Compact direct drive spindle

1. A sealed actuator comprising:

stacked motor modules, each motor module having:

a motor module housing,

a motor stator attached to the motor module housing,

a motor rotor in communication with the motor stator, and

a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor;

where the motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

2. The sealed actuator of claim 1 , wherein the motor stator of each motor module is isolated from vacuum.

3. The sealed actuator of claim 1 , further comprising an encoder interfacing with each of the stacked motor modules, the encoder including a sensor system and at least one scale, the sensor system being mounted to the motor module housing and the scale is integrated into the motor rotor of a respective one of the stacked motor modules such that an interface plane between the sensor system and the scale is arranged at an angle relative to an interface plane between the motor stator and the motor rotor of the respective one of the stacked motor modules.

4. The sealed actuator of claim 1 , wherein:

the motor stator comprises two stator winding segments; and

the motor rotor includes an inner rotor that is circumscribed by the motor stator and an outer rotor that circumscribes the motor stator;

wherein, the two stator segments are configured so each of the two stator winding segments drives a respective one of the inner rotor and outer rotor independently of each other.

5. The sealed actuator of claim 4 , wherein the two stator winding segments include two sets of nested coils.

6. The sealed actuator of claim 1 , wherein the stacked motor modules are configured for placement in a joint of a substrate transport apparatus arm so as to be at least partially within at least one arm link of the substrate transport apparatus arm.

7. The sealed actuator of claim 6 , wherein one of the stacked motor modules is configured to couple with the at least one arm link for substantially directly driving rotation of the at least one arm link and another of the stacked motor modules is configured to drive a transmission within the at least one arm link.

8. The sealed actuator of claim 7 , where:

the at least one arm link is an upper arm of the substrate transport apparatus arm and the one of the stacked motor modules is configured to drive rotation of the upper arm; and

the transmission drives a forearm of the substrate transport apparatus arm and the another of the stacked motor modules is configured to drive rotation of the forearm through the transmission.

9. A sealed actuator comprising:

drive motors arrayed in column, each drive motor having:

a motor housing,

a motor stator attached to the motor housing,

a motor rotor in communication with the motor stator, and

a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a sealing housing surface of the motor housing, facing the motor rotor to seal the motor stator from the motor rotor;

where the drive motors arrayed in column are arrayed at different heights with respect to each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to respective stator seals of the motor housings forms a substantially continuous seal interface of the drive motors arrayed in column sealed by the stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

10. The sealed actuator of claim 9 , wherein the motor stator of each drive motor is isolated from vacuum.

11. The sealed actuator of claim 9 , further comprising an encoder interfacing with each of the drive motors arrayed in column, the encoder including a sensor system and at least one scale, the sensor system being mounted to the motor housing and the scale is integrated into the motor rotor of a respective one of the drive motors arrayed in column such that an interface plane between the sensor system and the scale is arranged at an angle relative to an interface plane between the motor stator and the motor rotor of the respective one of the drive motors arrayed in column.

12. The sealed actuator of claim 9 , wherein:

the motor stator comprises two stator winding segments; and

the motor rotor includes an inner rotor that is circumscribed by the motor stator and an outer rotor that circumscribes the motor stator;

wherein, the two stator segments are configured so each of the two stator winding segments drives a respective one of the inner rotor and outer rotor independently of each other.

13. The sealed actuator of claim 12 , wherein the two stator winding segments include two sets of nested coils.

14. The sealed actuator of claim 9 , wherein the drive motors arrayed in column are configured for placement in a joint of a substrate transport apparatus arm so as to be at least partially within at least one arm link of the substrate transport apparatus arm.

15. The sealed actuator of claim 14 , wherein one of the drive motors arrayed in column is configured to couple with the at least one arm link for substantially directly driving rotation of the at least one arm link and another of the drive motors arrayed in column is configured to drive a transmission within the at least one arm link.

16. The sealed actuator of claim 15 , where:

the at least one arm link is an upper arm of the substrate transport apparatus arm and the one of the stacked motor modules is configured to drive rotation of the upper arm; and

the transmission drives a forearm of the substrate transport apparatus arm and the another of the stacked motor modules is configured to drive rotation of the forearm through the transmission.