IP Library Granted Patent US 12,378,683
Granted Patent B2
US 12,378,683 · App. 18/047,350 · Granted Aug 5, 2025

Sputtering-based catalyst deposition on particles for membrane electrode assembly (MEA) catalyst layer

Inventor: Qingying Jia (Latham, NY)
Assignee: Plug Power Inc.
C25B11/054C23C14/08C23C14/223C23C14/35C25B1/04C25B9/23C25B11/052C25B11/069C25B11/075
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,378,683
App. No.
18/047,350
Granted
Aug 5, 2025
Kind
B2
Abstract

Catalyst sputtering-based methods of facilitating forming a membrane electrode assembly (MEA) catalyst layer are provided. The methods include forming a catalyst ink, including obtaining a powder including a plurality of support particles, and depositing, via sputtering, a catalyst onto the plurality of support particles to form a supported catalyst for the catalyst ink. Further, the method includes providing the catalyst ink with the supported catalyst on a membrane to facilitate forming the catalyst layer of the membrane electrode assembly.

Claims (34)

1. A method comprising:

forming a catalyst ink, including:

obtaining a powder comprising a plurality of support particles;

loading the powder into a fluidized bed in a container within a vacuum chamber;

vibrating the container in a vacuum within the vacuum chamber, by applying an upward and downward force on the container, to generate upward and downward vibration action on support particles in the fluidized bed in the container within the vacuum chamber while depositing, via sputtering, a catalyst onto the plurality of support particles to provide uniform distribution of sputtered catalyst onto the plurality of support particles to form a supported catalyst for the catalyst ink, wherein the supported catalyst on the plurality of support particles comprises, at least in part, a hydrous oxide catalyst; and

providing the catalyst ink with the supported catalyst on a membrane to facilitate forming a catalyst layer of a membrane electrode assembly.

2. The method of claim 1 , wherein the sputtering comprises physical vapor deposition (PVD) sputtering of the catalyst onto the plurality of support particles to form the supported catalyst.

3. The method of claim 2 , wherein the catalyst comprises at least one catalyst material selected from the group consisting of iridium, iridium oxide, ruthenium, ruthenium oxide, platinum and platinum black.

4. The method of claim 3 , wherein support particles of the plurality of support particles comprise at least one of metal oxide particles, doped metal oxide particles, metal boride particles, or doped metal boride particles.

5. The method of claim 4 , wherein the metal oxide particles comprise a metal oxide selected from the group consisting of titanium oxide, zirconium oxide, niobium oxide, tantalum oxide and tin oxide.

6. The method of claim 4 , wherein the doped metal oxide particles comprise a dopant selected from the group consisting of tungsten, molybdenum, niobium and fluorine.

7. The method of claim 4 , wherein the metal boride particles comprise a metal boride selected from the group consisting of titanium boride, zirconium boride, and niobium boride.

8. The method of claim 1 , wherein the catalyst layer of the membrane electrode assembly is an anode catalyst layer of the membrane electrode assembly.

9. A method comprising:

forming an iridium-based (Ir-based) catalyst ink, including:

obtaining a powder comprising a plurality of support particles, including metal oxide particles, doped metal oxide particles, metal boride particles, or doped metal boride particles;

loading the powder into a fluidized bed in a container within a vacuum chamber;

vibrating the container in a vacuum within the vacuum chamber, by applying an upward and downward force on the container, to generate upward and downward vibration action on support particles in the fluidized bed in the container within the vacuum chamber while depositing, via sputtering, an iridium-based catalyst onto the plurality of support particles to provide uniform distribution of sputtered catalyst onto the plurality of support particles to form a supported Ir-based catalyst for the catalyst ink, wherein the supported Ir-based catalyst on the plurality of support particles comprises, at least in part, a hydrous oxide catalyst; and

providing the catalyst ink with the supported Ir-based catalyst on a membrane to facilitate forming a catalyst layer of a membrane electrode assembly.

10. The method of claim 9 , wherein the sputtering comprises physical vapor deposition (PVD) sputtering of the iridium-based catalyst onto the plurality of support particles to form the supported Ir-based catalyst.

11. The method of claim 10 , wherein the metal oxide particles comprise a metal oxide selected from the group consisting of titanium oxide, zirconium oxide, niobium oxide, tantalum oxide and tin oxide.

12. The method of claim 10 , wherein the doped metal oxide particles comprise a dopant selected from the group consisting of tungsten, molybdenum, niobium and fluorine.

13. The method of claim 9 , wherein the metal boride particles comprise a metal boride selected from the group consisting of titanium boride, zirconium boride, and niobium boride.

