covering and/or enclosing the organic optical material,

wherein the protective layer includes a combination of an inorganic material and an organic material.

4. The plasmonic device of claim 1 wherein the protective layer includes a nano-laminate.

5. The plasmonic device of claim 1 wherein the organic optical material partially covers the inorganic confining structures.

6. The plasmonic device of claim 1 wherein the limited area of the organic optical material is at least ten times smaller than an area of the substrate.

7. The plasmonic device of claim 1 having two inorganic confining structures with a gap between them, wherein the limited area of the organic optical material is at least ten times larger than an area of the gap.

8. The plasmonic device of claim 1 wherein the protective layer includes at least one of glass, aluminum nitride, Al2O3, HfO2, SiO2, ZrO2, ZnO, SiN, silicon oxynitride, TiO2, TiN, and organic materials.

9. The plasmonic device of claim 1 wherein the protective layer is structured to only partially extend over the inorganic confining structures.

10. A plasmonic device comprising

a substrate,

a plasmonic section arranged on the substrate, the plasmonic section including at least one inorganic confining structure adjacent to an organic optical material providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

a protective layer covering and/or enclosing the organic optical material,

wherein the protective layer includes a first protective sublayer and a second protective sublayer, and

wherein the protective sublayers include different materials.

11. A plasmonic device comprising

a substrate,

a plasmonic section arranged on the substrate, the plasmonic section including more than one inorganic confining structure adjacent to an organic optical material providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and wherein the confining structures comprise electrodes, and

a protective layer covering and/or enclosing the organic optical material,

auxiliary electrical components, and

further auxiliary components,

wherein the auxiliary electrical components form electrical lines providing an electrical connection between the further auxiliary components and the inorganic confining structures, and

wherein the electrodes are covered by the protective layer, and

wherein the auxiliary electrical components are partially covered by the protective layer, thereby providing access to the auxiliary electrical components.

12. A method for fabricating a plasmonic device, the method comprising:

providing a substrate,

arranging on the substrate a plasmonic section which includes at least one inorganic confining structure adjacent to an organic optical material for providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

depositing a protective layer for covering and/or enclosing the organic optical material for improved reliability of the plasmonic waveguide, wherein

the protective layer is deposited by means of one or more thin film deposition processes including at least one of an atomic layer deposition process, a sputtering process, and a molecular layer deposition process.

13. A method for fabricating a plasmonic device, the method comprising:

providing a substrate,

arranging on the substrate a plasmonic section which includes at least one inorganic confining structure adjacent to an organic optical material for providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

depositing a protective layer for covering and/or enclosing the organic optical material for improved reliability of the plasmonic waveguide, wherein

the protective layer is manufactured with a structured design using at least one of a lithographic process and a masking process.

14. The method of claim 13 comprising the step of

removing areas or sections of the protective layer where the protective layer is not required.

15. A method for fabricating a plasmonic device, the method comprising:

providing a substrate,

arranging on the substrate a plasmonic section which includes at least one inorganic confining structure adjacent to an organic optical material for providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

depositing at least one protective layer for covering and/or enclosing the organic optical material for improved reliability of the plasmonic waveguide,

wherein the depositing of the at least one protective layer comprises:

depositing a first protective layer,

followed by wire-bonding, and

followed by depositing a second protective layer.

16. A method for fabricating a plasmonic device, the method comprising:

providing a substrate,

arranging on the substrate a plasmonic section which includes at least one inorganic confining structure adjacent to an organic optical material for providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

depositing a protective layer for covering and/or enclosing the organic optical material for improved reliability of the plasmonic waveguide,

wherein the protective layer is deposited in a deposition process applied at temperatures of at least one of: below 200° C., below 140° C., and below 100° C.

17. The method of claim 15 further comprising the steps depositing a first and a second protective layer using different deposition processes.

18. A method for fabricating a plasmonic device, the method comprising:

providing a substrate,

arranging on the substrate a plasmonic section which includes at least one inorganic confining structure adjacent to an organic optical material for providing a plasmonic waveguide, wherein the organic optical material is arranged in a limited area, and

depositing a protective layer for covering and/or enclosing the organic optical material for improved reliability of the plasmonic waveguide, wherein the depositing of the protective layer comprises:

depositing a plurality of protective sublayers and

using one or more of the protective sublayer as a mask for structuring the organic optical material in the limited area.

19. The plasmonic device of claim 1 wherein the protective layer fully encloses the organic optical material.

20. The plasmonic device of claim 1 with more than one inorganic confining structure, wherein

the organic optical material is an electro-optic material and

the inorganic confining structures are electrodes or are electrically contacted to electrodes.

21. The plasmonic device of claim 1 wherein the organic optical material is an organic nonlinear optical material having second-order nonlinearity.

22. The method of claim 16 , wherein the organic optical material is arranged using one or more of a local deposition process and a combination of a deposition process and a structuring process.

23. The method of claim 16 , wherein the protective layer is deposited using one or more thin film deposition processes.

24. The method of claim 16 comprising the step of depositing the protective layer to fully enclose the organic optical material.

25. The method of claim 16 comprising the step of using a combination of a deposition process and a structuring process to arrange the organic optical material in the limited area.

26. The method of claim 25 wherein the combination of the deposition process and the structuring process comprises at least one of an ink-jet printing process, an aerosol printing process, a drop-casting process, a dispensing process, an etching process, a lift-off process, a local growth process, a mechanical or thermal structuring process, a masking process, and a lithographic process.

27. The method of claim 16 comprising the step of

arranging the organic optical material in the limited area by means of spin-coating in combination with a lithographic process.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (34)