14. A method comprising:

forming a catalyst ink, including:

obtaining a powder comprising a plurality of support particles;

loading the powder into a fluidized bed in a container within a vacuum chamber;

vibrating the container in a vacuum within the vacuum chamber, by applying an upward and downward force on the container, to generate upward and downward vibration action on support particles in the fluidized bed in the container within the vacuum chamber while depositing, via sputtering, a catalyst onto the plurality of support particles to provide uniform distribution of sputtered catalyst onto the plurality of support particles to form a supported catalyst for the catalyst ink, wherein the supported catalyst on the plurality of support particles comprises, at least in part, a hydrous oxide catalyst;

providing the catalyst ink on a membrane to facilitate forming an anode catalyst layer of a membrane electrode assembly; and

wherein the catalyst ink comprises a plurality of supported catalysts, each of the supported catalysts comprising a core and a shell, the core comprising a support particle of the plurality of support particles, and the shell comprising a hydrous oxide catalyst.

15. The method of claim 14 , wherein the sputtering comprises physical vapor deposition (PVD) sputtering of the catalyst onto the plurality of support particles to form the supported catalyst.

16. The method of claim 15 , wherein the plurality of support particles include metal oxide particles or doped metal oxide particles, the metal oxide particles comprising a metal oxide selected from the group consisting of titanium oxide, zirconium oxide, niobium oxide, tantalum oxide and tin oxide.

17. The method of claim 15 , wherein the plurality of support particles include metal oxide particles or doped metal oxide particles, the doped metal oxide particles comprising a dopant selected from the group consisting of tungsten, molybdenum, niobium and fluorine.

18. The method of claim 14 , wherein the plurality of support particles include metal boride particles or doped metal boride particles, the metal boride particles comprising a metal boride selected from the group consisting of titanium boride, zirconium boride, and niobium boride.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Nov 25, 2025
From: YA II PN, LTD., IN ITS CAPACITY AS COLLATERAL AGENT
To: PLUG POWER, INC.; PLUG POWER HYDROGEN HOLDINGS, INC.; UNITED HYDROGEN GROUP INC.; PLUG PROJECT HOLDING CO., LLC; PEACHTREE RENEWABLES, LLC; JOULE PROCESSING LLC; APPLIED CRYO TECHNOLOGIES, INC.; ALLOY CUSTOM PRODUCTS, LLC; HYPULSION U.S. HOLDING, INC.
Reel/Frame 073036/0448 →
SECURITY INTEREST Recorded Apr 28, 2025
From: PLUG POWER INC.; APPLIED CRYO TECHNOLOGIES, INC.; PLUG POWER HYDROGEN HOLDINGS, INC.; UNITED HYDROGEN GROUP INC.; ALLOY CUSTOM PRODUCTS, LLC; JOULE PROCESSING LLC; PEACHTREE RENEWABLES, LLC; PLUG PROJECT HOLDING CO., LLC; HYPULSION U.S. HOLDING, INC.
To: YA II PN, LTD., IN ITS CAPACITY AS COLLATERAL AGENT
Reel/Frame 071084/0264 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 18, 2022
From: JIA, QINGYING
To: PLUG POWER INC.
Reel/Frame 061453/0614 →
Continuity (1)
Related Publication 20240124993A1 · Apr 18, 2024
References Cited (16)
US 2280649A · Kanhofer · 1942 [cited by examiner]
US 4940523A · Takeshima · 1990 [cited by examiner]
US 8263290B2 · Lopez et al. · 2012 [cited by applicant]
US 11124885B2 · Xu et al. · 2021 [cited by applicant]
US 20020034675A1 · Starz · 2002 [cited by examiner]
US 20060115711A1 · Kim et al. · 2006 [cited by applicant]
US 20060254903A1 · Abe · 2006 [cited by examiner]
US 20090054230A1 · Veeraraghavan · 2009 [cited by examiner]
US 20220023946A1 · Ballantine et al. · 2022 [cited by applicant]
US 20220033982A1 · Park et al. · 2022 [cited by applicant]
EP 3222752A1 · 2017 [cited by applicant]
JP 2021113352A · 2021 [cited by applicant]
JP 2022045885A · 2022 [cited by applicant]
Lewinski et al., “NSTF Advances for PEM Electrolysis—The Effect of Alloying on Activity of NSTF Electrolyzer Catalysts and Performance of NSTF Based PEM Electrolyzers”, ECS Transactions, 69 (17) pp. 893-917 (Year: 2015). [cited by applicant]
Zhao et al., “Highly Active, Durable Dispersed Iridium Nanocatalyst for PEM Water Electrolyzers”, Journal of the Electrochemical Society, 165 (2) F82-89 (8 pages) (Year: 2018). [cited by applicant]
International Search Report & Written Opinion for PCT/US2023/071824, dated Nov. 29, 2023 (10 pages) (Year: 2023). [cited by applicant]